PRE1033(4) L ASER SCAN MICROMETER SENSOR SYSTEMS NON-CONTACT MEASURING SYSTEM COMBINES HIGH-RATE SCANNING WITH HIGHLY ACCURATE MEASUREMENT
2 High scanning rate (3200 scans/sec) and high accuracy, non-contact measuring systems. The LSM features a very high scanning rate which allows inspection of small workpieces even if they are fragile, at a high temperature, in motion or vibrating. Features 0.005mm-diameter ultra-fine wires to 160mmdiameter cylinders can be measured: Seamless measurement range models A rich assortment of models for diverse measuring applications. The LSM-500S can measure ultra-fine wires as thin as 0.005mm in diameter to a resolution of 0.00001mm, and the LSM-516S can measure cylindrical workpieces with a diameter as large as 160mm. The LSM-9506 bench-top model combines a display section and measurement section all in one unit. Ultra-high scanning rate 3200 scans/sec The incorporation of a sixteen-face polygonal mirror and a highprecision motor now makes scanning at 3200 scans per second possible. This formidable capability is ideal, for example, for taking measurements on high-speed production lines or on vibrating workpieces. Certified accuracy over the entire measurement range The specified high accuracy over the entire measurement range is certified by the “Traceability System to the International Standard” which Mitutoyo, as a leading manufacturer of precision measurement tools and instruments, has established within its business practises. Improved resistance to IP64-level environments The measuring unit has been extensively developed to resist rough measurement environments. As a result, for example, it can operate at an ambient temperature of 45°C. (IP64-level resistance is not guaranteed for the display unit and the LSM-9506.) DIN-size compact panel-mounted display unit (LSM-5200) The LSM-5200 display unit is a compact DIN size, allowing it to be mounted in a panel so as to be suitable for mounting in a rack, etc., for use on production lines. Standard I/O output, analog output and RS-232C output interfaces The LSM-5200/6200/6900 has a standard I/O and analog output interface to connect it to an operation controller or PLC used on a production line. Also, every model has a standard RS-232C interface for connection to personal computers or printers. Laser Scan Micrometers
3 Motor driver Power source ROM RAM Polygonal mirror Collimating lens Condenser lens Photoelectric element (receiver) Amplifier Workpiece Photoelectric element (Reset signal generation) Motor Clock pulse MP RS RS Semiconductor laser CPU Edge detection circuit Edge detection circuit Segment selection circuit Gate Counter Expansion slot Foot switch Analog I/O RS-232C Keyboard Data display Motor driving pulse Principle Index Applications 4 All Models of Laser Scan Micrometer 6 Measuring Unit LSM-902/6900 Ultra-High Accuracy Measuring Unit 8 LSM-500S Ultra-Fine Wire Measuring Unit 10 LSM-501S Fine Wire Measuring Unit 12 LSM-503S Standard Measuring Unit 14 LSM-506S Wide Range Measuring Unit 16 LSM-512S Ultra-Wide Range Measuring Unit 18 LSM-516S Ultra-Wide Range Measuring Unit 20 LSM-9506 Bench-top Type with Display Unit 22 Optional accessories for Measuring Unit Calibration Gage Sets 23 Extension Signal Cables 23 Extension Relay Cables 23 Workstage 23 Wire Guiding Pulleys 23 Air-screen System 23 Adjustable Workstages 24 Display Unit LSM-5200 Compact (Panel-mount) Type Display Unit 28 LSM-6200 Multi-function Type Display Unit 29 LSM-5200/6200/6900/9506 Functions 30 LSM-5200/6200/6900/9506 Data I/O Specifications 32 Optional accessories for Display Unit LSMPAK 34 BCD Interface Unit 34 Digimatic Code-out Unit 35 Dual-type Add-on Unit 35 2nd I/O-Analog Interface Unit 36 BCD/2nd I/O-Analog Interface Cable 37 Thermal Printer 37 Footswitch 37 Glossary 38 Precautions Observe the following precautions 39 Re-assembly after removal from the base 39 Pages Pages A laser beam is directed at a polygonal mirror rotating at high speed in exact synchronism with highly stable pulses from the system clock. The reflected beam is rotating clockwise as it sweeps across the input surface of a collimating lens but changes direction to be always horizontal after the lens’ exit surface as it moves, or scans, downward. This horizontal beam enters the measuring space and, with no workpiece present, reaches a receiver via a condensing lens to produce an output signal. When a simple workpiece (a cylinder, for example) is put into the measuring space the beam will be interrupted for a time during its sweep and this time, as indicated by clock pulses occurring while the receiver signal is absent, is proportional to the workpiece dimension in the downward direction. Each transition between the receiver detecting the beam and then not detecting the beam, or vice versa, is called an ‘edge’ and marks the start and/or end of measuring sections called ‘segments’, so that the differences in position of these edges define the length of each segment. The edges and segments generated by a workpiece are numbered sequentially by the instrument and are used when writing programs to extract the required dimensional data.
4 Diameter Dia. Out of roundness Reference edge Reference edge Reference edge Reference edge Gap Applications On-line measurement of glass fiber or fine wire diameter Measurement of outer diameter of cylinder Measurement of outer diameter and roundness of cylinder X- and Y-axis measurement of electric cables and fibers Measurement of thickness of film and sheet Measurement of spacing of IC chip leads Measurement of film sheet thickness Measurement of laser disk and magnetic disk head movement Measurement of gap between rollers
5 Optimal for Inspecting the Outside Diameter of Pin Gages or Plug Gages The use of world-class laser scan micrometer LSM-902/6900 along with an adjustable workstage allows highaccuracy measurement inspection of the outside diameter of pin gages or plug gages. This LSM is also capable of data output to an external device such as a personal computer from the display unit. (Measurement data can be stored easily in cells on EXCEL by using the Mitutoyo input tool.) n Major Specifications Measuring range: 0.1 mm to 25.0 mm in diameter Resolution: 0.01 μm Linearity: ±0.5 μm Repeatability: ±0.05 μm Measurement of tape width Measurement of outer diameter of optical connector and ferrule Measurement of form
6 All models of Laser Scan Micrometer Measuring Units Measuring range Model Refer to... 0.005 - 2mm (.0002" - .08") LSM-500S Page 10 0.05 - 10mm (.002" - .4") FDA Class II LSM-501S Page 12 0.3 - 30mm (.012" - 1.18") LSM-503S Page 14 1 - 60mm (.04" - 2.36") LSM-506S Page 16 1 - 120mm (.04" - 4.72") LSM-512S Page 18 1 - 160mm (.04" - 6.30") LSM-516S Page 20
7 Measuring Unit (Factory-set package) Measuring range Model Refer to... 0.1 - 25mm (.004” - 1.0”) LSM-902/6900 Page 8 Measuring Unit with integrated display Measuring range Model Refer to... 0.5 - 60mm (.02" - 2.36") LSM-9506 Measuring unit / integrated-display model for bench-top use only Pages 22 Display Units Type Model Refer to... Multi-function (Power Supply 100V - 240V AC) LSM-6200 Page 29 Compact (Power Supply +24V DC) LSM-5200 Pages 28
8 † Suitable for pin and plug gage measurements. † Wide measuring range of ø 0.1 mm to ø 25 mm † Provides ultra-high accuracy with a linearity of ±0.5 µm over the entire measurement range and ±(0.3+0.1∆D) µm in the narrow range. † Ultra-high repeatability of ±0.05 µm LSM-902 /6900 Ultra-High Accuracy Measuring Unit Specifications Model LSM-902/6900 (Order no. suffix denotes the AC power cord type equipped.) 120V AC 544-495A 544-496A 220/230V AC 544-495D 544-496D 240V AC 544-495E 544-496E <Display unit> Acceptable standard of laser IEC (FDA: 544-495A) IEC (FDA: 544-496A) Measuring range 0.1 - 25 mm (.004" - 1.0") Resolution (selectable) 0.00001 - 0.01 mm (.000001" - .0005") Repeatability*1 ±0.05 µm (±1.9µinch) Linearity at 20°C*2 Entire range ±0.5 µm (±20µinch) Narrow range ±(0.3+0.1∆D) µm*5 Positional error*3 ±0.5 µm (±20 µinch) Measuring region*4 3x25 mm (.12"x.98") Scanning rate 800 scans/s Laser wavelength 650 nm, Visible*6 Laser scanning speed 56 m/s (2200”/s) Operating temperature 0°C - 40°C Operating humidity 35 - 85% RH (with no condensation) Mass Measuring unit: 6.0kg (13.2lbs.), Signal cable: 0.5kg (1.1lbs.) <Measuring unit> Type mm inch/mm Display 16-digit fluorescent tube (for measurement) & 11-digit fluorescent tube (sub display) Segment designation Seg.1 to Seg.7 (Seg.1 - Seg.3 for transparent objects) Edge designation 1 to 255 edges can be detected Averaging times Arithmetical average: per 1 to 2048, moving average: per 32 to 2048 GO/±NG judgment Nominal value ±tolerance setting, upper & lower limits setting, multi-limit setting Measurement mode Waiting, single measurement, continuous measurement Statistical calculation Maximum measurement (MAX), minimum measurement (MIN), mean, range (MAX-MIN), standard deviation (σ) Power supply 100 - 240V AC ±10%, 50/60Hz, 40VA Data output (as standard) Via RS-232C and I/O-Analog interfaces Functions (See page 16 and 17.) Operating temperature 0°C - 40°C Operating humidity 35 - 85% RH (with no condensation) Mass 5kg (11lbs.) *1: Determined by the value for ±2σ at the measurement of ø25mm workpiece with 1.28sec. interval (1024-time avarage). *2: At the center of the measuring region. *3: An error due to workpiece shift either in the optical axis direction or in the scanning direction. *4: The area given by "measuring range on the optical axis" x "measuring range in the scanning direction". *5: ∆D=Difference in diameter between the master gage and workpiece in mm. *6: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.5mW) Pin and plug gage measurements Factory-set-package LSM-6900 display unit LSM-902 measuring unit
9 Power Supply 100V - 240V AC 25 (.98") 70 (2.76") 170 (6.69") 50 (1.97") 5 (.20") 70 (2.76") 56 (2.20") 7 (.28") 35 (1.38") 10.5 (.41") 15.5 (.61") 8 (.31") 200 (7.87") 120 (4.72") 60 (2.36") 90 (3.54") 50 (1.97") 22 (.87") 15 (.59") 60 (2.36") 100 (3.94") 70 (2.76") min 74 (2.91") 190 (7.48") 70 (2.76") 70 (2.76") 11 (.43") 3 (.12") 11 (.43") 90 (3.54") 420 (16.54") 125 (4.92") 134 (5.28") 276.4 (10.88") 335 (13.19") Cable space 80 (3.15") 13 (.51") 121 (4.76") 8.2 (.32") 250 (9.84") App rox. 12º Optional accessories Dimensions LSM-902 measuring unit LSM-6900 disply unit 02AGD180 Calibration gage set (ø1mm, ø25mm) 02AGD270 Workstage 02AGD280 Adjustable Workstage Unit: mm (inch)
10 † Permits measurements starting from ø5µm † Provides ultra-high accuracy with a linearity of ±0.3µm over the entire measurement range (5µm to 2mm). † Ultra-high repeatability of ±0.03µm LSM-500S Ultra-Fine Wire Measuring Unit Specifications Model LSM-500S Order No. 544-532 Acceptable standard of laser IEC, FDA Measuring range*1 0.005 - 2mm (.0002" - .08") Resolution (selectable) 0.00001 - 0.01mm (.000001" - .0005") Repeatability*2 ±0.03µm (±1.1µinch) Linearity at 20°C*3 ±0.3µm (±12µinch) Positional error*4 ±0.4µm (±16µinch) Measuring region*5 1x2mm (.04"x.08") Scanning rate 3200 scans/s Laser wavelength 650nm, Visible*6 Laser scanning speed 76m/s (3000”/s) Operating temperature 0°C - 40°C Operating humidity 35 - 85% RH (with no condensation) Water/Dust protection grade Conforming to IP64*7 Mass Measuring unit: 1.0kg (2.2lbs.), Signal cable: 0.5kg (1.1lbs.) *1: If a workpiece is transparent or if the dual-type add-on unit that is an optional accessory for the LSM-6200 display unit is used, measurement range will be set to between 0.05mm (.002") to 2mm (.08"). In addition, if the edge measurement is selected for 1 to 255 edges or if the automatic workpiece detecting function is on, measuring range will be set to between 0.1mm (.004") to 2mm (.08"). *2: Determined by the value for ±2σ at the measurement of ø2mm workpiece with 0.32sec. interval (1024-time avarage). *3: At the center of the measuring region. *4: An error due to workpiece shift either in the optical axis direction or in the scanning direction. *5: The area given by "measuring range on the optical axis" x "measuring range in the scanning direction". *6: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.3mW) *7: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction. LSM-6200 display unit (optional) LSM-5200 display unit (optional)
11 Dimensions Optional accessories 02AGD220 Air-screen covers Unit: mm (inch) 70 (2.76") min. Cable space Working distance Measuring region Measuring position M4, depth 8 (x3) ø3.1 hole, depth 6 M3, depth 6 (x4) ø3.1 hole, depth 6 (Measuring position) 90 (3.54") 29.5 (1.16") 181 (7.13") 126 (4.96") 103 (4.06") 46 (1.81") 34 (1.34") 32 (1.26") 55 (2.17") 11 (.43") 11 (.43") 84 (3.31") 32.5 (1.28") 25 (.98") 2 (.08") 15.5 (.61") 40 (1.57") 17.5 (.69") 10.5 (.41") 14.5 (.57") 9.5 (.37") 1 (.04") Signal cable (Cable length: 5m) A : Bottom view A 02AGD200 Wire guiding pulley 02AGD110 Calibration gage set (ø0.1mm, ø2.0mm) 957608 Air cleaner for air-screen covers 02AGN780A Extension signal cable 5m 02AGN780B Extension signal cable 10m 02AGN780C Extension signal cable 15m
12 LSM-501S Fine Wire Measuring Unit † Provides ultra-high accuracy with a linearity of ±0.5µm over the entire measurement range (0.05mm to 10mm) and ±(0.3+0.1∆D)µm in the narrow range. † Ultra-high repeatability of ±0.04µm Specifications Model LSM-501S Order No. 544-534 Acceptable standard of laser IEC, FDA Measuring range 0.05 - 10mm (.002" - .4") Resolution (selectable) 0.00001 - 0.01mm (.000001" - .0005") Repeatability*1 ±0.04µm (±1.5µinch) Linearity at 20°C*2 Entire range ±0.5µm (±20µinch) Narrow range ±(0.3+0.1∆D)µm Positional error*3 ±0.5µm (±20µinch) Measuring region*4 2 x 10mm at ø0.05 - 0.1mm (.08" x .4" at ø.002" - .004") 4 x 10mm at ø0.1 - 10mm (.16" x .4" at ø.004" - .4") Scanning rate 3200 scans/s Laser wavelength 650nm, Visible*5 Laser scanning speed 113m/s (4450”/s) Operating temperature 0°C - 40°C Operating humidity 35 - 85% RH (with no condensation) Water/Dust protection grade Conforming to IP64*6 Mass Emission unit: 0.7kg (1.54lbs.), Reception unit: 0.4kg (.88lbs.), Base: 0.3kg (.66lbs.), Signal cable: 0.5kg (1.1lbs.) *1: Determined by the value for ±2σ at the measurement of ø10mm workpiece with 0.32sec. interval (512-time avarage). *2: At the center of the measuring region. *3: An error due to workpiece shift either in the optical axis direction or in the scanning direction. *4: The area given by "measuring range on the optical axis" x "measuring range in the scanning direction". *5: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.3mW) *6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction. LSM-6200 display unit (optional) LSM-5200 display unit (optional)
13 Dimensions 02AGD440 Center support* 02AGD450 Adjustable V-block* 957608 Air cleaner for air-screen cover 02AGC150A Extension relay cable 1m 02AGN780A Extension signal cable 5m 02AGN780B Extension signal cable 10m 02AGN780C Extension signal cable 15m *Use with an adjustable workstage. ø3.1 hole, depth 6 (Measuring position) 42 (1.65") 64 (2.52") 53 (2.09") 10.5 (.41") 15.5 (.61") 20 (.79") 84 (3.31") 104 (4.09") 57.5 (2.26") 10 (.39") 18.5 (.73") 9.5 (.37") 14.5 (.57") 6 (.24") M3 (x8) 50 (1.97") 22 (.87") 150 (5.91") 40 (1.57") 230 (9.06") 123 (4.84") 68 (2.68") 100 (3.94") max. 39 (1.54") 8 (.31") 8 (.31") 34 (1.34") 34 (1.34") 4 (.16") 157 (6.18") 73 (2.87") Base Emission Unit Relay cable 70 (2.76") min. Reception Unit Measuring position Measuring region 40 (1.57") 40 (1.57") 40.5 (1.59") 38.5 (1.52") 30 (1.18") M4, depth 8 (x3) ø3.1 hole, depth 6 ø3.1 hole, depth 6 110 (4.33") M4, depth 8 (x3) To Reception Unit (Cable length: 0.6m) A: Bottom view (Main unit detached from base) Cable space 9.5 (.37") 9.5 (.37") Signal cable (Cable length: 5m) A Unit: mm (inch) Optional accessories 02AGD400 Adjustable workstage 02AGD210 Wire guiding pulley 02AGD120 Calibration gage set (ø0.1mm, ø10mm) 02AGD230 Air-screen covers 02AGD270 Workstage
14 Dia. Out of roundness Reference edge LSM-503S Standard Measuring Unit † General-purpose type with a measurement range of 0.3mm to 30mm. † Provides high accuracy with a linearity of ±1.0µm over the entire measurement range and ±(0.6+0.1∆D)µm in the narrow range. † Excellent repeatability of ±0.1µm Specifications Model LSM-503S Order No. 544-536 Acceptable standard of laser IEC, FDA Measuring range 0.3 - 30mm (.012" - 1.18") Resolution (selectable) 0.00002 - 0.1mm (.000001" - .005") Repeatability*1 ±0.1µm (±3.9µinch) Linearity at 20°C*2 Entire range ±1.0µm (±40µinch) Narrow range ±(0.6+0.1∆D)µm Positional error*3 ±1.5µm (±60µinch) Measuring region*4 10 x 30mm (.4" x 1.18") Scanning rate 3200 scans/s Laser wavelength 650nm, Visible*5 Laser scanning speed 226m/s (8900”/s) Operating temperature 0°C - 40°C Operating humidity 35 - 85% RH (with no condensation) Water/Dust protection grade Conforming to IP64*6 Mass Emission unit: 1.1kg (2.42lbs.), Reception unit: 0.6kg (1.32lbs.), Base: 0.5kg (1.1lbs.), Signal cable: 0.5kg (1.1lbs.) *1: Determined by the value for ±2 at the measurement of ø30mm workpiece with 0.32sec. interval (1024-time avarage). *2: At the center of the measuring region. *3: An error due to workpiece shift either in the optical axis direction or in the scanning direction. *4: The area given by "measuring range on the optical axis" x "measuring range in the scanning direction". *5: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.3mW) *6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction. LSM-6200 display unit (optional) LSM-5200 display unit (optional)
15 Dimensions Optional accessories 02AGD130 Calibration gage set (ø1.0mm, ø30mm) 02AGD240 Air-screen covers 02AGD270 Workstage 02AGD400 Adjustable workstage ø3.1, depth 6 (Reference hole) (Reference hole) M4, depth 8 (x3) For mounting base Measuring region ø3.1 (.12") hole (Measuring position) 80 (3.15") 5.5 (.22") 18.5 (.73") 10.5 (.41") 15.5 (.61") 9.5 (.37") 9.5 (.37") 14.5 (.57") 9.5 (.37") 12 (.47") 110 (4.33") 90 (3.54") 20 (.79") 30 (1.18") 53 (2.09") 68 (2.68") 42 (1.65") 57.5 (2.26") 70 (2.76") min. Cable space Emission Unit Base Reception Unit M4, depth 8, ø3.3 through hole (x2) For mounting side plate (Same in the back) ø3.1, depth 6 M4, depth 8 (x3) For mounting base A: Bottom view (Main unit detached from base) Measuring position 50 (1.97") 22 (.87") 6 (.24") M3 (x8) 48 (1.89") 202 (7.95") 259 (10.2") 57 (2.24") 48 (1.89") 170 (6.69") 130 (5.12") 350 (13.78") max. 55 (2.17") 8 (.31") 8 (.31") 10 (.39") 50 (1.97") 80 (3.15") 355 (13.98") 95.5 (3.76") 65.5 (2.58") 250 (9.84") 84.5 (3.33") 46 (1.81") 105 (4.13") 54.5 (2.15") 42 (1.65") 150 (5.91") To Reception Unit (Cable length: 1.4m) M4, depth 8, ø3.3 through hole (x3) For mounting side plate (Same in the back) 90 (3.54") 57 (2.24") 41 (1.61") Relay cable Signal cable (Cable length: 5m) A 02AGD440 Center support* 02AGD450 Adjustable V-block* 957608 Air cleaner for air-screen covers 02AGC150A Extension relay cable 1m 02AGC150B Extension relay cable 3m 02AGC150C Extension relay cable 5m 02AGN780A Extension signal cable 5m 02AGN780B Extension signal cable 10m 02AGN780C Extension signal cable 15m 02AGN780D Extension signal cable 20m *Use with an adjustable workstage. Unit: mm (inch)
16 Gap Reference edge LSM-506S Wide Range Measuring Unit † General-purpose type with a measurement range of 1mm to 60mm. † Provides high accuracy with a linearity of ±3µm over the entire measurement range and ±(1.5+0.5∆D)µm in the narrow range. † Excellent repeatability of ±0.36µm Specifications Model LSM-506S Order No. 544-537 544-538 Acceptable standard of laser JIS IEC, FDA Measuring range 1 - 60mm (.04" - 2.36") Resolution (selectable) 0.00005 - 0.1mm (.000002" - .005") Repeatability*1 ±0.36µm (±14µinch) Linearity at 20°C*2 Entire range ±3µm (±120µinch) Narrow range ±(1.5+0.5∆D)µm Positional error*3 ±4µm (±160µinch) Measuring region*4 20 x 60mm (.8" x 2.36") Scanning rate 3200 scans/s Laser wavelength 650nm, Visible*5 Laser scanning speed 452m/s (17800”/s) Operating temperature 0°C - 40°C Operating humidity 35 - 85% RH (with no condensation) Water/Dust protection grade Conforming to IP64*6 Mass Emission unit: 1.4kg (3.08lbs.), Reception unit: 0.8kg (1.76lbs.), Base: 0.8kg (1.76lbs.), Signal cable: 0.5kg (1.1lbs.) LSM-6200 display unit (optional) LSM-5200 display unit (optional)
17 Optional accessories 02AGD140 Calibration gage set (ø1.0mm, ø60mm) 02AGD250 Air-screen covers 02AGD520 Adjustable workstage (Measuring position) 7 (.28") 90 (3.54") 90 (3.54") Emission Unit 9.5 (.37") 15.5 (.61") 10.5 (.41") 66 (2.6") 60 42 (1.65") 18.5 (.73") 58 (2.28") 70 (2.76") 20 (.79") 110 (4.33") 130 (5.12") 12 97 (3.82") 14.5 (.57") 9.5 (.37") 9.5 (.37") Measuring region Reception Unit ø3.1 hole M3 (x12) 7 (.28") 102 (4.02") 258 (10.16") 360 (14.17") 185 (7.28") 87 (3.43") Base 87 (3.43") 348 (13.7") 168.5 (6.63") M5, depth 10, ø4.2 through hole (x3) M5, depth 10, ø4.2 through hole (x2) For mounting side plate (Same in the back) For mounting side plate (Same in the back) 115.5 (4.55") 71 (2.8") 192 (7.56") 42 (1.65") 82 (3.23") 20 (.79") 540 (21.26") 273 (10.75") 700 (27.56") max. 163 (6.42") 110 (4.33") 100 (3.94") 50 (1.97") 22 (.87") Measuring position 162 (6.38") 174.5 (6.87") 121 (4.76") 63 (2.48") To Reception Unit (Cable length: 1.4m) M5, depth 10 (x3) For mounting base M5, depth 10 (x3) For mounting base ø3.1, depth 6 (Reference hole) ø3.1, depth 6 (Reference hole) A: Bottom view (Main unit detached from base) Cable space 70 (2.76") min. Relay cable 8 (.31") 8 (.31") Signal cable (Cable length: 5m) A 02AGD580 Center support* 02AGD590 Adjustable V-block* 02AGD250 Air-screen cover 957608 Air cleaner for air-screen covers 02AGC150A Extension relay cable 1m 02AGC150B Extension relay cable 3m 02AGC150C Extension relay cable 5m 02AGN780A Extension signal cable 5m 02AGN780B Extension signal cable 10m 02AGN780C Extension signal cable 15m 02AGN780D Extension signal cable 20m *Use with an adjustable workstage. Dimensions Unit: mm (inch)
18 Diameter LSM-512S Ultra-Wide Range Measuring Unit † General-purpose type with a wide measurement range of 1mm to 120mm. † Provides high accuracy with a linearity of ±6µm over the entire measurement range and ±(4.0+0.5∆D)µm in the narrow range. † Excellent repeatability of ±0.8µm Specifications Model LSM-512S Order No. 544-540 Acceptable standard of laser IEC, FDA Measuring range 1 - 120mm (.04" - 4.72") Resolution (selectable) 0.0001 - 0.1mm (.000005" - .005") Repeatability*1 ±0.8µm (±32µinch) Linearity at 20°C*2 Entire range ±6µm (±240µinch) Narrow range ±(4.0+0.5∆D)µm Positional error*3 ±8µm (±320µinch) Measuring region*4 30 x 120mm at ø1 - 120mm (1.2" x 4.72" at ø.04" - 4.72") Scanning rate 3200 scans/s Laser wavelength 650nm, Visible*5 Laser scanning speed 904m/s (35590"/s) Operating temperature 0°C - 40°C Operating humidity 35 - 85% RH (with no condensation) Water/Dust protection grade Conforming to IP64*6 Mass Emission unit: 3.0kg (6.6lbs.), Reception unit: 1.2kg (2.64lbs.), Base: 1.8kg (3.96lbs.), Signal cable: 0.5kg (1.1lbs.) *1: Determined by the value for ±2σ at the measurement of ø120mm workpiece with 0.32sec. interval (1024-time avarage). *2: At the center of the measuring region. *3: An error due to workpiece shift either in the optical axis direction or in the scanning direction. *4: The area given by "measuring range on the optical axis" x "measuring range in the scanning direction". *5: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.3mW) *6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction. LSM-6200 display unit (optional) LSM-5200 display unit (optional)
19 ø3.1 hole (Measuring position) 7 (.28") 30 (1.18") 9 (.35") For mounting side plate (Same in the back) 146 (5.75") 146 (5.75") 9 (.35") 80 (3.15") 68 (2.68") 18.5 (.73") 48 (1.89") 162 (6.38") 30 (1.18") 192 (7.56") 84 (3.31") 19 (.75") 8 (.31") 19 (.75") 8 (.31") 120 (4.72") M4 (x8) 200 (7.87") 100 (3.94") 150 (5.91") 312 (12.28") 400 (15.75") 88 (3.46") 150 (5.91") Signal cable (Cable length: 5m) 700 (27.56") 272 (10.71") 321 (12.64") 107 (4.21") 700 (27.56") max. 190 (7.48") 131 (5.16") 9 (.35") Measuring region Emission Unit 9 (.35") 70 (2.76") min. Cable space Relay cable 96 (3.78") 96 (3.78") Base 263 (10.35") 462 (18.19") M6, depth 12, ø5 through hole (x3) For mounting side plate (Same in the back) M6, depth 12, ø5 through hole (x3) 137 (5.39") 238 (9.37") 52 (2.05") Reception Unit 48 (1.89") To Reception Unit (Cable length: 1.4m) 192 (7.56") 256 (10.08") Measuring position M6, depth 12 (x3) For mounting base 144 (5.67") 85 (3.35") M6, depth 12 (x3) For mounting base ø3.1 hole, depth 6 (Reference hole) ø3.1 hole, depth 6 (Reference hole) A: Bottom view (Main unit detached from base) 8 (.31") 19 (.75") A 957608 Air cleaner for air-screen covers 02AGC150A Extension relay cable 1m 02AGC150B Extension relay cable 3m 02AGC150C Extension relay cable 5m 02AGN780A Extension signal cable 5m 02AGN780B Extension signal cable 10m 02AGN780C Extension signal cable 15m 02AGN780D Extension signal cable 20m Dimensions Unit: mm (inch) Optional accessories 02AGD150 Calibration gage set (ø20mm, ø120mm) 02AGD260 Air blow cover
20 LSM-516S Ultra-Wide Range Measuring Unit † General-purpose type with a wide measurement range of 1mm to 160mm. † Provides high accuracy with a linearity of ±7µm over the entire measurement range and ±(4.0+2.0∆D)µm in the narrow range. † Excellent repeatability of ±1.4µm Specifications Model LSM-516S Order No. 544-542 Acceptable standard of laser IEC, FDA Measuring range 1 - 160mm (.04" - 6.30") Resolution (selectable) 0.0001 - 0.1mm (.000005" - .005") Repeatability*1 ±1.4µm (±55µinch) Linearity at 20°C*2 Entire range ±7µm (±276µinch) Narrow range ±(4.0+2.0∆D)µm Positional error*3 ±8µm (±320µinch) Measuring region*4 40 x 160mm at ø1 - 160mm (1.57" x 6.30" at ø.04" - 6.30") Scanning rate 3200 scans/s Laser wavelength 650nm, Visible*5 Laser scanning speed 603m/s (23740"/s) Operating temperature 0°C - 40°C Operating humidity 35 - 85% RH (with no condensation) Water/Dust protection grade Conforming to IP64*6 Mass Emission unit: 3.0kg (6.6lbs.), Reception unit: 1.2kg (2.64lbs.), Base: 1.8kg (3.96lbs.), Signal cable: 0.5kg (1.1lbs.) *1: Determined by the value for ±2σ at the measurement of ø160mm workpiece with 0.32sec. interval (1024-time avarage). *2: At the center of the measuring region. *3: An error due to workpiece shift either in the optical axis direction or in the scanning direction. *4: The area given by "measuring range on the optical axis" x "measuring range in the scanning direction". *5: FDA Class II/IEC Class 2 semiconductor laser for scanning (Maximum power: 1.3mW) *6: The protection level provided for the interior. If the workpiece or glass of the measuring unit window is soiled by water or dust, the unit may malfunction. Diameter LSM-6200 display unit (optional) LSM-5200 display unit (optional)
21 3-M6, depth 12, ø5 through hole For mounting side plate (Same in the back) 3-M6, depth 12, ø5 through hole For mounting side plate (Same in the back) ø3.1 hole (Measuring position) 8-M4 9 9 37 8 170 110 600 350 250 9 200 100 120 100 74 20.5 880 320 Cable space 160 10 10 41 Measuring position 8 41 ø3 hole, depth 6 (Reference hole) M6, depth 12 (x3) For mounting base 8 400 8.7 200 Measuring region 200 8.7 224 25 249 206 87.5 360 520 306 107 100 40 200 400 13 136 88 218 M6, depth 12 (x3) For mounting base 160 208 208 70 min. A: Bottom view (Main unit detached from base) A 02AGC150A Extension relay cable 1m 02AGC150B Extension relay cable 3m 02AGC150C Extension relay cable 5m 02AGN780A Extension signal cable 5m 02AGN780B Extension signal cable 10m 02AGN780C Extension signal cable 15m 02AGN780D Extension signal cable 20m Dimensions Unit: mm (inch) Optional accessories 02AGD300 Calibration gage set (ø20mm, ø160mm)
22 LSM-9506 Bench-top Type with Display Unit † With a design that integrates the display section and measuring section into one unit, this instrument is best suited for making bench-top measurements in an inspection room. † A statistical calculation function is provided. † Standard RS-232C and SPC output interfaces are provided as standard. Specifications Model LSM-9506 Order No. (Order no. suffix denotes the AC power cord type equipped.) 220/230V AC 544-115D 544-116D 240V AC 544-115E 544-116E Type mm inch/mm Measuring range 0.5 - 60mm .02" - 2.36"/0.5 - 60mm Resolution (selectable) 0.00005 - 0.1mm .000002" - .005"/0.00005 - 0.1mm Repeatability*1 ±0.6µm (±24μinch) Linearity at 20°C*2 ±2.5µm (±100μinch) Positional error*3 In the optical axis direction: ±2.5µm (±100μinch) In the scanning direction: ±(2.0+L/10µm) (±(.00008+L/10000)") Measuring region*4 10 x 60mm (.4" x 2.36") Scanning rate 1600 scans/s Laser wavelength 650nm, Visible*5 Laser scanning speed 226m/s (8900"/s) Power supply 100 - 240V AC ±10%, 50/60Hz, 40VA Data output Via RS-232C interface, SPC (Digimatic) output port Functions (See page 30.) Operating temperature 0°C - 45°C Operating humidity 35 - 85% RH (with no condensation) Mass 13kg (28.6lbs.) 382 (15.04") 180 (7.09") 85 (3.35") 172 (6.77") 13.5 (.53") 150 (5.9") 10 (.39") 100 (3.94") 647 (25.47") 25 (.97") 40 (1.57") 52.5 (2.07") 365 (14.37") 100 (3.94") 100 (3.94") 82 (3.23") 50 (1.97") 22 (.87") 10 (.39") 11 (.43") 8 (.31") 120 (4.72") 11 (.43") 52 (2.05") 8 (.31") 98 (3.86") 180 (7.07") 80 (3.15") 213 (8.39") 60 (2.36") 202 (8.39") 11 (.43") 100 (3.94") 10 (.39") 60 (2.36") 83 (3.27") 97 (3.82") ø3.1 (Measurement position) Measuring region Cable space 12-M3 02AGD680 Adjustable Workstage 02AGD580 Center support* 02AGD590 Adjustable V-block* 936937 SPC output cable (1m) 937179T Footswitch *Use with an adjustable workstage. *1: Determined by the value for ±2σ at the measurement interval of 0.32 sec. *2: At the center of the measuring region. *3: An error due to workpiece shift either in the optical axis direction or in the scanning direction. L= Distance between the center of workpiece and the center of optical axis (in mm or inches). *4: The area given by "measuring range on the optical axis" x "measuring range in the scanning direction". *5: FDA Class II (544-115A, 544-116A)/IEC Class 2 (All models except 544-115A and 544-116A) semiconductor laser for scanning (Maximum power: 1.0mW) Dimensions Unit: mm (inch) Optional accessories 02AGD140 Calibration gage set (ø1.0mm, ø60mm)
23 Optional accessories Extension Relay Cables* • Used to extend the supplied relay cable if the emission unit and reception unit need to be placed further apart from one another. Extension Signal Cable Relay Cable (1.4m*) *0.6m for LSM-501S Extension Relay Cable Signal Cable (5m) Display Unit Emission Unit Reception Unit Note 1: The maximum length of the LSM-500S/501S signal cable is 20m, and that of the relay cable is 2m. The maximum length of the signal and relay cables of models other than those mentioned above should be 30m or less and 5m or less, respectively. Note 2: The total length of signal and relay cables should not be more than 32m. Extension Signal Cables • Used to extend the supplied signal cable if the measuring unit and display unit need to be placed further apart from one another. Extension relay cables Order No. Cable length 02AGC150A 1m 02AGC150B 3m 02AGC150C 5m Extension signal cables Order No. Cable length 02AGN780A 5m 02AGN780B 10m 02AGN780C 15m 02AGN780D 20m *Not available for LSM-902 Calibration Gage Sets • The calibration gage sets are made up of precision disks, cylinders or wires used for calibrating Laser Scan Micrometers. Each gauge that may be measured in alternate positions is marked at the position where the calibration measurement was made. Order No. Application Components 02AGD110 LSM-500S ø0.1mm gage (958200) ø2mm gage (958202) Gage stand (02AGD111) Set case (958203) 02AGD120 LSM-501S ø0.1mm gage (958200) ø10mm gage (229317) Gage stand (02AGD121) Set case (958203) 02AGD180 LSM-902 ø1mm gage (02AGD920) ø25mm gage (02AGD963) 02AGD130 LSM-503S ø1mm gage (02AGD920) ø30mm gage (02AGD961) Gage stand (02AGD131) Set case (02AGD980) 02AGD140 LSM-506S ø1mm gage (02AGD920) ø60mm gage (02AGD962) Gage stand (02AGD141) Set case (02AGD980) 02AGD150 LSM-512S ø20mm gage (229730) ø120mm gage (234072) Gage stand (02AGD151) Set case (02AGD990) 02AGM300 LSM-516S ø20mm gage (229730) ø160mm gage (02AGM303) Gage stand (02AGM320) Set case (02AGM310) 02AGD170 LSM-9506 ø1mm gage (02AGD920) ø60mm gage (02AGD962) Gage stand (02AGD171) Set case (02AGD970) Workstage •Aids shaft measurement by providing a V-block mounting and an up/down adjustment mechanism. Order No. Application 02AGD270 LSM-501S LSM-503S LSM-902 Wire Guiding Pulleys • This jig is for guiding thin filaments, such as fine magnet wire or optical fiber, so that a stable measurement of the outside diameter can be made. Order No. Application Maximum measuring dia. 02AGD200 LSM-500S 1.6mm (.063") 02AGD210 LSM-501S 2mm (.079") Note: Use the calibration gage set (02AGD110) for both types of wire guiding pulley. Air-Screen System •If using your LSMs in a smoky or dusty environment, an air-screen system consisting of two covers per unit and a central air cleaner/regulator can be used to help prevent the emission/reception windows from being soiled. Air cleaner/regulator: 957608 Air-screen covers Order No. Application 02AGD220 LSM-500S 6 pcs.* 02AGD230 LSM-501S 6 pcs.* 02AGD240 LSM-503S 3 pcs.* 02AGD250 LSM-506S 1 pc.* 02AGD260 LSM-512S 1 pc.* * No. of pcs. concurrently usable with one air cleaner/regulator.
24 Optional accessories for Laser Scan Micrometer Adjustable Workstages For LSM-902/6900 For LSM-501S 62 (2.44") From center of measuring range 22.5 (.88") From center of measuring range 35 (1.37) 27.5 (1.08") 50 (1.96") 127.8 (5.03") 58 (2.28") From center of measuring range 60 (2.36) Up/Down adjustment wheel LSM-902 Sliding table Horizontal clamp Overall travel 315 (12.40") (including horizontal adjustment 130 (5.11)) 180 (7.08") Vertical adjustment 47 (1.85") From center of measuring range 70 (2.75") Sliding table Horizontal clamp Base (x2pcs.) 50 (1.97") 26 (1.02") 140 (5.51") 55 (2.17") 230 (9.06") Emission Unit 34 (1.34") Up/Down adjustment wheel Reception Unit 40 (1.57") 150 (5.91") Base 40 (1.57") 32 (1.26") 6 (.24") 138.8 (5.46") 144.8 (5.7") 180 (7.09") 57.5 (2.26") 18.5 (1.2") Overall travel 315 (12.40") (including horizontal adjustment 130 (5.11)) Vertical adjustment Form center of measuring range From center of measuring range Specifications Order No. 02AGD280 Application LSM-902 Horizontal adjustment 130mm (5.12") Vertical adjustment 47mm (18.50") Maximum table loading 0.5kg (1.1lbs.) Mass 0.8kg (1.8lbs.) Standard accessories •V-block (02AGD420) x 2pcs. •Workpiece stop (02AGD430) Specifications Order No. 02AGD400 Application LSM-501S Horizontal adjustment 130mm (5.12") Vertical adjustment 32mm (1.26") Maximum table loading 0.5kg (1.1lbs.) Mass 1.0kg (2.2lbs.) Standard accessories •V-block (02AGD420) x 2pcs. •Workpiece stop (02AGD430) Unit: mm (inch) Unit: mm (inch) † Aids in measuring workpiece diameter by means of up/down and right/left slide adjustments. † Optimum for quality control of precision shafts, rollers, pin gages, etc.
25 For LSM-503S Standard Accessories V-blocks 20 (.78") 27 (1.06") 35 (1.38") Order No. 02AGD420 øD max. 30 (1.18")* ød max. 30 (1.18")* D - d max. 25 (.98")** H 25.5 (1") L1 27 (1.06") L2 20 (.79") Mass 0.03kg Calibration gages to be used • ø0.1mm • ø1mm • ø10mm • ø30mm *10 (.39") for LSM-501S **25 (.98") for LSM-902 ø10mm (.39") 6mm (.24") øD ød Workpiece having co-axial steps H L1 L2 Calibration gage mounting hole Unit: mm (inch) 460 (18.11") 90 (3.54") Sliding table Vertical clamp Up/Down adjustment wheel Horizontal clamp Emission Unit Reception Unit Overall travel 505 (19.88") (including horizontal adjustment 200 (7.87")) 26 (1.02")/50 (1.97")* 300 (11.81") 300 (11.81") *02AGD520 97.5 (3.84") 11 (43") 178 (7.01") 180 (7.09") 167 (6.57") From center of measuring range From center of measuring range Vertical adjustment Specifications Order No. 02AGD490 Application LSM-503S Horizontal adjustment 200mm (7.87") Vertical adjustment 35mm (1.38") Maximum table loading 2.0kg (4.4lbs.) Mass 4.9kg (10.78lbs.) Standard accessories •V-block (02AGD420) x 2pcs. •Workpiece stop (02AGD430) Unit: mm (inch) Order No. 02AGD430 Mass 0.05kg Workpiece stop
26 For LSM-506S For LSM-9506 640 (25.2") 100 (3.94") Sliding table Vertical clamp Horizontal clamp Emission Unit Reception Unit Overall travel 745 (29.33") (including horizontal adjustment 300 (11.81")) 26 (1.02")/50 (1.97")* 440 (17.32") 398 (15.67") *02AGD520 116 (4.57") 11 (43") 213 (8.39") 200 (7.87") 202 (7.95") From center of measuring range Vertical adjustment From center of measuring range Up/Down adjustment wheel Sliding table Vertical clamp Horizontal clamp LSM-9506 180 (7.09") *02AGD680 Overall travel 545 (21.46")/ 745 (29.33")* (Horizontal adjustment 200 (7.87")/ 300 (11.81")*) 340 (13.39")/440 (17.32")* 192 (7.56") 60 (2.36") 83 (3.27") 106 (4.17") 120 (4.72") Up/Down adjustment wheel From center of measuring range Vertical adjustment Specifications Order No. 02AGD520 Application LSM-506S Horizontal adjustment 300mm (11.81") Vertical adjustment 45mm (1.77") Maximum table loading 5.0kg (11lbs.) Mass 9.7kg (21.34lbs.) Standard accessories •V-block (02AGD550) x 2pcs. •V-block (02AGD560) •V-block (02AGD570) Specifications Order No. 02AGD370 02AGD680 Application LSM-9506 Horizontal adjustment 200mm (7.87") 300mm (11.81") Vertical adjustment 45mm (1.77") Maximum table loading 2.0kg (4.4lbs.) 5.0kg (11lbs.) Mass 3.8kg (8.4lbs.) 4.8kg (10.56lbs.) Standard accessories •V-block (02AGD550) x 2pcs. •V-block (02AGD560) •V-block (02AGD570) Unit: mm (inch) Unit: mm (inch) Optional accessories for Laser Scan Micrometer Adjustable Workstages † Aids in measuring workpiece diameter by means of up/down and right/left slide adjustments. † Optimum for quality control of precision shafts, rollers, pin gages, etc.
27 V-blocks Order No. 02AGD550 02AGD560 02AGD570 øD max. 60 (2.36") 60 (2.36") 60 (2.36") ød max. 60 (2.36") 30 (1.18") 30 (1.18") D - d max. 30 (1.18") 50 (1.97") 50 (1.97") H 39 (1.54") 45 (1.77") 45 (1.77") L1 50 (1.97") 50 (1.97") 50 (1.97") L2 30 (1.18") 30 (1.18") 30 (1.18") Mass 0.12kg 0.15kg 0.15kg Calibration gages to be used • ø10mm • ø30mm • ø10mm • ø30mm • ø60mm • ø1mm • ø10mm • ø30mm ø10mm (.39") 6mm (.24") øD ød Workpiece having co-axial steps H L1 L2 Calibration gage mounting hole L4 W L3 A (Horizontal stroke) W Sliding knob H1 H3 H2 L2 L1 Fixed support Adjustable support W Up/down wheel H L A (Vertical stroke) Center Supports • Optional accessories for adjustable workstages. Specifications Order No. 02AGD450 02AGD590 Application Adjustable workstage for LSM-501S (02AGD400), Adjustable workstage for LSM-902 (02AGD280), Adjustable workstage for LSM-503S (02AGD490) Adjustable workstage for LSM-506S (02AGD520), Adjustable workstage for LSM-9506 (02AGD680) Vertical adjustment (A) 20mm (.79") 35mm (1.38") Maximum workpiece diameter 30mm (1.18") 60mm (2.36") Mass 0.1kg 0.2kg Adjustable V-blocks • Optional accessories for adjustable workstages. Specifications Order No. 02AGD440 02AGD580 Application Adjustable workstage for LSM-501S (02AGD400), Adjustable workstage for LSM-902 (02AGD280), Adjustable workstage for LSM-503S (02AGD490) Adjustable workstage for LSM-506S (02AGD520), Adjustable workstage for LSM-9506 (02AGD680) Point angle 60° 60° Maximum workpiece length 110mm (4.33") on 02AGD400/02AGD280 230mm (9.06") on 02AGD490 315mm (12.4") on 02AGD520 on 02AGD680 Horizontal adjustment (A) 5mm (.2") or more 10mm (.39") or more Center point clamping force 1.1kgf 3.2kgf Mass 0.18kg (.4lbs.) 0.85kg (1.87lbs.) Order No. 02AGD440 02AGD580 L2 20 (.79") 40 (1.57") L3 66 (2.60") 106.5 (4.19") L4 32 (1.26") 55 (2.17") W 27 (1.06") 50 (1.97") Order No. 02AGD450 02AGD590 H 78.8 (3.1") 105.8 (4.17") L 36 (1.42") 40 (1.57") W 27 (1.06") 50 (1.97") Unit: mm (inch) Unit: mm (inch) Unit: mm (inch) Optional accessories Order No. 02AGD440 02AGD580 H1 45 (1.77") 65 (2.56") H2 40 (1.57") 60 (2.36") H3 30 (1.18") 45 (1.77") L1 25 (.98") 50 (1.97") Unit: mm (inch) Standard Accessories
28 Bottom view Dimensions of panel mounting slot (DIN 43 700-144x76) Panel thickness: 1.6mm t 6mm *t= Panel thickness Rear view Side view 197.1 (7.76") 20.5 (.81") Front view 72 (2.83") 4.4 (.17") *240.3+(t-0.6) [9.46"+(t-.024")] 140.4 (5.53") 144 (5.67") Support for mounting plate 68+0.7 0 138 (5.43 ) +1 0 +.039" 0 (2.68 ) +.028" 0 68 (2.68") 138 (5.43") LSM-5200 Compact (Panel-mount) Type Display Unit † Panel-mount type (with dimensions conforming to DIN standards) allows easy system integration. † Capable of calculating mean, maximum, minimum, and range (maximum - minimum). † Segment measurement (7 segments max.) or edge measurement (1 to 255 edges) can be selected. † USB2.0, RS-232C and I/O-Analog interfaces are provided as standard. † Arithmetical average or moving average can be selected. † GO/±NG judgment function. Specifications Model LSM-5200 Order No. 544-047 Display 9-digit LED (for measurement) & 8-digit LED (sub-display) Segment designation Seg.1 to Seg.7 (Seg.1 - Seg.3 for transparent objects) Edge designation 1 to 255 edges can be detected*1 Averaging times*2 Arithmetical average: per 1 to 2048, moving average: per 32 to 2048 GO/±NG judgment Nominal value ±tolerance setting, upper & lower limits setting Measurement mode Waiting, single measurement, continuous measurement Statistical calculation Available when connecting an external PC via the RS-232C or USB interfaces Power supply +24V DC ±10%, 1A Data output USB2.0, RS-232C and I/O-Analog interfaces Functions (See page 30.) Operating temperature 0°C - 45°C Operating humidity 35 - 85% RH (with no condensation) Mass 1.4kg (3.08lbs.) *1: With the LSM-500S the measuring range will be set to between 0.1 and 2mm if edge measurement is selected for 1 to 255 edges or if the automatic workpiece detecting function is on. *2: With the LSM-500S the number of scans will be limited to between 16 and 2048 for both arithmetical and moving averages if the ultra-fine wire measurement function is on. Power Supply 24V DC Dimensions Unit: mm (inch)
29 125 (4.92") 134 (5.28") 276.4 (10.88") 335 (13.19") Cable space 80 (3.15") 13 (.51") 121 (4.76") 8.2 (.32") 250 (9.84") Approx. 12º † With a dual-display design setup values can be continuously monitored. Also, two measurement value items can be displayed on the sub-display with the simultaneous measurement function. † Either segment measurement (7 segments max.) or edge measurement (1 to 255 edges) can be selected. † RS-232C and I/O-Analog interfaces are provided as standard. † A statistical calculation function and abnormal data eliminating function are provided. LSM-6200 Multi-function Type Display Unit Specifications Model LSM-6200 Order No. (Order no. suffix denotes the AC power cord type equipped.) 100/110V AC 544-071C 544-072C 120V AC 544-071A 544-072A 220/230V AC 544-071D 544-072D 240V AC 544-071E 544-072E 240V AC † 544-071F 544-072F Type mm inch/mm Display 16-digit fluorescent tube (for measurement) & 11-digit fluorescent tube (sub-display) Segment designation Seg.1 to Seg.7 (Seg.1 - Seg.3 for transparent objects) Edge designation 1 to 255 edges can be detected*1 Averaging times*2 Arithmetical average: per 1 to 2048, moving average: per 32 to 2048 GO/±NG judgment Nominal value ±tolerance setting, upper & lower limits setting, multi-limit setting Measurement mode Waiting, single measurement, continuous measurement Statistical calculation Maximum measurement (MAX), minimum measurement (MIN), mean, range (MAX-MIN), standard deviation (σ) Power supply 100 - 240V AC ±10%, 50/60Hz, 40VA Data output (as standard) Via RS-232C and I/O-Analog interfaces Functions (See page 30.) Operating temperature 0°C - 45°C Operating humidity 35 - 85% RH (with no condensation) Mass 5kg (11lbs.) † For Australia *1: With the LSM-500S the measuring range will be set to between 0.1 to 2mm if the edge measurement is selected for 1 to 255 edges or if the automatic workpiece detecting function is on. *2: With the LSM-500S the number of scans will be limited to between 16 and 2048 for both the arithmetical and moving averages if the ultra-fine wire measurement function is on. Power Supply 100V - 240V AC Dimensions Unit: mm (inch)
30 D SEG1 (Min.) SEG1+2 (Max.) D= [SEG1+2 (Max.)] - [SEG1 (Min.)] Reference bar Odd number flute tool Workpiece 1 Workpiece 2 Rotation Reference pin D X Y Movement due to Runout Seg.1 Seg.2 Seg.3 Seg.4 Seg.5 Seg.6 Seg.7 Seg.1 Seg.2 Seg.3 Seg.4 Seg.5 Seg.1 Seg.1 Seg.2 Seg.3 Seg.5 Seg.6 Seg.7 Seg.1 Seg.5 Seg.2 LSM-5200/6200/6900/9506 Functions Laser scanning direction Edge 1 Edge 2 Edge 3 Edge 4 Edge 5 Edge 6 Edge 7 Edge 253 Edge 254 Edge 256 Edge 255 Pin 1 Pin 2 Pin 3 Pin 126 Pin 127 Automatic Workpiece Detection This function automatically starts measurement when a workpiece advances into the specified measuring area. Preset/Offset Sets the currently displayed measurement value to zero or a specified numeric value. This is useful, for example, if a difference in the diameters of a reference gage and a workpiece is to be allowed for in calibration, or if a dimension of a workpiece that exceeds the measurement range of the LSM is to be measured. Mastering For continuous processing of high-precision workpieces, fine-adjusting the preset or offset value is called mastering. By specifying a mastering value the total correction will be (zero-set/offset value) + (±mastering value). If a positive mastering value is specified, the displayed value for a workpiece diameter measurement will be greater than the actual value: if a negative value is specified, the displayed value will be smaller than the actual value. Sample Measurement On a sample measurement the number of measurements will be defined (in the range of 2 to 999) in advance. From this sample measurement various calculation results (mean, maximum, minimum, and range) can be derived. These measurements can be used for runout measurements on a revolving workpiece and simplified cylindricity measurements. Automatic Measurement using Edges The edges created by scanning a workpiece can be used to program an LSM. A maximum of 127 workpiece features, and 127 of the spaces between these features, can be used which involves a total of 255 edges. This is most useful for measuring such things as IC chip leads or connector pins that are approximately equally spaced. This method cannot be applied to transparent objects. • Measurement of spacing of two parallel pins (pitch measurement) Pitch = ((Seg.2+Seg.4)/2)+Seg.3 • The outside diameter of a wire or cylindrical workpiece can be measured by using Seg.2. • The Runout of a revolving workpiece can be obtained by observing the variation in Seg.1 which is measured against a stationary reference pin. • The outside diameter of a large workpiece can be measured by using Seg.1 and Seg.5 in a dual-unit configuration. (only with LSM-6200). • If dimensions in both X and Y directions (min. distance of X/Y scanning section: 10mm) are measured through dual-unit measurement, use Seg.2 and Seg.6 (only with LSM-6200). Drill/Endmill (odd number flute) diameter measurement* The diameter of drills or endmills that have an odd number of flutes can be measured by using the max/min value function. Measurement using Segment Specification The following conventions are used to set up to the maximum of seven segments. However, if the transparent object measuring mode is set, no more than three segments can be set at one time. Arithmetical Average/Moving Average Arithmetical/moving average modes are provided to obtain the average of measurement values. On this type of LSM either of them can be specified before starting measurement. In the arithmetical average mode, the number of scans over which to take an averaging can be set at one of twelve steps between 1 (0.32ms) and 2048 (0.64sec). In the moving average mode the number of scans can be set at one of seven steps between 32 (0.01sec) and 2048 (0.64sec), and the measurement value will be updated every sixteen scans on and after the second measurement, irrespective of the specified number of scans for averaging. The latter mode is suitable for judging the trend in the diameter or width of an endless workpiece such as wire or tape from a measurement that requires a long period. Measuring Setup Memory The measuring setup can be registered as a program and saved (LSM-6200: 100 programs, LSM-6900: 10 programs, LSM-5200: 1 program). These programs can be recalled with a single operation. Multiple Calibration Data Memory Function This function allows storage of 10 types of calibration data. In this function mode, up to 10 sets of 10 programs are available in hand. • 10 programs (a piece of calibration data) X 10 sets * LSM-6200 can only support this function. *Only for LSM-6900
31 ø10h7+0 -0.015 ø6+0.1 -0 ø5h7+0 -0.012 ø12+0 -0.1 A B C D A B C D +NG OK5 OK4 OK3 OK2 OK1 -NG Limit 5 Limit 4 Limit 3 Limit 2 Limit 1 Limit 6 Restrictions Associated with Particular Combinations of Functions Combinations of Functions Edge specification Transparent object measurement Ultra-fine wire measurement* Automatic workpiece detection Abnormal data elimination Sample measurement Moving average Group judg- ment** Manual measurement Automatic measurement Edge specification Manual measurement — — — l l l l l Automatic measurement — — — l — — — — Transparent object measurement — — l l l l l l Ultra-fine wire measurement* — — l — l l l l Automatic workpiece detection l l l — l l — l Abnormal data elimination l — l l l l l l Sample measurement l — l l l l l l Moving average l — l l — l l — Group judgment** l — l l l l l — l: Permitted combination, —: Combination that is not permitted *Function that is not provided for LSM-9506 **Function that is not provided for LSM-5200 Abnormal Data Elimination If a piece of data significantly exceeds the tolerance limit because the workpiece or measuring unit is contaminated by a water droplet, oil droplet, or dust, the piece of data will be automatically removed by this function. Data Output Interval Setting By setting an interval (between 1 and 999 seconds) to continuous measurement in advance, data output will take place at each specified period of time. Statistical Calculation With this function, multiple measurements are taken from the same kind of workpiece, statistical values are calculated from the measurement results and quality evaluation is executed for each lot. • Example of measuring a stepped cylinder using the statistical calculation function. Measuring procedure: Measure the dimensions numbered A to D , perform tolerance judgment, and statistically process the resulting data for every ten samples defined as one lot. Data Output Every model has a standard RS-232C interface unit, allowing data to be output to an external PC or printer. The LSM-5200/6200 has the standard I/O-Analog output interface that allows the LSM to be connected to a sequencer, etc. The SPC (Digimatic Code) output interface is standard with the LSM-9506, allowing for easy construction of a quality control system. With the LSM-6200 there are additional means of data output, including SPC, BCD, and GP-IB output interfaces, which can be incorporated. Multi-Limit Judgment* In addition to +NG, GO, and -NG judgment criteria limit values from Limit 1 to Limit 6 can also be set. If an optional 2nd I/O-Analog interface unit (02AGC880) is used with the LSM-6200/6900/9506, seven-step judgment signals can be output to external devices to support GO/NG judgment. Simultaneous (Dual-program) Measurement* It is possible to measure two items simultaneously with one Laser Scan Micrometer unit, and to output the data. This function can be used to simultaneously measure the outside diameter and runout of a bar that is rotating, or to measure the outside diameters of two cylinders or wires at the same time. External trigger signal input* By supplying a contact signal to the footswitch connector at the rear panel of the LSM-6200/6900/9506, the measurement can be triggered. *Not available for LSM-5200 *Not available for LSM-5200 *Not available for LSM-5200
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