MICROSCOPE UNITS AND OBJECTIVES (UV, NUV, VISIBLE & NIR REGION) Optical Measuring PRE 1457(4)
2 Ref.: ”Microbio-World Ver.7, (http://elfe.miyakyo-u.ac.jp/opac/2008/03/cd_2.html) Many of today’s ultra-microscopic manufacturing technologies require sub-micron accuracy. Mitutoyo produces microscope systems with advanced features that combine optical and precision measurement technologies developed by us over a long period of time. Mitutoyo microscopes can be integrated into manufacturing systems, research and development equipment, and product inspection lines. Contact your nearest Mitutoyo Sales Office for further details on standard product specifications as well as custom-designed microscopes to best fit your application.
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4 A wealth of Applications By ins t alling a digit al camera on a micros cope the VMU provides a simple and compac t s y s tem which allows microphotography and simult aneous ex ternal monitor obser vations . The VMU can be used in ver tical and inver ted positions according to your application requirement s . Using a simplified s t and , it can be used as a compac t micros cope. > Microphotography and obser vation of met allic , resinous and printed sur faces > Micro -fluid analy sis > Cell and microorganism obser vation /analy sis Objec tives compatible with YAG laser s (10 6 4 nm, 532 nm, 355 nm and 266 nm) allow high precision and qualit y working. Using a simplified s t and , it can be used as a compac t micros cope. > Peeling of f protec tive films and organic thin -films > Cut ting of IC wiring (Au , Al ) and exposure of lower layer pat tern > FPD defec t s repair > Photomask repair > Marking , trimming , pat terning , spot annealing and s cribing Various laser s are suppor ted including femtosecond laser s . (For det ail s , please inquire.) Co l o r f i l t e r wo r k i ng SEM pho t og r aph o f I C s u r f a c e a f t e r r emov i ng uppe r l a y e r Optical s y s tems using Mitutoyo M Plan Apo NIR objec tives that cover a wide range of wavelength from visible to infrared are providing solutions on the produc tion line and in the laborator y. Nondes truc tive inspec tion is made pos sible by using an infrared source. > Thicknes s measurement of LCD thin -film and silicon board film > Internal inspec tion /analy sis and 3D evaluation of MEMS devices > Internal obser vation of IC packages , void inspec tion /evaluation sensor of wafer junc tions > Spec tral charac teris tic s analy sis using an infrared source F l ak i ng o f po l y imi de memb r ane Integration example Digital microscope systems Laser applications IR analysis/inspection The VMU series provides a wide range of small , light weight micros cope unit s to be integrated into automatic optical inspec tion devices (AOI) and repair equipment of all sizes . Dual-camera (high & low magnification) observation 1/ 2 型カメラ （高倍率側） 2/3型カメラ （低倍率側） i n c h C a m e r a ( l o w m a g n i f i c a t i o n ) 1/ 2 i n c h C a m e r a ( h i g h m a g n i f i c a t i o n ) By mounting t wo Cameras on VMU - LB you can obser ve the s ame area at dif ferent magnifications simult aneously. UV l a s e r app l i c a t i on u s i ng VMU- L4B ( Sou r c e o f pho t og r aph s : HOYA CANDEO OPTRON I CS CORPORAT I ON ) UV l a s e r app l i c a t i on u s i ng VMU- L4B ( Sou r c e o f pho t og r aph s : V - Te chno l ogy Co . , L t d . )
5 Contents Microscope unit for incorporating in Equipment VMU. ..................................................................................6 Microscope unit FS70. ................................................................................. 14 Objec tives for Bright-field (long working dis tance) M Plan Apo. ..................................................................18 Objec tives for Bright-field (with cover- glas s thicknes s compensation) G Plan Apo. ...................................................................20 Objec tives for Bright / Dark-field (long working dis tance) BD Plan Apo. ............................................................... 21 Near- infrared Objec tives for Bright-field M Plan Apo NIR. .........................................................22 Near- infrared Objec tives for Bright-field (with cover- glas s thicknes s compensation) LCD Plan Apo NIR. .....................................................23 Near- ultraviolet Objec tives for Bright-field M Plan Apo NUV........................................................24 Near- ultraviolet Objec tives for Bright-field (with cover- glas s thicknes s compensation) LCD Plan Apo NUV....................................................25 Ultraviolet Objec tives for Bright-field M Plan UV......................................................................26 Ultraviolet Objec tives for Bright-field ( With cover- glass thickness compensation) LCD Plan UV..................................................................27 Tube lens MT. ....................................................................................28 Objec tives for Measuring Microscopes ML. ....................................................................................30 Objec tives for Centering microscopes CF.......................................................................................31 Wide field of view Eyepieces & Reticles WF. ....................................................................................32 Optional acces sories of VMU, WIDE VMU and FS70 Stand, Stage, Illumination Unit. ..............................33 Dimensions ( VMU/WIDE VMU/FS70). ........................34 Reference: Specifications of Objective Threads/ Transmission of Mitutoyo Objectives ..................36 Commentary: Laser Operating Method and Precautions . .......37 Glossary . .........................................................................38 See video from here. ht tps: // b cove.video / 3Kp 07QU
6 Microscope unit for incorporating in Equipment VMU VMU-V VMU-H VMU-LB VMU-L4B Objec tives shown mounted on tubes are optional. > Small, lightweight microscope unit (Suitable for obser ving a wide range of objec t s: metal, resin, printed sur faces, minute mechanisms, etc.) > Can used with YAG (near - infrared, visible, near - ultraviolet , or ultraviolet) laser s .*1 (Suitable for cut ting, trimming, repair and marking of IC wiring (Au, Al), removing and processing thin-film (insulating film) and repair of color filter s (defec t s repair).) > Compatible with infrared optical systems*2 > Equipped as standard with a telecentric illumination system with aper ture diaphragm for epi - illumination optical systems ( This is the best illumination system for image processing applications (e.g. dimension measurement, form inspec tion and positioning) which require even lighting.) > Models with enhanced rigidit y and per formance ( VMU - LB / VMU - L 4B). > Custom - order is available to meet the customer s' requirement s (Dual - camera, double magnification (high & low), etc.) *1: T he per formance and s afet y of las er- equipped s y s tem produc t s is not guaranteed. *2: An infrared source and infrared c amera are ne ces s ar y. F or more det ails on infrared obs er vat ion, cont ac t your loc al Mi tutoyo s ales of fice. Features M o d e l N o. VMU -V VMU - H VMU - L B VMU - L 4 B O rd e r N o. 378 - 5 0 5 378 - 5 0 6 378 - 513 378 - 514 Came ra mount ing o r i ent a t i on Ve r t i c a l H o r i zont a l Ve r t i c a l (rot a t ab l e) O b s e r va t i on B r i ght- fi e l d / Ere c t imag e B r i ght- fi e l d / I nve r te d imag e B r i ght- fi e l d / Ere c t imag e O pt i c a l tub e Came ra p o r t O pt i c a l fea ture s Magni fi c a t i on: 1X ; Wave l eng t h (λ) : v i s i b l e rad ia t i on M ount C- mount (cente r ing and p a r fo c a l a d jus tment ) C-mount with center ing and par focal adjus tment and green filter s witch Tub e l ens (co r re c t i on rang e) Bu i l t in 1X (v i s i b l e - N I R ) Bu i l t in 1X ( N U V - v i s i b l e - N I R ) Bu i l t in 1X ( U V - v i s i b l e - N I R ) L a s e r p o r t O pt i c a l fea ture s — Magni fi c a t i on: 1X λ: 355 / 532 /10 6 4 µm Magni fi c a t i on: 1X λ: 226 / 355 / 532 / 10 6 4 µm M ount — W i t h p a r fo c a l ad jus tment Su i t ab l e YAG la s e r t y p e *2 — Fundament a l, s e cond and t hi rd - ha rmoni c mo d e Fundament a l and s e cond, t hi rd and four t h - ha rmoni c mo d e P o la r i ze r uni t *1 Ava i lab l e fo r o b s e r va t i on Ava i lab l e fo r o b s e r va t i on and la s e r ap p l i c a t i ons Ava i lab l e fo r o b s e r va t i on and la s e r ap p l i c a t i ons Su i t ab l e o b j e c t i ve (o pt i ona l ) F o r o b s e r va t i on M Plan Apo / HR / SL , G Plan Apo F o r la s e r cu t t ing — M/LCD Plan Apo N I R , M/LCD Plan Apo NUV N o t e: S e l e c t e d d e p end i ng o n t h e wav e l eng t h o f t h e l a s e r s ou rce M/LCD Plan Apo NIR , M/LCD Plan Apo NUV, M Plan UV N o t e: S e l e c t e d d e p end i ng o n t h e wav e l eng t h o f t h e l a s e r s ou rce A p p l i c ab l e c ame ra 2 / 3 inch o r sma l l e r O pt i c a l s y s tem e p i - i l lumina t i on Te l e cent r i c w i t h ap e r ture d iaphragm I l lumina te d l ens tub e B r i ght- fi e l d i l lumina te d l ens tub e I l lumina t i on uni t (o pt i ona l ) F i b e r- o pt i c i l lumina t i on uni t (12 V, 10 0 W ) (378 -70 0) Ma in uni t ma s s 65 0 g 75 0 g 1270 g 13 0 0 g *1: M P lan Apo 1X obje c t i ve should be us ed together wi th a polar izer (378 -710 or 378 -715). N ote: Obs er ve the following pre c aut ions when using VMU - L B or L4B wi th YAG las er source at t ached. 1. Be aware of the las er power and energy densi t y. O ther wis e, the opt ic al s y s tem may be damaged. 2. Che ck the mas s of the las er source. When mount ing on a high - speed dev ice or accelerat ion /de celerat ion dev ice, pleas e cont ac t us . Specifications
7 Objec tives shown mounted on tubes are optional. WIDE VMU-HR WIDE VMU-BDV WIDE VMU-BDH > Obser vation over a wide field of view (Image field of ø30 mm) > Greatly enhanced brightness on the peripher y of the field of view (Reduces the dependence on the light distribution charac teristic s.) > Compatible with infrared optical systems*1 > Small optical obser vation system (Refer to page 35 for the dimensions.) > Compatible with HR series of high resolving power lens (Designed with pupil diameter of ø16.8) *1: An infrared source and infrared c amera are ne ces s ar y. F or more det ails on infrared obs er vat ion, cont ac t your loc al Mi tutoyo s ales of fice. > Ob ser vat i on over a wi de fie l d of vi ew ( Image field of ø30 mm) > Ava i lab l e for var i ou s ob ser vat i on method s ( I ncluding br ight-field, dark-field for v isual or s cratch inspe c t ion, and po lar ized obs er vat ion of obje c t s w i th polar iz at ion charac ter is t i c s) Features Features Specifications For Bright-field Obser vation For Bright / Dark-field Obser vation Model No. WI DE VMU - HR WI DE VMU - BDV WI DE VMU - BDH Order No. 378 - 519 378 - 517 378 - 518 Camera mounting orient ation Ver tical Ver tical Horizont al Obser vation Br ight-f ield / Erec t image Br ight / Dark-f ield / Erec t image Br ight / Dark-f ield / I nver ted image Optical tube Optical s y s tem Magnif ication: 1X V isible light - I nfrared light Magnification: 1X V isible light Camera Mount F - Mount , C- Mount (with aligning and par focal adjus tment mechanism) Imaging forming (tube) lens Built in 1X (v isible - N I R) Built in 1X (v isible) Image f ield ø30 Polar ized unit *1 Mount able Objec ti ve lens (required option) M Plan Apo, M Plan Apo HR , M Plan Apo SL , G Plan Apo, N I R series BD Plan Apo Applicable camera Diagonal line length: 30 mm or les s (equi valent to AP S - C format) Optical s y s tem epi - illumination Telecentr ic (Pupil diameter of ø16.8) *Coa x ial epi - illumination, with aper ture diaphragm Telecentric illumination, Bright / Dark-field illumination optical tube (Dual - por t fiber- optic illumination) Br ight / Dark-f ield switching with light source on - of f I lluminated lens tube Br ight-f ield illuminated lens tube (rot at able) * 3, selec t able bet ween L ED adapter and f iber adapter (both supplied as s t andard ) Br ight-f ield illuminated lens tube (rot at able) * 3 I llumination unit (optional ) *2 Fiber- optic illumination unit (12 V, 10 0 W ) (No. 378 -70 0) Main unit mas s 14 0 0 g 20 0 0 g 2150 g *1: Polar ized obs er vat ion by Br ight-f ield illuminat ion *2: Suppor t for third - par t y L ED illuminator s ( W I DE VMU - HR onl y) *3: T he f iber ( light source) mount or ient at ion c an be changed. Bright-field Infrared Dark-field
8 *1: Compatible with 1/2-inch or less C-mount cameras. *2: Use focusing unit B (378-706) if the distance between the mounting position and VMU main unit is desired to be as small as possible. If the manual turret nosepiece unit (378-707) is used concurrently, mount the unit in front of the VMU main unit. For details on mounting position, refer to the figures on page 10. *3: This turret nosepiece unit cannot be used with focusing unit B (378-706). For details on mounting position, refer to the figures on page 10. *4: Use this mount when mounting a C-mount camera using the laser port. Use this mount for 2/3-inch or smaller cameras. *5: Mitutoyo does not handle these lasers. Consult Mitutoyo for more information. *6: An adapter may be required when mounting any of these stages. Consult Mitutoyo for more information. VMU-V (378-505) VMU-H (378-506) VMU-LB (378-513) VMU-L4B (378-514) Transmitted light unit (378-736) P.33 Simple stand (378-730) P.33 Quad Manual turret nosepiece unit (for BF) *2 (378-707) (378-717) P.10 Polarizer (378-710) P.10 Polarizer (B) (378-715) P.10 Third-party YAG lasers*5 0.5X TV adapter unit *1 (378-704) P.10 2X TV adapter unit (378-703) Focusing unit A (378-705) P.10 Focusing unit B *2 (378-706) P.10 Objectives M Plan Apo series (for observation): All types on P.18 to 20 G Plan Apo series (for observation): All types on P.20 NIR series on P.22 to 23 (for fundamental/second harmonic laser machining) (for near-infrared observation) NUV series on P.24 to 25 (for second/third harmonic laser machining) UV series on P.26 to 27 (for second/fourth harmonic laser machining) Quintuple Self-aligning power turret nosepiece unit (for BF) *3 (378-713) P.10 C -moun t c ompa t i b l e ana l og c ame r a o r d i g i t a l c ame r a Fixed-magnification monitoring camera mount (378-087) P.10*4 P.33 X-Y stage (50×50 mm) (378-020) Third-party motorized X-Y stages (50×50 mm)*6 Fiber-optic illumination unit 100 W (378-700) P.33 1 2 A A B 2 5 1 N D 2 1 2 A A B 2 5 2 N D 8 1 2 A AG 8 0 6 G I F 1 2 A AG 8 0 7 L B 8 0 F i l t e r s ( f o r fi b e r - o p t i c i l l u m i n a t i o n u n i t N o .3 7 8 - 7 0 0) Fiber-optic illumination unit 100 W (378-700) P.33 1 2 A A B 2 5 1 N D 2 1 2 A A B 2 5 2 N D 8 1 2 A AG 8 0 6 G I F 1 2 A AG 8 0 7 L B 8 0 F i l t e r s ( f o r fi b e r - o p t i c i l l u m i n a t i o n u n i t N o .3 7 8 - 7 0 0) System diagram VMU
9 WIDE VMU-HR / WIDE VMU-BD WIDE VMU-BDV (378-517) WIDE VMU-BDH (378-518) Simple stand (378-730) P.33 Quad Quad Bright-field turret (378-724) P.11 Polarizer (C) (378-719) P.11 Focusing unit C (378-718) P.11 Objectives M Plan Apo series (for observation) Al l types on P.18 to 20 G Plan Apo series (for observation) Al l types on P.20 Objectives BD Plan Apo series (for observation) Al l types on P.21 Bright/Dark-field turret (378-725) P.11 C -moun t compa t i b l e ana l og c ame r a o r d i g i t a l c ame r a F -moun t compa t i b l e ana l og c ame r a o r d i g i t a l c ame r a C-moun t adap t e r P.25 X-Y stage (50×50 mm) (378-020) P.33 Third-party motorized X-Y stages (50×50 mm) *1 Transmitted l ight unit (378-736) P.33 Bright/Dark-field power turret (378-727) P.11 T A T U S POWER POWER T S A B C D U R R E T Bright-field power turret (378-726) P.11 A B C D E Quad Quintuple *1: An adapter may be required when mounting any of these stages. Consult Mitutoyo for more information. Support third-party LED illuminators P.35 Fiber-optic illumination unit 100 W (378-700) P.33 1 2 A A B 2 5 1 N D 2 1 2 A A B 2 5 2 N D 8 1 2 A AG 8 0 6 G I F 1 2 A AG 8 0 7 L B 8 0 F i l t e r s ( f o r fi b e r - o p t i c i l l u m i n a t i o n u n i t N o .3 7 8 - 7 0 0) Fiber-optic illumination unit 100 W (378-700) P.33 1 2 A A B 2 5 1 N D 2 1 2 A A B 2 5 2 N D 8 1 2 A AG 8 0 6 G I F 1 2 A AG 8 0 7 L B 8 0 F i l t e r s ( f o r fi b e r - o p t i c i l l u m i n a t i o n u n i t N o .3 7 8 - 7 0 0) NIR series on P.22 to 23 (for fundamental/second harmonic laser machining) (for near-infrared observation) WIDE VMU-HR （378-519） System diagram
10 Optional Accessories for VMU I ns t alled on 378 -717 VMU -V wi th opt ional obje c t i ves No. 378 -710 No. 378 -715 378 - 0 87 Mas s: 18 0 g F ocus uni t A mounted on VMU -V wi th an opt ional obje c t i ve 2 X T V adapter uni t 0.5X T V adapter uni t Has 4 - obje c t i ve mount s and c an be fi xed in the de sired posi t ion relat i ve ( inward, out ward, etc.) to the mount ing sur face. Has 5 obje c t i ve mount s and c an be fi xed in the de sired posi t ion relat i ve ( inward, out ward, etc.) to the mount ing sur face. Manual fo cus uni t s for the VMU. An opt ional s t and (378 -73 0) and X Y s t age (378 - 020) are prov ided to be us ed in combinat ion. C-mount adapter s for changing to a higher or lower magni fic at ion. Can be at t ached to the las er mount ( VMU - L B and VMU - L4 B) for dual - c amera s y s tem. I t is compat ibl e w i th 2 / 3 inch or small er C-mount c ameras . P rov ide s simpli fied po lar ized light obs er vat ion. A ls o enhance s cont ras t of low-magni fic at ion obje c t i ve s . Manual turret Power turret Focus unit A and B T V adapter unit Camera mount Polarizer and Analyzer O rd e r N o. 378 -713 O b s e r va t i on me t ho d B r i ght- fi e l d N o. of o b j e c t i ve mount s 5 (1 re fe rence ho l e and 4 ho l e s w i t h cente r ing a d jus tment V i ew fi e l d ad jus tment ± 0.5 mm P o s i t i oning a ccura c y 2 σ = 3 μm Durab i l i t y ( l i fe - t ime) 1 mi l l i on re p o s i t i oning o p e ra t i ons D r i ve me t ho d DC moto r P owe r sup p l y AC10 0 V - 24 0 V, 10 W O u t pu t inte r fa ce R S -232C *1 fo r e x te r na l P C cont ro l Cab l e l eng t h 2.9 m*2 (conne c t i on of p owe r tur re t and cons o l e b ox ) D imens i ons ( W x H x D) and ma s s Tur re t : 13 0 x47x18 6 mm, 1. 8 kg, Cons o l e b ox : 10 8 x 63 x176 mm, 810 g F o cus uni t A F o cus uni t B O rd e r N o. 378 -70 5 378 -70 6 Trave l rang e 5 0 mm Co a r s e / fine fe e d Co a r s e: 3. 8 mm / re v., F ine: 0.1 mm / re v. L o a d ing c ap a c i t y A p p rox . 17. 4 kg A p p rox . 17.7 kg Ma s s 2.9 kg 2.7 kg 2X TV adapter unit 0.5X TV adapter unit Order No. 378-703 378-704 Magnification 2X 0.5X Suitable camera 2/3 inch or smaller type 1/2 inch or smaller type Mass 25 g 25 g O rd e r N o. 378 -710 VMU -V • VMU - H O rd e r N o. 378 -715 VMU - L B • VMU - L 4 B I ns t alled on VMU - L4B *1: Opt ional R S -232C Cable: 12 A A A8 07 *2: T he length of c able conne c t ing the power tur ret and console box is a s afe ma x imum and therefore Mi tutoyo does not guarantee er ror-free operat ion i f a c able ex tension is us ed to increas e tot al c able length. I ns t a l l e d o n W I D E V M U w i t h o p t i o na l o b j e c t i v e s Console box O rd e r N o. 378 -707 378 -717 O b s e r va t i on me t ho d B r i ght- fi e l d N o. of o b j e c t i ve mount s 4 ( Re fe rence ho l e) 4 (1 re fe rence ho l e and 3 ho l e s w i t h cente r ing and p a r fo c a l a d jus tment ) Ma s s 78 0 g 9 9 0 g
11 Optional Accessories for WIDE VMU-HR / WIDE VMU-BD I ns t a l l e d o n 378 -724 W I D E V M U - H R w i t h o p t i o na l o b j e c t i v e s I ns t a l l e d o n N o. 378 -726 W I D E V M U - H R w i t h o p t i o na l o b j e c t i v e s No. 378 -719 F ocus uni t C mounted on W I DE VMU - HR wi th an opt ional obje c t i ve Has 4 - obje c t i ve mount s and c an be f i xed in the de sired posi t ion relat i ve ( inward, out ward, etc.) to the mount ing sur face. Has 5 - obje c t i ve mount s for Br ight-f i eld power tur ret and 4 - obje c t i ve mount s for Br ight / Dark-f i eld power tur ret. I t c an be f i xed in the de sired posi t ion relat i ve ( inward, out ward, etc.) to the mount ing sur face. Manual fo cus uni t s for the W I DE VMU. When an opt ional s t and (378 -730) is mounted, center of s t age and opt i c al a x is are matched. P rov ide s simpli f i ed po lar ized light obs er vat ion. A ls o enhance s cont ras t of low-magni f i c at ion obje c t i ve s . Bright-field turret Bright /Dark-field turret Bright-field power turret Bright /Dark-field power turret Focus unit C Polarizer and Analyzer (C ) O rd e r N o. 378 -726 378 -727 O b s e r va t i on me t ho d B r i ght-f i e l d B r i ght / Da r k-f i e l d N o. of o b j e c t i ve mount s 5 (1 reference hole and 4 holes w i t h cente r ing a d jus tment ) 4 ( Re fe rence ho l e) V i ew fi e l d ad jus tment ± 0.5 mm − P o s i t i oning a ccura c y 2 σ = 3 μm − Durab i l i t y ( l i fe - t ime) 1 mi l l i on re p o s i t i oning o p e ra t i ons − D r i ve me t ho d DC moto r − P owe r sup p l y AC10 0 V - 24 0 V Ma x . p owe r consumpt i on i s ap p rox . 10 W AC10 0 V - 24 0 V Ma x . p owe r consumpt i on i s ap p rox . 6 W O u t pu t inte r fa ce R S -232C*1 fo r e x te r na l P C cont ro l Cab l e l eng t h 2.9 m*2 (conne c t i on of p owe r tur re t and cons o l e b ox ) D imens i on: W×H×D (mm) Ma s s Tur re t : 13 0×47×18 6 mm, 1. 8 kg, Cons o l e box : 10 8×63×176 mm, 810 g Tur re t : 16 4×65×137 mm, 1. 8 kg, Cons o l e box : 10 8×72×193 mm, 810 g A p p l i c ab l e mo d e l s W I D E VMU - H R W I D E VMU - B DV W I DE VMU - B DH *1: O pt i ona l R S -232C Cab l e: 12 A A A 8 07 *2: T he l eng t h of c ab l e conne c t ing t he p owe r tur re t and cons o l e b ox i s a s a fe ma x imum and t he re fo re M i tu toyo d o e s not gua rante e e r ro r-f re e o p e ra t i on i f a c ab l e e x tens i on i s us e d to inc rea s e tot a l c ab l e l eng t h. F o cus uni t C O rd e r N o. 378 -718 Trave l rang e 5 0 mm Co a r s e / fine fe e d Co a r s e: 3. 8 mm / re v., F ine: 0.1 mm / re v. L o a d ing c ap a c i t y A p p rox . 17. 4 kg Ma s s 2.7 kg A p p l i c ab l e mo d e l s W I D E VMU (a l l mo d e l s) O rd e r N o. 378 -719 W I D E VMU (a l l mo d e l s) O rd e r N o. 378 -724 378 -725 O b s e r va t i on me t ho d Bright-field Bright/Dark-field N o. of o b j e c t i ve mount s 4 ( Re fe rence ho l e) 4 ( Re fe rence ho l e) Ma s s 825 g 755 g A p p l i c ab l e mo d e l s W I D E VMU - H R W I D E VMU - B DV W I DE VMU - B DH No. 378 -724 No. 378 -726 No. 378 -727 No. 378 -725
12 Dimensions of Optional Accessories for VMU When mount ing t he tur re t on VMU -V o r VMU - H N ote 1: T he lens mount mus t be removed from VMU. N ote 2: T he or ient at ion of the revol ver c an be freel y s et to the mount ing sur face. When mount ing t he tur re t on VMU -V o r VMU - H N ote 1: T he lens mount mus t be removed from VMU. N ote 2: T he or ient at ion of the revol ver c an be freel y s et to the mount ing sur face. When ins t a l l ing t he p o lar izer on VMU - L B o r VMU - L 4 B N ote: T he a n a l y z e r is ins t alled by loos ening the cover r ing. T he polar izer is ins t alled by remov ing the ver t ic al illuminat ion uni t wi th aper ture diaphragm. When mount ing t he tur re t on VMU - L B o r VMU - L 4 B N ote 1: T he middle opt ic al tube and lens mount mus t be removed from VMU. N ote 2: T he or ient at ion of the revol ver c an be freel y s et to the mount ing sur face. When mount ing t he tur re t on VMU - L B o r VMU - L 4 B N ote 1: T he middle opt ic al tube and lens mount mus t be removed from VMU. N ote 2: T he or ient at ion of the revol ver c an be freel y s et to the mount ing sur face. Power turret Focus unit A and B T V adapter unit Camera mount Polarizer and Analyzer (Parfocal distance) MAX 130* 76 76.5 95 32 27 27 MAX 78* 95 32 MAX 126* 78 27 76 27 27 MAX 77* 95 41.5 76 27 27 27 27 108 95(Parfocal distance) Mount unit 76 27 27 * Where M Plan Apo HR100X (378-815-4) is used * Where M Plan Apo NIR HR100X (378-864-5) is used Mount unit Intermediate lens tube Workpiece surface Workpiece surface Workpiece surface (Parfocal distance) (Parfocal distance) Workpiece surface 27 27 63.5 63.5 94 (4) 102 126.5 140 144 (4) 7.5 ø70 ø69 229 5-M4 screw holes, depth 8 80 56.5 73 1 56 27 149 89.5 117 27 4.5 25 25 Vertical travel (37) Hole positions for mounting onto the main unit 7.5 63.5 102 (4) 94 73 1 229 (4) 144 140 126.5 27 89.5 149 4.5 25 25 27 Vertical travel (37) ø69 ø70 56 63.5 Hole positions for mounting onto the main unit 26.5 50 87.6 Focusing unit A Focusing unit B 5-M4 screw holes, depth 8 23.5 23.5 M20×0.5 27 76 95 27 87 88.6 32 53.7 MAX130* 27 76 27 95 27 MAX78* 136 * Where M Plan Apo HR100X (378-815-4) is used 27 76 95 27 87 88.6 32 53.7 MAX126* M20×0.5 41.5 27 27 Mount unit Intermediate lens tube MAX77* 136 * Where M Plan Apo NIR HR100X (378-864-5) is used Workpiece surface Workpiece surface (Parfocal distance) Workpiece surface (Parfocal distance) (Parfocal distance) (Parfocal distance) 27 95 76 27 27 Workpiece surface 41.5 15 20.5 28 (Parfocal distance) 152.5 247.5 95 76 27 27 Illuminated lens tube 20.5 68.5 Main body Vertical illumination unit with aperture diaphragm Vertical illumination tube with aperture diaphragm Analyzer Polarizer Analyzer Cover ring Polarizer Workpiece surface 170.7 17.5 152.5 17.5 Intermediate image position C mount 2X adapter lens unit Intermediate image position C mount 0.5X adapter lens unit Dimensions with the 2X TV adapter unit mounted Dimensions with the 0.5X TV adapter unit mounted (Difference in dimension from the case where no adapter lens unit is used: 18.2mm) (Difference in dimension from the case where no adapter lens unit is used: 0mm) 17.5 60.5 64.2 75 ø56 0 +0.05 ø38 Intermediate image position Manual turret I ns t a l l ing t he p o lar izer and ana l y zer on VMU -V o r VMU - H N ote: T he a n a l y z e r is ins t alled by remov ing the I lluminated lens tube. T he polar izer is ins t alled by remov ing the ver t ic al illuminat ion uni t wi th aper ture diaphragm.
13 29.1 MAX 81 MAX 132 76.5 2 7 54 85 95(Parfocal distance) 95(Parfocal distance) 85 54 Single mount unit 54 85 95(Parfocal distance) 95(Parfocal distance) 29.1 MAX 80 MAX 132 2 7 54 85 88 Single mount unit Dimensions of Optional Accessories for WIDE VMU-HR / WIDE VMU-BD When mount ing t he tur re t on W I DE VMU - H R N ote 1: Tur ret is ins t alled by remov ing the single mount uni t , but the dis t ance bet ween the mount ing posi t ion of W I DE VMU main uni t and the s t age is unchanged. N ote 2: Tur ret mount ing dire c t ion is limi ted to the dire c t ion indic ated in the above f igure. When mount ing t he tur re t on W I DE VMU - B DV / B DH N ote 1: Tur ret is ins t alled by remov ing the single mount uni t , but the dis t ance bet ween the mount ing posi t ion of W I DE VMU main uni t and the s t age is unchanged. N ote 2: Tur ret mount ing dire c t ion is limi ted to the dire c t ion indic ated in the above f igure. N ote: T he polar izer is ins t alled by loos ening the cover r ing. T he anal y zer is ins t alled by remov ing the c amera lens tube. When mount ing t he tur re t on W I DE VMU - H R N ote 1: Tur ret is ins t alled by remov ing the single mount uni t , but the dis t ance bet ween the mount ing posi t ion of W I DE VMU main uni t and the s t age is unchanged. N ote 2: Tur ret mount ing dire c t ion is limi ted to the dire c t ion indic ated in the above f igure. When mount ing t he tur re t on W I DE VMU - B DV / B DH N ote 1: Tur ret is ins t alled by remov ing the single mount uni t , but the dis t ance bet ween the mount ing posi t ion of W I DE VMU main uni t and the s t age is unchanged. N ote 2: Tur ret mount ing dire c t ion is limi ted to the dire c t ion indic ated in the above f igure. Bright-field turret Bright-field power turret Bright /Dark-field turret Bright /Dark-field power turret Focus unit C Polarizer and Analyzer (C ) 30 41 2 6 ø45 5 Illuminated lens tube Camera lens tube Analyzer Ana l yze r Cover ring Po l a r i ze r Polarizer 27 85 95 27 MAX 78 MAX 130 76.5 29.1 95 85 27 (Parfocal distance) (Parfocal distance) Single mount unit 85 95 2 7 27 29.1 MAX 130 87 MAX 78 95 85 27 (Parfocal distance) (Parfocal distance) Single mount unit 25 25 5-M4 screw holes, depth 8 (37) 117 27 98.5 31.5 157 1 73 32 4 8 8 0 63.5 63.5 9 4 126.5 14 0 ( 4 ) 14 4 ( 4 ) 102 229 7.5 ø 70 ø 69 56
14 Microscope unit FS70 FS70Z FS70L FS70L4 > Compac t mi c ros cop e uni t wi th t r ino cular eyep i e ce tub e (Sui t abl e for obs er vat ion of many di f ferent t y pe s of obje c t: met al sur face s , s emi conduc tor s , LCDs , re sins , etc.) > C an u se d wi th YAG (near - infrar e d , vi s ib l e , near - ul t ravi o l et , or ul t ravi o l et ) la ser s .*1 (Sui t abl e for cut t ing, t r imming, repair and mark ing of I C w ir ing ( Au, A l ), remov ing and pro ce s sing thin -films ( insulat ing film) and repair of co lor fil ter s .) > Compat ib l e wi th infrar e d opt i c a l s ys tems*2 > Produc t range suppor t ing var i ou s ob ser vat i on method s (Br ight-field / Dark-field / Simpl e po lar iz at ion / Di f ferent ial inter ference cont ras t (D I C)) > Equipp e d a s s t andar d wi th a Koehl er i l luminat i on wi th ap er tur e diaphragm for ep i - i l luminat i on opt i c a l s ys tems > Hi gh op erab i l i t y wi th mi c ros cop e s ( I nward tur ret de sign and long -work ing - dis t ance obje c t i ve s) *1: The per formance and s afet y of laser- equipped s y s tem produc t s is not guaranteed. *2: An infrared source and infrared camera are neces s ar y. For more det ails on infrared obser vation, cont ac t your local Mitutoyo s ales of fice. Specifications Obje c t i ves and eyepie ces shown mounted are opt ional. Features St anda rd head t y p e M o d e l N o. FS70 — FS70Z — FS70ZD FS70L FS70L4 O rd e r N o. 378-184-1 — 378-185-1 — Made - t o - o rde r 378-186-1 378-187-1 T i l t ing head t y p e M o d e l N o. — FS70-TH — FS70Z-TH FS70ZD-TH FS70L-TH FS70L4-TH O rd e r N o. — 378-184-3 — 378-185-3 Made - t o - o rde r 378-186-3 378-187-3 Focus adjustment 50 mm travel range with concentric coarse (3.8 mm/rev) and fine (0.1 mm/rev) focusing wheels (right / left) Obser vation image Erect image BF (Bright-field ) ✔ ✔ ✔ ✔ ✔ ✔ BD (Bright-field / Dark-field ) ✔ Polarization ✔ ✔ ✔ ✔ ✔ ✔ ✔ Differential interference contrast (DIC) ✔ ✔ ✔ ✔ ✔ Optical tube type Siedentopf, adjustable interpupi l lary distance range: 51 - 76 mm Field number 24 mm Ti lt angle 0 to 20°, displacement of eye point: 114 mm (only for ti lting head type) Optical pass ratio Fixed type (Eyepiece / TV = 50 / 50) Switchable type (Eyepiece / Tube = 100 / 0: 0/100) Fixed type (Eyepiece / TV = 50 / 50) Switchable type (Eyepiece / Tube = 100/0: 0/100) Fixed type *3 (Eyepiece / TV = 50 / 50) Switchable type (Eyepiece / Tube = 100/0: 0/100) Protective filter — Bui lt-in laser beam filter Tube lens 1X 1X - 2X zoom 1X Appl icable laser — 1064 / 532 / 355 nm 532 / 266 nm Camera mount C-mount (using optional adapter B *1) Use a laser with TV port. C-mount receptacle (with green filter switch) Optical system epi-i l lumination Epi-i l lumination for Bright-field (Koehler i l lumination, with aperture diaphragm) I l lumination unit (optional ) Fiber-optic i l lumination unit (12 V, 100 W), stepless adjustment, l ight guide length: 1.5 m Objective, optional (for observation) M Plan Apo/HR/SL, G Plan Apo BD Plan Apo M Plan Apo/HR/SL, G Plan Apo Objective, optional (for laser-cutting) — NIR Series NUV Series UV Series Loading *2 14.5 kg 13.6 kg 14.1 kg 13.2 kg 14.1 kg (ti lting head type: 13.2 kg) 14.2 kg (ti lting head type: 13.5 kg) 13.9 kg (ti lting head type: 13.1 kg) Mass (main unit) 6.1 kg 7.1 kg 6.6 kg 7.5 kg 6.6 kg (ti lting head type: 7.5 kg) 6.4 kg (ti lting head type: 7.2 kg) 6.7 kg (ti lting head type: 7.5 kg) *1: Installation is optional. *2: Loading on optical tube excluding weight of objective lenses and eyepieces *3: It is a switchable type when using FS70ZD-TH (Tilting head type). Note: Observe the following precautions when using FS70L or FS70L4 with YAG laser source attached. · Be aware of the laser power and energy density limitations of the optical system to avoid damaged. · Check the mass of the laser source. When mounting on a high-speed device or acceleration/deceleration device, please contact us. Bu l b re p la cement St anda rd: Ha l o g en bu l b (12 V, 10 0 W ) (517181) F o r t he fib e r- o pt i c c ab l e i l lumina t i on uni t (12 V, 10 0 W ) (378 -70 0)
15 FS70ZD FS70L (378-186-1) FS70L4 (378-187-1) FS70ZD-TH FS70L-TH (378-186-3) FS70L4-TH (378-187-3) FS70 (378-184-1) FS70-TH (378-184-3) FS70Z (378-185-1) FS70Z-TH (378-185-3) Quad Polarizer (C)*1 (378-094) P.16 Differential interference contrast unit (378-076, 378-078, 378-079, 378-080) P.16 Power turret nosepiece unit (for BF/DF) (176-212) P.16 P.33 X-Y stage (50×50 mm) (378-020) Simple stand (378-730) P.33 Transmitted l ight unit (378-736) P.33 Manual turret nosepiece unit (for BF/DF) (176-211) P.16 Quad T A T U S POWER POWER T S B C D A U R R E T Quintuple Self-al igning Power turret nosepiece unit (for BF) Quad (378-016) Quintuple (378-216) P.16 Self-al igning manual turret nosepiece unit (for BF) (378-018) P.16 Quad A B C D E 0.5X T V adapter unit (375-054) P.16 Adapter B (378-042) P.16 Third-party YAG lasers*3 Eyepieces P.32 WF10X / 24 (378-866) WF20X / 12 (378-858) Objectives BD Plan Apo series (for observation): P.21 *1: This unit is only applied to 1/2-inch or less CCD cameras. *2: Focusing unit A (378-705) can be attached to the simple stand (378-730). *3: Mitutoyo does not handle these lasers. Consult Mitutoyo for more information. *4: An adapter may separately be required when mounting any of these stages. Consult Mitutoyo for more information. Objectives M Plan Apo series (for observation): P.18 to 20 G Plan Apo series (for observation): P.20 NIR series on P.22 to 23 (for fundamental/second harmonic laser machining) (for near-infrared observation) NUV series on P.24 to 25 (for second/third harmonic laser machining) UV series on P.26 to 27 (for second/fourth harmonic laser machining) Third-party motorized X-Y stages (50×50 mm) *4 Polarizer (A)*2 (378-092) P.16 C-moun t c ompa t i b l e ana l og c ame r a o r d i g i t a l c ame r a Fiber-optic illumination unit 100 W (378-700) P.33 1 2 A A B 2 5 1 N D 2 1 2 A A B 2 5 2 N D 8 1 2 A AG 8 0 6 G I F 1 2 A AG 8 0 7 L B 8 0 F i l t e r s ( f o r fi b e r - o p t i c i l l u m i n a t i o n u n i t N o .3 7 8 - 7 0 0) Fiber-optic illumination unit 100 W (378-700) P.33 1 2 A A B 2 5 1 N D 2 1 2 A A B 2 5 2 N D 8 1 2 A AG 8 0 6 G I F 1 2 A AG 8 0 7 L B 8 0 F i l t e r s ( f o r fi b e r - o p t i c i l l u m i n a t i o n u n i t N o .3 7 8 - 7 0 0) System diagram
16 Optional Accessories for FS70 378 - 016 Console box F o r s i m p l i f i e d p o l a r i z e d - l i g h t o b s e r v a t i o n . A l s o s u i t a b l e f o r e n h a n c i n g cont ras t of low-magni fic at ion obje c t i ve s . Us ed for mount ing a C-mount c amera. Us ed for di f ferent ial inter ference cont ras t obs er vat ion in conjunc t ion w i th the po lar izer. A llow s obs er vat ion over a w ide field of v i ew on the moni tor (2 X w ide) due to the 0.5X relay opt i c s . I t is us ed in conjunc t ion w i th the opt ional adapter B. A C-mount is included. Manual turret Power turret Polarizer and analyzer Adapter B DIC unit 0.5X T V adapter unit O rd e r N o. 378 -216 378 - 016 176 -212 O b s e r va t i on me t ho d B r i ght- fi e l d B r i ght / Da r k- fi e l d N o. of o b j e c t i ve mount s 5 (1 re fe rence ho l e and 4 ho l e s w i t h cente r ing ad jus tment ) 4 (1 re fe rence ho l e and 3 ho l e s w i t h cente r ing ad jus tment ) 4 V i ew fi e l d ad jus tment ± 0.5 mm — P o s i t i oning a ccura c y 2 σ = 3 μm — — Durab i l i t y ( l i fe - t ime) 1 mi l l i on re p o s i t i oning o p e ra t i ons — — D r i ve me t ho d DC moto r P owe r sup p l y AC10 0 V - 24 0 V, 10 W AC10 0 V - 24 0 V, 6 W O u t pu t inte r fa ce R S -232C*1 fo r e x te r na l P C cont ro l Cab l e l eng t h 2.9 m*2 (conne c t i on of p owe r tur re t and cons o l e b ox ) D imens i ons ( W x H x D) and ma s s Tur re t : 164x65x137 mm, 1.4 kg (378 -216: 130x47x186 mm, 1.7 kg) Console box: 108x72x193 mm, 810 g (378 -216: 108x63x176 mm, 810 g) O rd e r N o. 378 - 018 378 -211 O b s e r va t i on me t ho d B r i ght- fi e l d B r i ght / Da r k- fi e l d N o. of o b j e c t i ve mount s 4 (1 re fe rence ho l e and 3 ho l e s w i t h cente r ing and p a r fo c a l ad jus tment ) 4 V i ew fi e l d ad jus tment ± 0.5 mm — Pa r fo c a l a d jus tment ± 0.5 mm — Ma s s 9 8 0 g 1. 2 kg O rd e r N o. Magni fi c a t i on 378 - 076 10 0X , S L 8 0X , S L 5 0X 378 - 078 5 0X , S L 20X 378 - 079 20X 378 - 0 8 0 10X , 5X F or FS70Z 378 - 0 92 378 - 0 4 2 V iew field of image: ø11 mm Mas s: 170 g 375 - 05 4 V iew field of image: ø11 mm Mas s: 30 0 g F or FS70 L • FS70 L 4 378 - 0 9 4 ø45 ø38 ø54 74.1 62.1 17.5 67.3 +0.05 0 Intermediate image position 122.6 ø45 23 *1: Opt ional R S -232C Cable: 12 A A A8 07 *2: T he length of c able conne c t ing the power tur ret and console box is a s afe ma x imum and therefore Mi tutoyo does not guarantee er ror-free operat ion i f a c able ex tension is us ed to increas e tot al c able length.
17 Dimensions of Optional Accessories for FS70 FS70Z-TH (FS70Z-T H wi th opt ional eyepie ces, obje c t i ves, and tur ret.) Mi tutoyo's FS70 - s er i e s lineup adopt s a t il t ing head spe ci fic at ion that allow s the us er to adjus t the head to an appropr iate eye po int according to per s onal phy si c al at t r ibute s when look ing through the mi cros cope eyepi e ce. Manual F o cus Uni t S c an be mounted on the main uni t 6 8mm higher than the s t andard fo cus uni t w i thout changing the eye - po int posi t ion. T he order number s in the fo llow ing t abl e repre s ent the FS70 - s er i e s main uni t s on whi ch this fo cus uni t has prev iousl y be en mounted. M o d e l F S70 -S F S70Z-S F S70 L -S F S70 L 4 -S O rd e r N o. 378 -18 4 -2 378 -18 5 -2 378 -18 6 -2 378 -187-2 Trave l rang e 5 0 mm Co a r s e / f ine fe e d Co a r s e fe e d: 3. 8 mm / re v., F ine fe e d: 0.1 mm / re v. L o a d ing c ap a c i t y of c ame ra mount * 14 .5 kg 14 .1 kg 14 . 2 kg 13.9 kg Ma s s 6 .1 kg 6 .6 kg 6 . 4 kg 6 .7 kg *Mas s of tur ret , obje c t i ve, and eyepie ce are excluded. Note: I f the tilting head t ype with a shor t focus unit is required, please contac t your local Mitutoyo sales of fice. ø50 （50.7） ø111 A B C D E （47） （130） ø50 ø108 （48） T A T U S POWER POWER T S A B C D U R R E T （65） （164） T his obje c t i ve adapter allow s mount ing the br ight-field obje c t i ve on the br ight /dark-field tur ret (176 -211 and 176 -210) whil e maint aining the fo cus posi t ion ( par fo c al ). Manual turret Power turret Tilting head type Shor t focus unit type Optional objec tive adapter: 378 - 026 -1 Focus point adjust shim set O rd e r N o. Us e D e t a i l s 378 - 0 8 9 F o r b r i ght- fi e l d tur re t T he fo cus p o int a d jus t shim s e t inc lud e s 5 0 μm, 3 0 μm and 20 μm t hi ck ne s s SUS r ings 378 - 0 9 0 F o r b r i ght /da r k- fi e l d tur re t O rd e r N o. 378 - 026 -1 A p p l i c ab l e mo d e l s M i c ro s co p e s mounte d w i t h t he b r i ght /da r k- fi e l d manua l tur re t o r p owe r tur re t (MF - U, HyperMF - U) A p p l i c ab l e o b j e c t i ve l ens M Plan Apo, M Plan Apo SL , G Plan Apo, M Plan Apo NI R , M Plan Apo NUV, M Plan UV 378 - 018 378 -216 176 -211 176 -212 / 378 - 016 (Parfocal distance) Objective mounting surface Intermediate image position Vertical travel 25 25 451 355 79.6 31.5 93.4 212 82 154 MAX130 95 154 1 153(Mounting surface) 324 154 293.5 1 126.5 89.5 153 1 (157.5) (126.5) (89.5) 68 (293.5) 154 324 153 Standard focusing unit mounting dimensions Manual focusing unit S mounting dimensions
18 VMU FS70 MF-U Hyper MF-U WIDE VMU > Infinit y correc ted > Bright-field obser vation > Long working dis t ance > Plan -Apochromat Features Dimensions Objectives for Bright-field Observation (long working distance) M Plan Apo / M Plan Apo HR 11 (Working distance) 1/4 Retardation plate ø34 ø38 ø41 84 95 (Parfocal distance) 5 34 ø34 ø23 ø25 61 95 (Parfocal distance) 5 1.6 ø32.2 35 ø34 ø24 ø25 60 95 (Parfocal distance) 5 ø32.2 20 ø34 ø29.2 75 95 (Parfocal distance) 5 1.5 ø32.2 13 ø34 ø29.2 82 95 (Parfocal distance) 5 1.5 ø32.2 6 ø34 ø17.8 ø29.2 89 95 (Parfocal distance) 5 4.7 ø32.2 34 ø34 ø24.7 ø27.5 61 95 (Parfocal distance) 5 1.4 ø32.2 M Plan Apo 1X M Plan Apo 10X M Plan Apo 20X M Plan Apo 2X M Plan Apo 50X M Plan Apo 5X M Plan Apo 100X M Plan Apo 7.5X (Working distance) (Working distance) (Working distance) 34 ø34 ø28.2 61 95 (Parfocal distance) 5 2 ø32.2 (Working distance) (Working distance) (Working distance) (Working distance) M Plan Apo HR 10X M Plan Apo HR 5X 5.2 ø34 ø28.2 89.8 95 (Parfocal distance) 5 2 ø32.2 M Plan Apo HR 50X (Working distance) 1.3 ø34 93.7 95 (Parfocal distance) 5 2 ø32.2 M Plan Apo HR 100X (Working distance) ø28.2 95 (Parfocal distance) (Working distance) ø28.2 ø32.2 2 27 5 68 ø34 80 7.7 ø39 95 (Parfocal distance) ø37 5 ø26 (Working distance) 15
19 Specifications M o d e l O r d e r N o . N . A . W. D. (mm) f (mm) (λ= 55 0 nm) R ( μ m) (λ= 55 0 nm) ± D O F ( μ m) R e a l F OV (mm) M a s s ( g ) ø24 e y e p i e c e 1/ 2 i n c h c a m e r a M P l a n A p o M P l a n A p o 1X *1 3 7 8 - 8 0 0 -12 0 . 025 11. 0 20 0 11. 0 4 4 0 24 4 . 8 × 6 . 4 3 0 0 M P l a n A p o 2 X *2 3 7 8 - 8 01 -12 0 . 0 55 3 4 . 0 10 0 5 . 0 91 12 2. 4× 3 . 2 2 20 M P l a n A p o 5 X 3 7 8 - 8 0 2 - 6 0 .14 3 4 . 0 4 0 2. 0 14 4 . 8 0 .9 6×1. 28 2 3 0 M P l a n A p o 7. 5 X 3 7 8 - 8 0 7- 3 0 . 21 35 . 0 26 . 6 7 1. 3 6 . 2 3 . 2 0 . 6 4× 0 . 8 5 24 0 M P l a n A p o 10 X 3 7 8 - 8 0 3 - 3 0 . 28 3 4 . 0 20 1. 0 3 . 5 2. 4 0 . 4 8 × 0 . 6 4 24 0 M P l a n A p o 2 0 X 3 7 8 - 8 0 4 - 3 0 . 42 20 . 0 10 0 .7 1. 6 1. 2 0 . 24× 0 . 32 270 M P l a n A p o 5 0 X 3 7 8 - 8 0 5 - 3 0 . 55 13 . 0 4 0 . 5 0 .9 0 . 4 8 0 .10 × 0 .13 29 0 M P l a n A p o 10 0 X 3 7 8 - 8 0 6 - 3 0 .70 6 . 0 2 0 . 4 0 . 6 0 . 24 0 . 0 5× 0 . 0 6 320 M P l a n A p o H R M P l a n A p o H R 5 X *3 3 7 8 -7 8 7-16 0 . 21 27. 0 4 0 1. 3 6 . 2 4 . 8 0 .9 6×1. 28 28 5 M P l a n A p o H R 10 X *3 3 7 8 -7 8 8 -15 0 . 42 15 . 0 20 0 .7 1. 6 0 2. 4 0 . 4 8 × 0 . 6 4 455 M P l a n A p o H R 5 0 X 3 7 8 - 8 14 - 4 0 .75 5 . 2 4 0 . 4 0 . 49 0 . 4 8 0 .10 × 0 .13 4 0 0 M P l a n A p o H R 10 0 X 3 7 8 - 8 15 - 4 0 .9 0 1. 3 2 0 . 3 0 . 3 4 0 . 24 0 . 0 5× 0 . 0 6 410 • Ev e r y r e s o l u t i o n and s i ng l e o b j e c t i v e's d e p t h o f fo c u s i n t h e a b o v e t a b l e i s a v a l u e d e t e r mi n e d o n t h e b a s i s o f a r e fe r en ce wav e l eng t h (λ= 0 .55 μm). *1: W h en o b s e r v i ng a wo r k p i e ce w ho s e o p t i c a l r e f l e c t an ce i s l ow, an a p p r o p r i a t e p o l a r i ze r shou l d b e u s e d w i t h t h i s l ens . *2: W h en o b s e r v i ng a wo r k p i e ce w ho s e o p t i c a l r e f l e c t an ce i s l ow, u s i ng t h i s l ens w i t h a 1/4 wav e p l a t e and p o l a r i z a t i o n un i t ( N o. 02 A L N370 ) i s r e commend e d . *3: T h e s e s p e c i f i c a t i o ns a p p l y to t h e o b j e c t i v e s i n i s o l a t i o n and may no t a p p l y w h en a l ens i s mount e d i n t h e t u r r e t o f a mi c r o s co p e, d e p end i ng o n t h e d e s i gn o f t ha t mi c r o s co p e. I n t h e c a s e w h e r e t h e v e r t i c a l e p i - i l l umi na t i o n i s p r o v i d e d by t h e u s e r i t i s imp o r t ant to b a l an ce t h e v a r i ou s o p t i c a l p a rame t e r s s o t ha t o p t imum i l l umi na t i o n o f t h e t a r g e t su r fa ce i s o b t a i n e d . Co nt a c t you r l o c a l M i t u toyo s a l e s O f f i ce fo r i nfo r ma t i o n o n how t h i s may b e a c h i e v e d . Ma d e - to - o r d e r
20 Objectives for Bright-field Observation (with cover-glass thickness compensation) G Plan Apo VMU FS70 MF-U Hyper MF-U VMU FS70 MF-U Hyper MF-U M o d e l O r d e r N o . N . A . W. D. (mm) f (mm) (λ= 55 0 nm) R ( μ m) (λ= 55 0 nm) ± D O F ( μ m) R e a l F OV (mm) M a s s ( g ) ø24 e y e p i e c e 1/ 2 i n c h c a m e r a M P l a n A p o S L M P l a n A p o S L 2 0 X 3 7 8 - 8 10 - 3 0 . 28 30 . 5 10 1 . 0 3 . 5 1 . 2 0 . 24×0 . 32 240 M P l a n A p o S L 5 0 X 3 7 8 - 8 11 -15 0 . 42 20 . 5 4 0 . 7 1 . 6 0 . 48 0 . 10×0 . 13 280 M P l a n A p o S L10 0 X 3 7 8 - 8 13 - 3 0 . 55 13 . 0 2 0 . 5 0 . 9 0 . 24 0 . 05×0 . 06 290 • Ev e r y r e s o l u t i o n and s i ng l e o b j e c t i v e's d e p t h o f fo c u s i n t h e a b o v e t a b l e i s a v a l u e d e t e r mi n e d o n t h e b a s i s o f a r e fe r en ce wav e l eng t h (λ= 0 .55 μm). M o d e l O r d e r N o . N . A . W. D. (mm) f (mm) (λ= 55 0 nm) R ( μ m) (λ= 55 0 nm) ± D O F ( μ m) R e a l F OV (mm) M a s s ( g ) ø24 e y e p i e c e 1/ 2 i n c h c a m e r a G P l a n A p o G P l a n A p o 2 0 X ( t 3 . 5 ) 3 7 8 - 8 47 0 . 28 29 . 42* 10 1 . 0 3 . 5 1 . 2 0 . 24×0 . 32 270 G P l a n A p o 5 0 X ( t 3 . 5 ) 3 7 8 - 8 4 8 - 3 0 . 50 13 . 89* 4 0 . 6 1 . 1 0 . 48 0 . 10×0 . 13 320 • Ev e r y r e s o l u t i o n and s i ng l e o b j e c t i v e's d e p t h o f fo c u s i n t h e a b o v e t a b l e i s a v a l u e d e t e r mi n e d o n t h e b a s i s o f a r e fe r en ce wav e l eng t h (λ= 0 .55 μm). * I n a i r M Plan Apo SL20X M Plan Apo SL50X M Plan Apo SL100X 30.5 ø34 ø24 ø24.8 64.5 95 (Parfocal distance) 5 1.5 ø32.2 20.5 ø34 ø23.8 74.5 95 (Parfocal distance) 5 ø32.2 (Working distance) (Working distance) 13 ø34 ø22 ø23.9 82 95 (Parfocal distance) 5 1.4 ø32.2 (Working distance) G Plan Apo 20X G Plan Apo 50X 30.6 ø34 ø24 ø25 65.59 96.19 Glas s 5 1.58 ø32.2 15.08 ø34 ø28.2 81.11 96.19 5 2 ø32.2 (Working distance): Glass thickness 3.5 mm (Working distance): Glass thickness 3.5 mm Glas s WIDE VMU WIDE VMU > Infinit y correc ted > Bright-field obser vation > Super long working dis t ance > Plan -Apochromat > Infinit y correc ted > Bright-field obser vation > Super Long working dis t ance > Plan -Apochromat > D esigned to obser ve a specimen through a 3.5 mm cover glass. > D esign enables high-power obser vation through a cover glass. Note: Cont ac t Mitutoyo to cus tom- order a specific cover- glas s to suit your application if required. Thicknes s, material and refrac tive index are all specifiable within usual limit s. Features Features Dimensions Dimensions Specifications Specifications Objectives for Bright-field Observation (Super-long working distance) M Plan Apo SL
21 MF-U Hyper MF-U M o d e l O r d e r N o . N . A . W. D. (mm) f (mm) (λ= 55 0 nm) R ( μ m) (λ= 55 0 nm) ± D O F ( μ m) R e a l F OV (mm) M a s s ( g ) ø24 e y e p i e c e 1/ 2 i n c h c a m e r a B D P l a n A p o B D P l a n A p o 2 X * 3 7 8 - 8 31 -12 0 . 055 34 . 0 100 5 . 0 91 12 2 . 4×3 . 2 340 B D P l a n A p o 5 X 3 7 8 - 8 3 2 -7 0 . 14 34 . 0 40 2 . 0 14 4 . 8 0 . 96×1 . 28 350 B D P l a n A p o 7. 5 X 3 7 8 - 8 3 0 -7 0 . 21 34 . 0 26 . 67 1 . 3 6 . 2 3 . 2 0 . 64×0 . 85 350 B D P l a n A p o 10 X 3 7 8 - 8 3 3 -7 0 . 28 34 . 0 20 1 . 0 3 . 5 2 . 4 0 . 48×0 . 64 350 B D P l a n A p o 2 0 X 3 7 8 - 8 3 4 -7 0 . 42 20 . 0 10 0 . 7 1 . 6 1 . 2 0 . 24×0 . 32 400 B D P l a n A p o 5 0 X 3 7 8 - 8 3 5 -7 0 . 55 13 . 0 4 0 . 5 0 . 9 0 . 48 0 . 10×0 . 13 440 B D P l a n A p o 10 0 X 3 7 8 - 8 3 6 -7 0 . 70 6 . 0 2 0 . 4 0 . 6 0 . 24 0 . 05×0 . 06 460 • Ev e r y r e s o l u t i o n and s i ng l e o b j e c t i v e's d e p t h o f fo c u s i n t h e a b o v e t a b l e i s a v a l u e d e t e r mi n e d o n t h e b a s i s o f a r e fe r en ce wav e l eng t h (λ= 0 .55 μm). * I t i s r e commend e d to b e u s e d to g e t h e r w i t h t h e 1/4 wav e l eng t h p l a t e B (02 A L N3 8 0 ) and a p p r o p r i a t e p o l a r i ze r fo r t h e mi c r o s co p e u s e d ( Wo r k i ng d i s t an ce w i l l b e sho r t en e d 4 mm). BD Plan Apo 2X BD Plan Apo 20X BD Plan Apo5X BD Plan Apo 50X BD Plan Apo 7.5X BD Plan Apo 10X BD Plan Apo 100X 34 ø44 ø37 ø40 61 95 (Parfocal distance) 5 4 ø42 34 ø44 ø37 ø40 61 95 (Parfocal distance) 5 4 ø42 34 ø44 ø37 ø40 61 95 (Parfocal distance) 5 4 ø42 34 ø44 ø37 ø40 61 95 (Parfocal distance) 5 4 ø42 20 ø44 ø32 ø40 75 95 (Parfocal distance) 5 7 ø42 13 ø44 ø32 ø40 82 95 (Parfocal distance) 5 8.5 ø42 6 ø44 ø31.5 ø40 89 95 (Parfocal distance) 5 10 ø42 (Working distance) (Working distance) (Working distance) (Working distance) (Working distance) (Working distance) (Working distance) BD Plan Apo HR 50X 5.2 ø44 ø32 ø40 89.9 95 (Parfocal distance) 5 4.8 ø42 (Working distance) BD Plan Apo HR 100X 1.3 ø44 ø32 ø40 93.7 95 (Parfocal distance) 5 4.7 ø42 (Working distance) WIDE VMU > Infinit y correc ted > Bright /dark-field obser vation Sui ted to the obs er vat ion of s cratche s , conc av i t y and conve x i t y on a sur face > Long working dis t ance > Plan -Apochromat Features Dimensions Specifications Objectives for Bright /Dark-field Observation (long working distance) BD Plan Apo FS70
22 Near-infrared radiation range objectives for Bright-field observation M Plan Apo NIR / M Plan Apo NIR HR / M Plan Apo NIR B VMU FS70 > Infinit y correc ted > Suit able for bright-field obser vation and laser applications > Long working dis t ance > Plan -Apochromat > Wavelength correc tion from visible to near- infrared (180 0 nm) > Available high - power t ype (M Plan Apo N I R HR) Features Dimensions M o d e l O r d e r N o . N . A . W. D. (mm) f (mm) (λ= 55 0 nm) R ( μ m) (λ= 55 0 nm) ± D O F ( μ m) R e a l F OV (mm) M a s s ( g ) ø24 e y e p i e c e 1/ 2 i n c h c a m e r a M P l a n A p o N I R M P l a n A p o N I R 5 X 3 7 8 - 8 2 2 - 5 0 . 14 37 . 5 40 2 . 0 14 . 0 4 . 8 0 . 96×1 . 28 220 M P l a n A p o N I R 10 X 3 7 8 - 8 2 3 -15 0 . 26 31 . 0 20 1 . 1 4 . 1 2 . 4 0 . 48×0 . 64 250 M P l a n A p o N I R 2 0 X 3 7 8 - 8 2 4 -16 0 . 40 20 . 0 10 0 . 7 1 . 7 1 . 2 0 . 24×0 . 32 300 M P l a n A p o N I R 5 0 X 3 7 8 - 8 2 5 -16 0 . 42 17 . 0 4 0 . 7 1 . 6 0 . 48 0 . 10×0 . 13 315 M P l a n A p o N I R 10 0 X 3 7 8 - 8 2 6 -15 0 . 50 12 . 0 2 0 . 6 1 . 1 0 . 24 0 . 05×0 . 06 335 M P l a n A p o N I R H R M P l a n A p o N I R H R 5 0 X 3 7 8 - 8 6 3 - 5 0 . 65 10 . 0 4 0 . 4 0 . 7 0 . 48 0 . 10×0 . 13 450 M P l a n A p o N I R H R 10 0 X 3 7 8 - 8 6 4 -15 0 . 70 10 . 0 2 0 . 4 0 . 6 0 . 24 0 . 05×0 . 06 490 M P l a n A p o N I R B M P l a n A p o N I R B 2 0 X 3 7 8 - 8 6 7- 5 0 . 40 25 . 5 10 0 . 7 1 . 7 1 . 2 0 . 24×0 . 13 350 M P l a n A p o N I R B 5 0 X 3 7 8 - 8 6 8 - 5 0 . 42 25 . 5 4 0 . 7 1 . 6 0 . 48 0 . 10×0 . 13 375 • Ev e r y r e s o l u t i o n and s i ng l e o b j e c t i v e's d e p t h o f fo c u s i n t h e a b o v e t a b l e i s a v a l u e d e t e r mi n e d o n t h e b a s i s o f a r e fe r en ce wav e l eng t h (λ= 0 .55 μm). N o t e: I f t h e wav e l eng t h u s e d i s 110 0 nm o r l o ng e r, t h e fo c a l p o i nt may d e v i a t e s l i ght l y f r om t ha t i n v i s i b l e ra d i a t i o n. M Plan Apo NIR 10X M Plan Apo NIR 100X M Plan Apo NIR 20X 20 ø34 75 95 (Parfocal distance) 5 ø32.2 (Working distance) M Plan Apo NIR HR 100X 37.5 ø34 ø23 ø23.8 57.5 95 (Parfocal distance) 5 ø32.2 17 ø34 ø24 ø24.4 78 95 (Parfocal distance) 5 ø32.2 M Plan Apo NIR 5X M Plan Apo NIR 50X (Working distance) (Working distance) 10 ø39 85 95 (Parfocal distance) 5 ø37 M Plan Apo NIR HR 50X (Working distance) 25.5 ø37 69.5 95 (Parfocal distance) 5 M Plan Apo NIR B 20X (Working distance) ø37 M Plan Apo NIR B 50X 25.5 ø37 69.5 95 (Parfocal distance) 5 (Working distance) ø37 ø34 5 83 5 12 ø34 95 (Parfocal distance) 5 ø32.2 (Working distance) (Working distance) 95 (Parfocal distance) 10 ø32.2 64 31(Working distance) 95 (Parfocal distance) ø37 85 ø39 Specifications
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