Measuring Microscopes MF/MF-U Series OPTICAL MEASURING PRE1431(4)
2 *Motor-Driven Z-axis *Motor-Driven Z-axis MFSeries MF -USeries Standard Measuring Microscopes Universal Measuring Microscopes Lineup Motor-Driven Z-axis MF-J Models Manual MF-A/B Models Manual MF-UA/UB/UC/UD Models Motor-Driven Z-axis MF-UJ/UK Models
3 Amazing Speed-up Attainment of Reduction in Measurement Time Z-axis Motor Drive & Vision Unit Simple Focus Adjustment The ultra-high speed AF function has been installed to allow focusing on a surface to be measured at a speed of about one second. Freedom from burdensome focus adjustment even o n a w o r k p i e c e w i t h m a n y a s p e r i t i e s a l l o w s t h e o p e r a t o r t o p e r f o r m s t r e s s - f r e e m e a s u r e m e n t , drastically reducing operator's fatigue. Ultra-high Speed AF Function 50秒 * The amount of time saved is dependent on the particular workpiece and therefore this result is offered as an example but does not guarantee performance in all cases. 45 % reduction Manual 90 seconds Z-axis motor drive 50 seconds Simplified Measurement T h e c o n c u r re n t u s e o f t h e v i s i o n u n i t a s a v i s i o n measurement system allows simplified measurement o f a n e d g e b y m e re l y o n e c l i c k . Mo re o v e r, s i n c e many data points can be obtained at a time with just one click, this will drastically speed up measurement a n d r e d u c e d a t a s p r e a d c o m p a r e d w i t h t h e conventional method of "measuring data points one by one with cross hairs". * Vision unit: Option One-click Tool One-click circle tool One-click box tool Application example: Cumulative total time of 3 mm stepheight measurement 10 times See video from here
4 Feature Excellent Observability and Operability Ultra-wide View Field and High Magnification Observation This measuring microscope series has achieved an industryl e a d i n g w i d e f i e l d o f v i e w o f ø24 m m ( w h e n u s i n g 1X objective). A l l m o d e l s a r e e q u i p p e d w i t h a C - m o u n t p o r t a s standard to which a compatible camera is attachable. T h e p o r t a l l o w s a v i s i o n m e a s u r e m e n t s y s t e m o r a n observation-specific digital camera to be mounted. T h e o b j e c t i v e s a v a i l a b l e p r o v i d e a c h o i c e o f u l t r a - l ow ma g n i f i c a t i o n , f o r e x c e l l e n t f l a re s u p p re s s i o n , t o h i g h m a g n i f i c a t i o n t h a t a p p r o a c h e s t h e r e s o l u t i o n l i m i t p o s s i b l e w i t h o p t i c a l wa v e l e n g t h s , a l l ow i n g t h e customer to select an optimal magnification depending on the intended use. Field Number: 24 A Camera Port on All Models Lineup of a Wide Range of Objectives Intuitive Operation The manual stage provides intuitive positioning and can b e e a s i l y m o v e d r a p i d l y b e t w e e n m e a s u r i n g p o s i t i o n s on a workp i ece by us i ng the qu i ck re l ease func t i on on each axis. Just free a Quick Release Wheel and move the stage by pushing and pulling. Lock the wheel to continue measurement with fine feed. Very effective for traversing between widely separated positions. T h e v i s i o n u n i t a l l o w s a n y o n e t o p e r f o r m s i m p l i f i e d measurement of an edge with just one click. A l s o , u s i n g t h e v i s i o n u n i t e l i m i n a t e s t h e n e e d f o r burdensome parallel alignment of a workpiece and data p o i n t d e t e c t i o n w i t h c r o s s h a i r s , t h u s a l l o w i n g q u i c k inspection of dimensions. Vision unit: Option (Refer to page 10 to 14 for details) Quick Release Mechanism Vision Unit Quick Release Wheel FREE LOCK Rapid positioning is easily selected
5 High-accuracy Measurement Best-in-Class Accuracy As of April, 2016 A l l m o d e l s h a v e a c h i e v e d b e s t - i n - c l a s s a c c u r a c y performance. Since the accuracy of the whole system is ensured by conformity to the inspection method of JIS B 7153, any model enables high-accuracy measurement. An y me a s u r i n g m i c ro s c o p e t h a t a c h i e v e s t h i s a c c u r a c y performance (close to JIS Class 0) will be a great asset to the customer's quality control improvement program. Precisely because measuring microscopes in this series are widely used in widely different industries, Mitutoyo offers a choice of stage size from 100×100 mm to maximum-in- class 400×200 mm. The customer can choose the optimal s i z e f o r t h e a p p l i c a t i o n w i t h a c c u r a c y p e r f o r m a n c e guaranteed. X/Y Axis: (2.2+0.02L) μm A Wide Choice of Stage Size 0 Measuring range Grade 1 error limits Typical X-axis performance Measuring Error E xample Reference) Measuring accuracy of each axis of a JIS B 7153 measuring microscope (at 20 °C) Grade 0: (2+0.01L) μm or less Grade 1: (4+0.02L) μm or less L: measured length (mm) 300mm 220mm Y axis 200 mm 300mm 220mm X axis 400 mm
6 Feature MF Series – User-friendly Standard Model – Reduction in Magnification Error due to Variation in Point of Focus Safe Operation Easy Change of Magnification In order not to change the observing magnification even at low magnification (10X or less) where the objective's precise working distance is difficult to accurately reproduce because of a wide focal depth, this series has adopted the telecentric optical system that reduces the magni f icat ion error due to s l ight var iat ion in working distance. A l s o , t he MF s e r i e s ob j e c t i v e s a re manu f a c t u red wi t h a mo re accurate magni f icat ion due to Mi tutoyo's unique speci f icat ion t h a t s u r p a s s e s J I S S t a n d a r d s . T h i s o p t i m i z e s c o m p a r a t i v e measurement with a reticle. An ultra-long working distance is ensured in the entire lineup of a wide variety of objectives between 1X and 100X. This practically eliminates any risk of collision with a workpiece even when surface asperities are present. T h e M F s e r i e s u s u a l l y a l l o w s o n l y a s i n g l e o b j e c t i v e t o b e mounted which needs to be replaced for every magnification change. The sliding nosepiece allows up to two objectives to be mounted. In the case of measurement that needs frequent magnification change, this nosepiece design drastically improves workability. (Refer to page 18 for details) Telecentric Optical System Ultra-long Working Distance Sliding Nosepiece 長作動距離 Working distance Objective 61.0 mm ML1X 77.0 mm ML3X 61.0 mm ML5X 51.0 mm ML10X 20.0 mm ML20X 13.0 mm ML50X 6.0 mm ML100X
7 Manual (2- or 3-axis) Z-axis Motor Drive Camera Port Vision AF Zerosetting Counter Quick Release Tilting Z-axis Motor Remote Power Turret FS Objective Camera Port Vision AF Zerosetting Counter Quick Release Tilting Z-axis Motor Remote Power Turret FS Objective Camera Port Camera port for mounting a digital camera (standard equipment on all models) Counter Low-profile digital display possible to install on the left or right side and adjust tilt angle to suit the operator Zerosetting Handy zero-set switch that minimizes the operator's hand motion Quick Release Quick-release mechanism that allows rapid stage positioning (Only for manual XY stage models) FS Objective Possible to mount an objective that enables various observation methods. (Only for the MF-U series) Tilting T ilting optical tube that can adjust the eyepoint to suit the operator's physique (Standard-equipped in the MF-U series) Z-axis Motor Z-axis motor drive for fast Z-axis focusing Vision AF Vision auto focus function that speeds up measurement by reducing the operator's focusing error Remote Remote control box that enables handy operation Power Turret Motor-powered turret enables faster operation when several objectives are required for measurement View of icons Standard-equipped function Not supported
8 Feature Polarization Unit Used when performing simple polarized observation. It is also recommended to use this unit for increasing image contrast during use of a low-magnification lens. Differential Interference Unit Used when performing differential interference observation. This unit is used in combination with the polarization unit. MF-U Series – Universal Model Dealing with Diverse Observation Methods – Clear Observation Image This series provides a clear observation image with excel lent color quality, ultra-long working distance for high operability and apochromatic design that eliminates chromatic aberration. Apochromat Lenses Detection of Microscopic Flaws and Asperities A choice of observation method such as dark-field observation, s i m p l e p o l a r i z e d o b s e r v a t i o n a n d d i f f e r e n t i a l i n t e r f e r e n c e observat ion in addi t ion to br ight-f ield observat ion of magni f ied images are selectable depending on the intended use. Diverse Observation Methods Differential interference: Allows observation of microscopic asperities hard to detect with ordinary bright-field observation. Dark-field: Allows highlighted observation of microscopic abnormalities such as flaws and contamination by using diffused light. Ordinary observation (bright-field) Ordinary observation (bright-field)
9 Power Turret Manual (2- or 3-axis) Z-axis Motor Drive Camera Port Vision AF Zerosetting Counter Quick Release Tilting Z-axis Motor Remote FS Objective Camera Port Vision AF Zerosetting Counter Quick Release Tilting Z-axis Motor Remote FS Objective Power Turret Camera Port Camera port for mounting a digital camera (standard equipment on all models) Counter Low-profile digital display possible to install on the left or right side and adjust tilt angle to suit the operator Zerosetting Handy zero-set switch that minimizes the operator's hand motion Quick Release Quick-release mechanism that allows rapid stage positioning (Only for manual XY stage models) FS Objective Possible to mount an objective that enables various observation methods. (Only for the MF-U series) Tilting T ilting optical tube that can adjust the eyepoint to suit the operator's physique (Standard-equipped in the MF-U series) Z-axis Motor Z-axis motor drive for fast Z-axis focusing Vision AF Vision auto focus function that speeds up measurement by reducing the operator's focusing error Remote Remote control box that enables handy operation Power Turret Motor-powered turret enables faster operation when several objectives are required for measurement View of icons Standard-equipped function Not supported Selectable as an option
10 Optional Accessories Vision Unit Abou t 90 % r educ t i on i n va r i a t i on Unit: µm Measuring microscope only Measuring microscope & vision unit Measuring microscope only Measuring microscope & vision unit 12 10 8 6 4 2 0 平均測定時間も約30%に短縮 （105秒→30秒弱に） Unit: µm 120 100 80 60 40 20 0 バラつきを約11.4%まで減少 （10µm→1µm台に） 単位：µm 測定顕微鏡 のみ 測定顕微鏡 &画像ユニット 12 10 8 6 4 2 0 平 （ 単位：µm 測定顕微鏡 のみ 測 & 120 100 80 60 40 20 0 10 µm 105 seconds 30 seconds 1 µm About 70 % reduction in average measurement time Measurement results and measurement times when measuring a width of about 20 mm thrice (continuous reciprocation) Measurement with the measuring microscope only Measurement with the measuring microscope & vision unit Operator A Operator B Operator C Max. value (mm) 20.0863 20.0849 20.0811 Max. value (mm) 20.0863 Min. value (mm) 20.0765 20.0802 20.0758 Min. value (mm) 20.0758 Variation (mm) 0.0098 0.0047 0.0053 Variation (mm) 0.0105 Measurement time (sec) 76 150 89 Measurement time (sec) 105 Operator A Operator B Operator C Max. value (mm) 20.0847 20.0853 20.085 Max. value (mm) 20.0853 Min. value (mm) 20.0846 20.0842 20.0837 Min. value (mm) 20.0837 Variation (mm) 0.0001 0.0011 0.0013 Variation (mm) 0.0016 Measurement time (sec) 36 23 25 Measurement time (sec) 28 Simplified Report/Storage Function The vision unit allows anyone to perform simplified measurement of an edge with just one click. Also, using the vision unit eliminates the need for burdensome workpiece orientating and data point detection with cross hairs, thus allowing quick inspection of dimensions. This series has the functions to perform tolerance verification of measurement/calculation results, various statistical processing for each item and image load/storage, enabling storage of measurement results and images at measured points. Since measurement results can also be outputted in the CSV format, this allows smooth creation of inspection table. Reduction of Variation/Improvement in Efficiency System example Camera/Images
11 Optional Accessories Vision Unit Dedicated Software - QSPAK - Editing light conditions with the dialog box Editing a circle tool on the video window Editing the nominal value/tolerance with the dialog box PRO mode (Universal measurement mode) Simple/Universal Mode Switching (EZ/PRO) Simple Edit of Measurement Program (Smart Editor) Edge Detection Functions In the EZ mode for Simple & Operation guidance display, this software allows even a beginner to perform measurement without any confusion using the easy-to-understand measurement icons and guidance function. Also, it supports the needs of more advanced measurement by the ability to switch to the PRO mode where the full functions of QSPAK are supported. This function simply enables program correction/edit by only selecting an item you want to edit from among existing programs. Outlier Removal Function· ················· Removes outliers such as burrs and chips. Dual-area Contrast Tool······················· Automatically adjusts the light intensity of two areas to the optimum. Auto Trace Tool····································· Automatically detects contour data while predicting the next one. To perform contour analysis and contour tolerancing, use 2-dimensional analysis software (FORMTRACEPAK-AP). Camera/Images EZ mode (Simple measurement mode)
12 Vision Unit Dedicated Software - QSPAK - Simplified Multi-point Measurement (One-click Tool) Graphics Function Navigation Function (Quick Navigation) Th i s f unc t i on au t oma t i c a l l y d i s p l a y s t he cu r ren t po s i t i on , coo rd i na t e system, measurement feature and measurement result on the graphics window to prevent an omission or error of measurement from occurring. It also enables you to grasp which portion of the whole workpiece is observed by importing 2-dimensional CAD data*. * Optional software (For details refer to Page 13.) O n c e a m e a s u r e m e n t p r o g r a m i s c r e a t e d , a n y o n e c a n m e a s u r e a w o r k p i e c e j u s t a s w e l l a s s k i l l e d p e r s o n n e l b y m e re l y f o l l o w i n g t h e navigation instructions at the next measuring point. One-click circle tool One-click box tool ( 1 ) T h e n e x t m e a s u r i n g p o i n t i s indicated with red cross hairs. (2) App ro a c h i ng t h e me a s u r i ng po i n t , the red cross hairs and green cross hairs come close to each other. (3) When both cross hairs overlap one another while indicating the target p o i n t , p r e s s t h e I n p u t b u t t o n t o complete the measurement. System example Optional Accessories Camera/Images A me re c l i c k o n a n e d g e a l l ow s c o r re c t me a s u reme n t , a v o i d i n g t h e variation inherent in conventional multi-point measurement. The function to remove outl iers such as burrs and chips can be used concurrently.
13 Optional Software 2-dimensional Analysis Software - FORMTRACEPAK-AP - Effective use of CAD model - QS-CAD I/F - Early detection of process irregularities - MeasurLink - FORMTRACEPAK-AP allows contour analysis and comparative verification with the nominal value, making use of the point group data acquired with the auto trace tool. 2-D CAD model data (DXF-, or IGES-formatted) can be imported into QIPAK. Conversely, QIPAK measurement results can be converted into 2-D CAD model data. The design value for each measurement item is automatical ly entered. Since the graphics window makes the present position easy to identify, the operator can quickly move the stage a given point in the 2-D CAD model. Statistical data can be displayed in real-time, making early detection of process irregularities possible. Early identification of an out-of-control situation enables rapid remedial action to be taken when necessary. Form analysis can be performed seamlessly from measured images with simple operations. Contour tolerancing against the nominal value is also enabled. For example, the software allows over-pin diameter measurement by defining virtual circles with a given diameter around a gear. Example of form analysis Example of gear contour matching, and an over-pin diameter analysis Examples of remedial action • Mold repair or cycle-timing change • Cutting tool adjustment or replacement. Optional Accessories Camera/Images Present position
14 C-mount Adapter 0.5X TV Adapter (including C-mount) This adapter is used to mount a C-mount compatible digital camera on the microscope main unit. This adapter is used to mount a C-mount compatible digital CCD camera on the microscope main unit, thereby making an observation area on the monitor close to the real field of view through the objective. Order No. 02ATN695 Order No. 970441 Order No. 375-054 Calibration Chart Others Calibration Chart T h i s c h a r t i s u s e d f o r p i x e l - s i z e c o r re c t i o n o f t h e CCD , a n d a u t o - focus accuracy and opt ical -axi s offset correct ions for each selected magnification. * The function may be limited depending on the lens. For detailed information, contact a Mitutoyo sales office. System example Optional Accessories Camera/Images Vision Unit 10D Order No. 359 -763 Magnification of optical s ys tem When ins talled on the microscope 0.5X (using the 0.5X T V adapter ) Image detec tion High sensitivit y 1/ 2- inch CMOS color camera with 30 0 million pixels Resolution 0.1 μm Measuring accurac y for each axis (in a 20 °C environment) Depends on measuring microscope Accurac y (in a 20 °C environment) Depends on measuring microscope Reference: when using a 3X ML objec tive (per forming an inspec tion using our s tandard sample) Screen- internal repeatabilit y (3 s): ±2.5 μm or less PC s ys tem Windows 10 6 4bit Sof t ware QSPAK VUE Applicable model MF D/MF - U D Specifications Note: Software (QSPAK VUE) and calculation processor are required separately.
15 Calculation processing Data Processing Applications Foot Switch 2-dimesinal Data Processing Unit QM-Data200 Order No.: 264-155 Application: QM-Data200 allows various data processing operations and creation of measurement programs without needing any other data processing unit. Resolution: 0.1 µm Program function: Creation, execution and editing of measurement procedures Statistical processing: Measurement items, number of data, maximum value, minimum value, mean value, standard deviation, range, histogram and statistics by measurement function (statistics by command) Display: TFTLCD (with LED backlight) T ilting mechanism: Installed Order No.: 12AAJ088 Application: Foot switch for data transfer A measurement result can be transferred to the data processing unit by stepping on the switch while holding the feed wheels. Optional Accessories Camera/Images
16 Eyepieces WF10X/24 WF20X/12 Order No. (1 piece) 378-866-5 378-858-5 Order No. (2 pieces) 378-866 378-858 Magnification 10X 20X Field number 24 12 Monocular Tube Order No. 176-392 Binocular Tube Order No. 176-393 Protractor Eyepiece Order No. 375-043 Focus Detector Unit Focus Pilot Model No. FP-05 FP-05U Order No. 375-057 (Green) 375-058 (Red) 375-067 (Green) 375-068 (Red) Light source Green LED or Red LED • Concentric circle pattern • Slit pattern · The focal point is the positon where the top and bottom of the pattern are aligned. · Pattern selection and brightness adjustment are enabled according to the surface status of a workpiece. · Observation with a wide field of view on a video monitor is available using 0.5X optical system (with a CCD camera mounted separately). Focusing reproducibility Approximately 1.5 μm (when using a 20X lens) Note: In-company measured reference value of a sample Applicable model MF MF-U Optional Accessories Eyepieces/Optical Tubes >31˚35´ Fixed index line Rotating index line Vernier scale Vernier/35˚ Main scale Main scale/31˚ Selectable Eyepiece Unit for MF series (One of the four options must be selected) High-performance optical tube* for MF-U series (MF-U Dedicated Standard Option) Eyepieces Focus Detector Unit Optical Tubes Simple, low-priced monocular tube. * W F10X/24 eyepiece (1 pc.) equipped. Adjustable eyepiece angle enables the eye point to be adjusted according t o o p e r a t o r p h y s i q u e , r e d u c i n g e y e s t r a i n a n d e n a b l i n g c o m f o r t a b l e observation. * WF10X/24 eyepiece (2 pcs.) equipped. In addition to a standard accessory 10X lens, high magnification lenses, 15X and 20X, are available to suit various applications. Project ing an LED-generated chart patter n on the target enables easy and higha c c u r a c y f o c u s i n g , e f f e c t i v e l y r e d u c i n g h u m a n a n d r e p e t i t i o n e r r o r s i n h e i g h t measurement. The concent r i c c i rc l e pa t t e r n and s l i t pa t t e r n can be swi t ched . The co l or of the pattern is selectable from green and red to suit workpiece surface characteristics. Binocular tube reduces eye fatigue. * W F10X/24 eyepiece (2 pcs.) equipped. Graduation: 5’ Measuring range: 360° The angle reading scale is built in, allowing a n g l e m e a s u r e m e n t b y s i m p l y r o t a t i n g an index line between the features to be measured. * Exclusive-use eyepiece is equipped (10X, Field number: 21) Magnification 10X, Field number 22 Resolution: 0.01°/1’ Switchable Measuring range: 0-369.99° An angle is measured by simply rotating t h e c ro s s h a i r s . E l imi n a t e s mi s re a d i ng errors that can occur with the scale type. * Exclusive-use eyepiece is equipped (10X, Field number: 22) Digital Protractor Eyepiece Order No. 176-313 0 to 30°
17 For MF D For MF - U D Optional Accessories Eyepieces/Optical Tubes Each reticle includes an inser tion unit. Since the inser tion unit is specific to the model, selec t applicable reticles for your microscope. Reticles 12A AG838 (MF D) 12A AG878 (MF - U D) 90° chain lines Chain line pitch: 0.2 to 0.2 Line width: 7 µm 12A AG836 (MF D) 12A AG877 (MF - U D) 90° chain lines Chain line pitch: 0.2 to 0.2 Line width: 5 µm 12A AG873 (MF D) 12A AG876 (MF - U D) 90° chain lines Chain line pitch: 0.2 to 0.2 Line width: 3 µm 12A AG839 (MF C /MF D) 12A AG879 (MF - U D) 90° solid lines, 45° chain lines Chain line pitch: 0.2 to 0.2 Line width: 5 µm 12A AG8 4 0 (MF C /MF D) 12A AG8 80 (MF - U D) 90° chain lines, 60° chain lines Chain line pitch: 0.2 to 0.2 Line width: 5 µm 90° solid lines, 45° chain lines Chain line pitch: 0.2 to 0.2 Line width: 5 µm Chain line type Graduation line type (Objectives for MF series. Use these reticles with an eyepiece that has 10X magnification.) 12A AG8 42 (MF D) Cross haired graduation lines 0.1/20 mm Line width: 7 µm 12A AG8 43 (MF D) Concentric circles with graduation lines ø1.2 to ø18 Line width: 7 µm 12A AG8 4 4 (MF D) Graduation lines 0.1/10 mm Line width: 10 µm 0 10 20 30 40 50 60 70 80 90100 Reticle for digital protractor eyepiece (included as s t andard)
18 ML Objectives Model No. Order No. Magnification Numerical Aperture (NA) View field with eyepiece (mm)*1 View field with CCD camera (mm)*2 Resolving Power (μm) Working distance (mm) Depth of Focus ±D.F. (μm) ML 1X 375-036-2 1X 0.03 ø24 12.8×9.6 9.2 61.0 306 ML 3X 375-037-1 3X 0.09 ø8 4.27×3.2 3.06 77.0 34 ML 5X 375-034-1 5X 0.13 ø4.8 2.56×1.92 2.12 61.0 16.3 ML 10X 375-039 10X 0.21 ø2.4 1.28×0.96 1.31 51.0 6.2 ML 20X 375-051 20X 0.42 ø1.2 0.64×0.48 0.65 20.0 1.6 ML 50X 375-052 50X 0.55 ø0.48 0.26×0.19 0.5 13.0 0.9 ML 100X 375-053 100X 0.70 ø0.24 0.13×0.10 0.4 6.0 0.6 *1: View field with eyepiece is a view field when using eyepiece 10× (Standard accessory). *2: View field with CCD camera is a view field when using Mitutoyo Vision Unit (P10 to P14). ML Objectives Sliding Nosepiece (Factory-set Option) Compatible observation method: Bright-field observation Advantage: A measurement error is reduced with the correct magnification. The telecentric optical system is adopted for a magnification of 10X or less to reduce measurement error due to an out-of-focus condition. Two ML o b j e c t i v e s c a n b e mo u n t e d , a l l ow i n g s t re s s - f re e c h a n g e o f m a g n i f i c a t i o n . Tw o t y p e s a r e a v a i l a b l e a c c o r d i n g t o t h e s w i t c h i n g specifications. · Parfocal Type (Order No. 176-370-1) Since the focus of the two lenses, a reference lens (ML 3X) and the specified lens*, are both pre-adjusted, focusing after switching the lens is unnecessary. Note: The parfocal condition is not achieved with any lenses other than the specified combination. · Magnification Type (Order No. 176-370-2) The magnification of two lenses is guaranteed in a combination of a reference lens (ML 3X) and pre-specified lens*. R e c o m m e n d e d w h e n u s i n g t h e g u i d e - e q u i p p e d r e t i c l e o r comparison-measurement reticle. Note: Blurring may occur when switching the lens. * Select a lens from the ML objective lenses other than ML 3X. Objectives for MF Series Optional Accessories Objectives
19 FS objectives Model No. Order No. Magnification Numerical Aperture (NA) View field with eyepiece (mm) View field with CCD camera (mm)* Resolving Power (μm) Working distance (mm) Depth of Focus ±D.F. (μm) M Plan Apo 1X 378-800-12 1X 0.025 ø24 12.80×9.60 11 11.0 440 M Plan Apo 2X 378-801-12 2X 0.055 ø12 6.40×4.80 5 34.0 91 M Plan Apo 5X 378-802-6 5X 0.14 ø4.8 2.56×1.92 2 34.0 14 M Plan Apo 7.5X 378-807-3 7.5X 0.21 ø3.2 1.71×1.28 1.3 35.0 6.2 M Plan Apo 10X 378-803-3 10X 0.28 ø2.4 1.28×0.96 1 34.0 3.5 M Plan Apo 20X 378-804-3 20X 0.42 ø1.2 0.64×0.48 0.7 20.0 1.6 M Plan Apo 50X 378-805-3 50X 0.55 ø0.48 0.26×0.19 0.5 13.0 0.9 M Plan Apo 100X 378-806-3 100X 0.70 ø0.24 0.13×0.10 0.4 6.0 0.6 M Plan Apo SL 20X 378-810-3 20X 0.28 ø1.2 0.64×0.48 1 30.5 3.5 M Plan Apo SL 50X 378-811-15 50X 0.42 ø0.48 0.26×0.19 0.7 20.5 1.6 M Plan Apo SL 100X 378-813-3 100X 0.55 ø0.24 0.13×0.10 0.5 13.0 0.9 M Plan Apo HR 50X 378-814-4 50X 0.75 ø0.48 0.26×0.19 0.4 5.2 0.49 M Plan Apo HR 100X 378-815-4 100X 0.90 ø0.24 0.13×0.10 0.3 1.3 0.34 G Plan Apo 20X (t3.5) 378-847 20X 0.28 ø1.2 0.64×0.48 1 Air conversion29.42 3.5 G Plan Apo 50X (t3.5) 378-848-3 50X 0.50 ø0.48 0.26×0.19 0.6 Air conversion13.89 1.1 * View field with CCD camera is a view field when using Mitutoyo Vision Unit (P10 to P14). Note: SL: Super long working distance model HR: High Resolution model Model No. Order No. Magnification Numerical Aperture (NA) View field with eyepiece (mm) View field with CCD camera (mm)* Resolving Power (μm) Working distance (mm) Depth of Focus ±D.F. (μm) BD Plan Apo 2X 378-831-12 2X 0.055 ø12 6.40×4.80 5 34.0 91 BD Plan Apo 5X 378-832-7 5X 0.14 ø4.8 2.56×1.92 2 34.0 14 BD Plan Apo 7.5X 378-830-7 7.5X 0.21 ø3.2 1.71×1.28 1.3 34.0 6.2 BD Plan Apo 10X 378-833-7 10X 0.28 ø2.4 1.28×0.96 1 34.0 3.5 BD Plan Apo 20X 378-834-7 20X 0.42 ø1.2 0.64×0.48 0.7 20.0 1.6 BD Plan Apo 50X 378-835-7 50X 0.55 ø0.48 0.26×0.19 0.5 13.0 0.9 BD Plan Apo 100X 378-836-7 100X 0.70 ø0.24 0.13×0.10 0.4 6.0 0.6 * View field with CCD camera is a view field when using Mitutoyo Vision Unit (P10 to P14). M Plan Apo Objectives G Plan Apo Objectives BD Plan Apo Objectives C o m p a t i b l e o b s e r v a t i o n m e t h o d : B r i g h t - f i e l d o b s e r v a t i o n , s i m p l e p o l a r i z e d o b s e r v a t i o n , differential interference observation A d v a n t a g e : P l a n a p o c h r o m a t l e n s e s f r e e o f s p h e r i c a l a b e r r a t i o n / c h r o m a t i c aberration are adopted to obtain images w i t h e x c e l l e n t c o l o r r e p r o d u c i b i l i t y without blur over the entire field of view. Compatible observation method: Observation through a cover glass Advantage: Correction design is performed so as to obtain optimal observation images when observing through the glass. ( C o r r e c t e d o n t h e b a s i s o f B K7 a n d a cover glass thickness of 3.5 mm. Custom o r d e r o f o t h e r g l a s s m a t e r i a l a n d thickness is also available.) C o m p a t i b l e o b s e r v a t i o n m e t h o d : B r i g h t - f i e l d o b s e r v a t i o n , d a r k - f i e l d o b s e r v a t i o n , s i m p l e polarized observation, differential interference observation Advant age: Dark - f i e ld obser vat ion i s al so suppor t ed whi le maintaining the per formance of the M Plan Apo objective series. Turret Supported observation Bright field (M Plan Apo/G Plan Apo) Bright and dark field (BD Plan Apo) Order No. 378-018 378-216 176-211 176-212 Driving method Manual Power Manual Power Number of ways 4 5 4 4 Aligning/Parfocal mechanism Al igning / Parfocal Al igning — — * When using the turret without parfocal mechanism and objectives, it is recommended to concurrently use "Parfocal Adjustment SIMM Set" (for bright-field observation: Order No. 378-089, for dark-field observation: Order No. 378-090). Objectives for the MF-U Series Manual turret for Bright-field and dark-field (4 ways) Manual turret for Bright-field (4 ways) Mounting example of power turret (No. 378-216) Powerl turret for Brightfield and dark-field (4 ways)
20 Order No.: 176-306 Application: Workpiece orientating/positional fine-adjustment External dimension: 342 (W)×342 (D)×23.2 (H) mm Tabletop: ø270 mm, 360° rotation, no angle scale Mass: 6.5 kg Effective glass diameter (mm): ø238 Applicable model: Size 2017, 3017, 4020 (MF/MF-U series) * The V-block with Clamp, Swivel Center Support and Holder with Clamp can NOT be mounted on the table. Order No.: 176-305 Application: Workpiece orientating/positional fine-adjustment External dimension: 280 (W)×280 (D)×23.7 (H) mm Tabletop: ø240 mm, 360° rotation, no angle scale Mass: 5.5 kg Effective glass diameter (mm): ø182 Applicable model: Size 1010, 2010 (MF/MF-U series) * Option: 172-197 Swivel Center Support 176-107 Holder with Clamp 172-378 V-block with Clamp Rotary table with Fine Wheel (A) Rotary table with Fine Wheel (B) Stage Adapter Order No.: Stage Adapter: 176-304 Stage Adapter B: 176-310 Application: Used when setting the workpiece fixture on the stage. External dimensions for one piece: 50 (W)×340 (D)×15 (H) mm *Note) Adapter B is 280 (D) Mass: Stage Adapter: 1.5 kg Stage Adapter B: 1.2 kg Stage size 1010 2010 2017 3017 4020 176-304 Stage Adapter — Not applicable Applicable 176-310 Stage Adapter B — Applicable Not applicable Note: Not required for model 1010. 2-6.6 drill ø11 counter sink depth 12 176-304 Stage Adapter 29 29 3.5 3 25 13 7 15 50 282 340 N=2 T-groove dimensions 2-6.6 drill ø11counter sink 12 64 64 45° 45° (152) (12) 12 A 3.5 3 25 15 2 50 13 (13) (7) 7 256 280 Part A dimensions 176-310 Stage Adapter Optional Accessories Rotary tables 120 70 256 12 220 31 220 30 10.5(0.2) 13 23.7 19 13 8 22.5 280 280 M6 188 182 50 240 220 37˚ 24˚ 29˚ ø184 (Table inside diameter) (103.945) (103.945) ø28 13 2-ø7 hole, Lip: ø14, counter sink depth: 4 2-M6 depth 8 2-M6 depth 8 Clamp screw Clamp screws (2) Turning knob ø (stage glass outside diameter) ø 1 ø ø 4 ø t i d a (effective stage glass diameter) i er 9.5 13 (0.7) (137.618) (96.361) 8 13 19 23.2 220 282 342 342 M6 241 245 270 238 62 4-C 58 3 ø28 Clamp screws (2) Turning knob Clamp screw ø (table inside diameter) ø (stage glass outside diameter) ø ø (effective stage glass diameter) ø 2 ø (t d s m
21 Order No.: 375-056 Scale length: 1 mm Application: F or verifying magnification of objective lens Minimum graduation: 0.01 mm Scale accuracy (20 °C): 1+L (μm) L: length between any two lines (mm) External dimensions: 76 (W)×26 (D) mm Mass: 16 g * Note: After purchasing the product, we perform calibration. For details, contact your neatest Mitutoyo Sales Office. Order No.: 176-309 Application: Microscope main unit mounting stand Maximum loading: 300 kg External dimensions: 1200 (W)×900 (D)×650 (H) mm Mass: Approximately 50 kg Applicable model: MF/MF-U * No t e : When s pe c i f y i ng a mi c ro s cope wi t h t he V i s i on U n i t , w e r e c o m m e n d s e l e c t i n g t h e l a r g e m o u n t i n g stand No. 02ATE760, which has external dimensions of 1,800 (W)×900 (D)×740 (H) mm. Order No.: 176-308 Application: Microscope vibration isolation table Supporting method: Spring pad Maximum loading: 200 kg External dimensions: 750 (W)×550 (D)×36 (H) mm Mass: 36 kg Applicable model: MF/MF-U Positive type scale Negative type scale Order No.: 176-107 Application: Used to clamp a thin workpiece such as a PCB or pressed part. Maximum clamp length: 35 mm External dimensions: 62 (H)×152 (W)×38 (D) mm Mass: 0.4 kg * Note: Size 2010 is used with stage adapter B. Sizes 2017, 3017, and 4020 are usable with stage adapter Order No.: 172-378 Maximum clamping diameter: ø25 mm Height from the mounting surface to the center: 38-48 mm Application: Used to mount a cylindrical-form workpiece. External dimensions: 117 (H)×90 (W)×45 (D) mm Mass: 0.8 kg * Note: Size 2010 is used with stage adapter B. Sizes 2017, 3017, and 4020 are usable with stage adapter Order No.: 172-197 ±10° for swivel position Maximum angle index: 1° Application: Used to mount a center-machined workpiece for measurement of screw pitch diameter, depth, etc. Maximum horizontal clamping size: ø80×140 mm Maximum clamping size when inclined 10°: ø65×140 mm Mass: 2.5 kg * Note: Size 2010 is used with stage adapter B. Sizes 2017, 3017, and 4020 are usable with stage adapter Holder with Clamp Stage Micrometer V-block with Clamp Mounting Stand (for Microscope) Swivel Center Support Vibration Damping Stand 240 150 125 200 220 12 ø12 ø28 45 87 66 42 20 11 16 16 31 74 75 93 240 150 125 200 220 12 ø12 ø28 45 87 66 42 20 11 31 74 75 93 7 120 4-6.8穴 84 9 9 35 52.5 1.5 20（9） 38 105 75 （44） 152 2 15 3 13 T溝詳細 7 3 2 13 T-groove dimensions 120 4-6.8 hole 84 75 (44) 15 9 20 (9) 38 9 35 52.5 1.5 105 152 2-6.6×11.6長穴 13 41 90 7 5 8 取付用T溝寸法 支持可能ワーク詳細図 ø25 （max） ø4 （min） 75 （70～80可能） 45 10 42.8 55.5 43 117 48.5 37.9 33.6 2-6.6×11.6 long hole 13 7 5 8 T-groove dimensions 75 45 10 Clamping workpiece dimensions ø25(max) ø4(min) 41 90 90’(87’(0)° 24 2.5 42.8 55.5 43 117 48.5 37.9 33.6 90° (Permissible 70 - 80) Optional Accessories Others
22 LED Illumination Unit Halogen Illumination Unit Illumination filter The LED illumination unit has a longer operating life than a halogen bulb. This reduces running costs and saves the trouble of replacing the bulb. Also, a quick response to light control allows stress-free search for the illumination condition best suited to a workpiece. For MF series: Transmitted/Reflected illumination Set Order No. 176-445 For MF-U series: Transmitted/Reflected illumination Set Order No. 176-446 S e l e c t t h i s i l l um i n a t i on un i t wh e n me a s u r i ng a l ow- re f l e c t i v i t y wo r k p i e c e rather than the standard LED illumination unit. For MF series: Transmitted/Reflected illumination Set Order No. 176-447 For MF-U series: Transmitted Order No. 176-448 Reflected 100 W (Standard) Order No. 176-315 150 W (High brightness) Order No. 176-316 Select the optimal filter depending on the intended use. GIF filter: Emphasizes contrast in the image. LB filter: Converts the warm-colored halogen light to a more natural color. ND filter: Reduces illumination intensity without changing the observation condition (color temperature) in spite of the fact that halogen light becomes redder when darkened by decreasing the voltage. ND2: Light intensity 1/2 (transmission factor 50 %) ND8: Light intensity 1/8 (transmission factor 12.5 %) Light source Applicable model Order No. Illumination method GIF LB80 ND2 ND8 LED illumination MF 176-445 Transmitted/ reflected 12AAA645 — — — MF-U 176-446 Halogen illumination MF 176-447 Transmitted/ reflected 12AAA645 12AAA646 12AAA643 12AAA644 MF-U 176-448 Transmitted 176-315 Reflected (100 W) 12AAG806 12AAG807 — — 176-316 Reflected (150 W) — — — — For transmitted illumination For reflected illumination Order No. 176-445 Order No. 176-447 Order No. 176-316 Optional Accessories Internal light source Spare lighting Select high-brightness or long-life lighting according to your application. Applicable model Applicable model Illumination method High-brightness type Long-life type MF 176-447 Transmitted/reflected 513667 12BAB345 MF-U 176-448 Transmitted 513667 12BAB345 176-315 Reflected (100 W) 12BAD602 517181 176-316 Reflected (150 W) 12 B A J 0 7 5 12BA J 0 7 6 External light source 176-366 / 176-343 ̶ 12BAD602 517181
23 LED Ring Light Fiber-Optic Ring Light Dual swan-neck light pipe For MF series : Order No. 176-367-2 (Standard) : Order No. 176-371 (Specific to Sliding Nosepiece) For MF-U series : Please contact with your local Mitutoyo Sales Office. This illumination unit provides a high image contrast for observation of deep-color resins, PCBs and small-diameter cylinders, thus providing optimal performance for vision measurement. Even if the brightness of illumination is changed, no color will change. * The ring light illumination is compatible with ML objectives of 10X or less. If an objective with a magnification of more than 10X is used, there is a risk of difficulties in observation due to insufficient light intensity. For MF series: Order No. 176-366 (Standard) The Fiber-Optic Ring Light is the best unit to use when a bright, shadowless image is required. This illumination is best suited to observation at high magnifications and vision measurement. * The r i ng l i gh t i l l umi na t i on i s compa t i b l e wi t h ML ob j e c t i v e s o f 10X o r l e s s . I f an objective with a magnification of more than 10X is used, there is a risk of difficulties in observation due to insufficient light intensity. For MF and MF-U series: Order No. 176-343 Th i s i l l umi na t i on un i t h i gh l i gh t s t he f e a t u re s o f a wo r kp i e c e s u r f a c e b y app l y i ng ob l i que l i gh t t o i t , f o rmi ng s hadows wh i ch a i d v i ew i ng . H i gh - b r i gh t ne s s s po t l i gh t i ng i s a l s o a v a i l ab l e by t he con cu r ren t u s e o f t he s t anda rd - s upp l i ed conden s e r l en s . Mounted on MF series Mounted on MF-U series LED Ring Light / Fiber-Optic Ring Light Dual swan-neck light pipe Vertical Transmitted Illumination Optional Accessories External light source
24 MF Series Specifications Manual Models Main unit 1010 2010 2017 3017 4020 Without Z-axis scale MF-A1010D MF-A2010D MF-A2017D MF-A3017D MF-A4020D 176-861*1 176-862*1 176-863*1 176-864*1 176-865*1 With Z-axis scale MF-B1010D MF-B2010D MF-B2017D MF-B3017D MF-B4020D 176-866*1 176-867*1 176-868*1 176-869*1 176-870*1 Measuring accuracy*2 (20 °C, when not loaded) (2.2+0.02L) µm L: measuring length (mm) Minimum reading High accuracy digital scale is mounted 1/0.5/0.1 μm switchable Observation Optical tube Monocular or binocular TV camera port for all models (observation/TV camera = 50/50)*4 is provided as standard Reticle (broken cross-hair, line width: 5 μm) is provided as standard Various reticles are optional. Incline angle Angle of column: 25° Observation image Erect image Observation method Bright-field observation Eyepiece 10X (eyepiece field number: 24) is provided as standard 15X, 20X, Angle eyepieces 10X, Digital angle eyepieces 10X are optional. Objective 3X (working distance: 77 mm) is provided as standard 1X, 5X, 20X, 50X, 100X, a pair of sliding nosepieces*5 are optional. Stage Measuring range 100×100 mm 200×100 mm 200×170 mm 300×170 mm 400×200 mm Max. table loading 10 kg 20 kg 15 kg Feed mechanism Manual and Quick-release mechanism (zero-set switch is incorporated) Swiveling angle － ±5° ±3° Internal light source • LED Illumination Unit White LED (transmitted/vertical reflected), no step modulated light • Halogen Illumination Unit 12 V, 50 W halogen (transmitted/vertical reflected), no step modulated light External light source Ring light and dual swan-neck light pipe are optional. Z axis Feed mechanism Coaxial coarse and fine feed, handles on both sides (coarse: 30 mm/rotation, fine: 0.2 mm/rotation) Max. workpiece height 150 mm 220 mm Dimensions (W×D×H) Main unit 562×730×667 mm 624×745×667 mm 642×892×782 mm 692×892×782 mm 756×892×782 mm Control unit － Control unit for illumination unit 114×360×96 mm Output RS-232C output, USB output for Vision Unit Mass Approx. 70 kg Approx. 75 kg Approx. 150 kg Approx. 160 kg Approx. 165 kg Max. power consumption*3 LED: 45 W Halogen: 160 W AC power input connector: 100 to 240 V Motor-Driven Z-axis Models Main unit 1010 2010 2017 3017 4020 With Z-axis scale MF-J2017D MF-J3017D MF-J4020D 176-891*1 176-892*1 176-893*1 Z axis Feed mechanism Motor drive (Maximum measuring speed: 20 mm/s), lower limit setting (for collision avoidance with a workpiece) Max. workpiece height 220 mm Dimensions (W×D×H) Main unit 642×892×782 mm 692×892×782 mm 756×892×782 mm Control unit 355×364×106.5 mm Control unit for illumination unit 114×360×96 mm Output RS-232C output, USB output for Vision Unit Mass Approx. 160 kg Approx. 170 kg Approx. 175 kg Max. power consumption*3 LED: 275 W Halogen: 390 W AC power input connector: 100 to 240 V Note: The specification other than the above is subject to the manual models. • Required optional accessory *1 To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE. *2 Measured in conformance with JIS B 7153 *3 Optional accessory is NOT target (Main unit and required optional illumination are target) *4 C mount is required separately. *5 A pair of Sliding Nosepieces are factory-installed option.
25 MF-U Series Manual Models Main unit 1010 2010 2017 3017 4020 BF (Bright-field) Without Z-axis scale MF-UA1010D MF-UA2010D MF-UA2017D MF-UA3017D MF-UA4020D 176-871*1 176-872*1 176-873*1 176-874*1 176-875*1 With Z-axis scale MF-UB1010D MF-UB2010D MF-UB2017D MF-UB3017D MF-UB4020D 176-876*1 176-877*1 176-878*1 176-879*1 176-880*1 BD (Bright/ Dark-field) Without Z-axis scale MF-UC1010D MF-UC2010D MF-UC2017D MF-UC3017D MF-UC4020D 176-881*1 176-882*1 176-883*1 176-884*1 176-885*1 With Z-axis scale MF-UD1010D MF-UD2010D MF-UD2017D MF-UD3017D MF-UD4020D 176-886*1 176-887*1 176-888*1 176-889*1 176-890*1 Measuring accuracy*2 (20 °C, when not loaded) (2.2+0.02L) µm L: measuring length (mm) Minimum reading High accuracy digital scale is mounted 1/0.5/0.1 µm switchable Observation Optical tube T ilting optical tube is provided as standard TV camera port for all models (observation/TV camera = 50/50*4 is provided as standard Reticle (broken cross-hair, line width: 5 μm) is provided as standard Various reticles are optional. Incline angle Angle of column: 0-30° Observation image Erect image Observation method Bright-field observation/Dark-field observation (Only for MF-UC and MF-UD types) Simple polarization and differential interference are optional. Eyepiece 10X (eyepiece field number: 24) is provided as standard 15X, 20X are optional. Turret Manual, motor drive Objective • Bright-field (BF) M Plan Apo, G Plan Apo series • Bright/Dark-field (BD) BD Plan Apo series Stage Measuring range 100×100 mm 200×100 mm 200×170 mm 300×170 mm 400×200 mm Max. table loading 10 kg 20 kg 15 kg Feed mechanism Manual and Quick-release mechanism (zero-set switch is incorporated) Swiveling angle — ±5° ±3° Internal light source • LED Illumination Unit White LED (transmitted/vertical reflected), no step modulated light • Halogen Illumination Unit 12 V, 50 W halogen (transmitted), no step modulated light 12 V, 100 W (vertical reflected), no step modulated light*5 15 V, 150 W (vertical reflected), no step modulated light are optional.*5 External light source Dual swan-neck light pipe are optional. Z axis Feed mechanism Manual handles on both sides (coarse: 30 mm/rotation, fine: 0.2 mm/rotation) Max. workpiece height 150 mm 220 mm Dimensions (W×D×H) Main unit 562×730×667 mm 624×745×667 mm 642×892×782 mm 692×892×782 mm 756×892×782 mm Control unit — Control unit for illumination unit 114×360×96 mm Output RS-232C output, USB output for Vision Unit Mass Approx. 70 kg Approx. 75 kg Approx. 150 kg Approx. 160 kg Approx. 165 kg Max. power consumption*3 LED: 55 W Halogen: 190 W (vertical reflected 12 V, 100 W) and 240 W (vertical reflected 15 V, 150 W) AC power input connector: 100 to 240 V Motor-Driven Z-axis Models Main unit 1010 2010 2017 3017 4020 BF (Bright-field) With Z-axis scale MF-UJ2017D MF-UJ3017D MF-UJ4020D 176-894*1 176-895*1 176-896*1 BD (Bright/Dark-field) With Z-axis scale MF-UK2017D MF-UK3017D MF-UK4020D 176-897*1 176-898*1 176-899*1 Z axis Feed mechanism Motor drive (Maximum measuring speed: 20 mm/s), lower limit setting (for collision avoidance with a workpiece) Max. workpiece height 220 mm Dimensions (W×D×H) Main unit 642×892×782 mm 692×892×782 mm 756×892×782 mm Control unit 355×364×106.5 mm Control unit for illumination unit 114×360×96 mm Output RS-232C output, USB output for Vision Unit Mass Approx. 160 kg Approx. 170 kg Approx. 175 kg Max. power consumption*3 LED: 285 W Halogen: 420 W (vertical reflected 12 V, 100 W) and 470 W (vertical reflected 15 V, 150 W) AC power input connector: 100 to 240 V Note: The specification other than the above is subject to the manual models. • Required optional accessory *1 To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE. *2 Measured in conformance with JIS B 7153 *3 Optional accessory is NOT target (Main unit and required optional illumination are target) *4 C mount is required separately. *5 Select either one
26 Camera/Images P. 10 - 15 Eyepiece/Optical tube Rotary table/Others P. 16 P. 20, 21 Digital protractor eyepiece 176-313 Size 1010 Size 2010 Rotary table with fine feed wheel (A) 176-305 Size 2017/3017/4020 Rotary table with fine feed wheel (B) 176-306 Stage adapter 176-304 Stage adapter B 176-310 V-block with clamp 172-378 Swivel center support 172-197 Holder with clamp 176-107 Protractor eyepiece 375-043 Monocular unit 176-392 Reticle Eyepiece 10X 2pcs. 378-866 1pc. 378-866-5 Eyepiece 20X 2pcs. 378-858 1pc. 378-858-5 Binocular unit 176-393 C mount 970441 0.5X adapter (with C mount) 375-054 Focus pilot FP-05 Green (375-057)/Red (375-058) External camera system MF Series P. 17 MF Diagram
27 External light source Objectives Internal light source Data processing P. 18 P. 23 P. 22 P. 15 Vision unit 10DSet • Vision unit • Data processor • Main software External control cable (12AAD128) Fiber-Optic Ring (176-366) Dual swan-neck (176-343) LED Ring (176-367-2) Various ML objectives Transmitted Transmitted Reflected Reflected Control unit RS-232C cable (12AAA807) QM-Data200 (264-155) Control unit Filter • GIF Filter • ND2 Filter (12AAA645) (12AAA643) • LB80 Filter • ND8 Filter (12AAA646) (12AAA644) Filter • GIF Filter (12AAA645) LED illumination unit 176-445 Halogen illumination unit 176-447 LED Ring (for FS Objectives) (176-371) Sliding Nosepiece • 176-370-1 • 176-370-2 Filter • GIF Filter (12AAG806) • LB80 Filter (12AAG807) External control cable (12AAG888) Vision AF cable (12AAN358) Calibration chart (02ATN695) Foot switch (12AAJ088) Foot switch (12AAJ088) External printer cable (12AAA804) External printer Required option for Motor-Driven Z-axis models Required option
28 Size 1010 Size 2010 Rotary table with fine feed wheel (A) 176-305 Size 2017/3017/4020 Rotary table with fine feed wheel (B) 176-306 Stage adapter 176-304 Stage adapter B 176-310 V-block with clamp 172-378 Swivel center support 172-197 Holder with clamp 176-107 Eyepiece 10X 2pcs. 378-866 Turret with aligning/ parfocal mechanism 4 holes 378-018 Aligning power turret 5 holes 378-216 Turret 4 holes 176-211 Power turret 4 holes 176-212 Bright-field (UA/UB/UJ) 5X,10X (378-080) 20X (378-079) 50X, SL20X (378-078) 100X, SL80X, SL50X (378-076) Objectives for bright-field Differential interference unit Objectives for bright-field/dark-field Dark-field (UC/UD/UK) Eyepiece/Optical tube Connect to Vision unit* Rotary table/Others Eyepiece 20X 2pcs. 378-858 C mount 970441 0.5X adapter (with C mount) 375-054 Focus pilot FP-05 Green (375-067)/Red (375-068) Camera/Images Polarization unit 378-092 Analyzer Polarizer Diagram MF-U Series RS-232C cable (12AAA807) External camera system P. 10 - 15 P. 16 P. 20, 21 P. 19 MF-U Objectives Reticle P. 17
29 Vision unit 10DSet • Vision unit • Data processor • Main software Dual swan-neck (176-343) Transmitted Transmitted Reflected Control unit Control unit LED illumination unit 176-446 Halogen illumination unit 176-448 Vision AF cable (12AAN358) Calibration chart (02ATN695) Foot switch (12AAJ088) Internal light source Data processing External light source Required option for Motor-Driven Z-axis models Required option RS-232C cable (12AAA807) QM-Data200 (264-155) Foot switch (12AAJ088) External printer cable (12AAA804) External printer Filter • GIF Filter • ND2 Filter (12AAA645) (12AAA643) • LB80 Filter • ND8 Filter (12AAA646) (12AAA644) Filter • GIF Filter (12AAA645) P. 23 P. 22 P. 15 * External control cable (12AAD128) Filter (External light source) • GIF Filter (12AAG806) • LB80 Filter (12AAG807) Filter (Reflected) • GIF Filter (12AAG806) • LB80 Filter (12AAG807) External control cable (12AAG888) External control cable (12AAD128) 100 W fiber (176-315) 150 W fiber (176-316) Reflected Reflected
30 Manual Models * Common dimensions for MF-A and MF-B models. Unit: mm MF Series Dimensions MF-B1010D MF-B2010D 417 360 360 168 168 551 667 300+50 234+50 200 249 327 78 79 259 121 215 210 16 727+50 96 114 79 78 327 249 667 551 360 422 205 259 121 742+50 269+100 355+100 168 168 215 210 16 360 96 114 MF-B2017D MF-B3017D MF-B4020D 121 360 782 79 327 247 889+85 464 205+100 259 621 249 78 291 351+100 360 96 114 464 79 782 360 121 249 78 327 247 889+100 451+200 305+200 621 259 360 96 114 360 96 114 79 327 889+85 782 464 121 360 255+150 621 249 78 259 401+150 291 247
31 Motor-Driven Z-axis Models Unit: mm MF-J2017D MF-J3017D MF-J4020D 249 464-684 351 100 247 621 215 120.3 147 85 782 244-330 360 86 205 100 360 96 114 85 147 150 401 120.3 215 621 247 255 360 36 150 782 244-330 464-684 249 360 96 114 147 305 621 215 120.3 451 360 247 244-330 249 464-684 782 100 200 200 360 96 114
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