PRE1474(2) LINEAR GAGE SENSOR SYSTEMS LINEAR DISPLACEMENT SENSORS OFFER A ROBUST, ASSEMBLY LINE ENVIRONMENTAL CONTAMINATE RESISTANT DESIGN.
2 Suitable for in-line use Suitable for close-pitched applications Measurement principle The gage head processes internally detected signals and outputs square-wave signals as shown below. These operating signals, which are square waves having a phase difference of 90 degrees, are equivalent to RS-422A signals, allowing for the independent use of the gage head. However, certain models (LGD and LGS), do not output square-wave signals but generate Digimatic code (SPC) output in order to identify the measurement position. Output 1. Range of different models availible The gage heads described offer five measuring ranges (5, 10, 25, 50 and 100mm) and six resolution settings (0.01, 0.005, 0.001, 0.0005, 0.0001 and 0.00001mm) to enable the choice of gage to be closely matched to the application requirements. Various output modes are also available, including differential square-wave, Digimatic code (SPC) and sine wave. 2. Optimal for assembly line usage The gage heads offer superb durability and environmental resistance, making them ideal for in-line measurements. Durability is ensured by strong construction and linear ball bearings in the slider unit (except for models LGS and LGB), which are designed to last up to 10 million vertical spindle strokes (according to Mitutoyo’s internal tests). Moreover, excellent dust/water protection (IP66) is provided for effective use in severe in-line environments (model LGF and others). 3. Specialized high-density design The slender design of the standard gages enables installation in confined spaces or where the application demands close-pitched gaging. Slim-line models with outside diameters of 8mm are also available for measurements in spaces of 10mm or less. Gages come in two different cable arrangements — vertical and horizontal — to suit the type of fixture used. 4. Easy to mount All gages can be mounted by the plain section of the stem using the split-clamp method. Alternatively, some gages are threaded at the bottom and so can also be installed simply by drilling a hole of the appropriate size in a fixture and clamping the gage with a plain nut or by using a thrust stem (see page 33). Gages with a stem threaded at the top can be mounted using a thrust stem as an alternative to the split clamp. 5. A wide range of output formats The gauge head display units offer a wide range of output formats to best match the application requirements: I/O, BCD, RS-232C and Digimatic code (SPC) types are available. The EH/EV counter has an RS link function to be connected with multiple counters for multi-gage measurement (see page 36). Main scale Photo-diode Index scale Condenser lens LED The gage heads mainly use transmissiontype photoelectric linear encoders, as shown below. In this type, the light source (LED) and the detector element (photodiode) face each other with the main scale and index scale (20μm pitch) positioned between them. As the scale moves in relation to the detector, the intensity of light that passes through the window in the index scale will constantly vary. The gauge head maily uses transmission type photoelectirc linear encoders as shown below. At this time, two synchronized sine-wave signals having a relative 90-degree phase difference are output. These signals are then amplified and split electrically (with additional waveforms inserted) and output as 0.1µm, 0.5µm, 1µm or 5µm square-wave signals. Features 20µm 5µm Phase-A Phase-B Signal pitch Measuring pitch Phase-PA Phase-PB
3 Contents LG Long Stroke Type 22 LGM Motor-drive, Long Stroke Type 23 LGH High-resolution Type 24 Litematic Head and Litematic 25 Signal ID-C Absolute Type 26 - 27 Output Signal Specifications 28 - 30 Air Drive Unit 31 Gage Head Mounting Fixtures 32 - 33 Optional Accessories 34 - 36 LGS Absolute Type 18 LGD Absolute Type 19 LGB Extremely Compact ø9.5mm Stem Type 20 LGB Extremely Compact ø8mm Stem Type 21 Gage Heads LGK Slim Type 14 LGF Standard Type 15 LGF with Origin Point Mark 16 LGF 0.1µm Resolution Type 17 Display Units System Connection and Comparison of Counter Functions 37 SENSORPAK 38 EC Counter 39 EG Counter 40 - 41 EB Counter 42 - 45 EH Counter 46 - 50 D-EV Display Unit 50 EV Counter 51 - 56 Optional Accessories 57 Quick Guide to Precision Measurement 58 - 61 Traceability System to National Standards 4 - 5 Applications 6 - 9 Gage Head Overview 10 - 12 Display Unit Overview 13
4 Mitutoyo Utsunomiya Measurement Standards Calibration Center (JCSS Accredited Cal. Lab. No.0031) 633nm Iodine Stabilized He-Ne Laser〈Secondary Standard〉 National Metrology Institute of Japan / National Institute of Advanced Industrial Science and Technology (NMIJ/AIST) The atomic clock synchronized to UTC and the optical frequency comb Mitutoyo Miyazaki Plant (JCSS Accredited Cal.Lab. No.0030) 633nm Stabilized He-Ne Laser 〈Laboratory Reference Standard〉 Mitutoyo Utsunomiya Measurement Standards Calibration Center (JCSS Accredited Cal.Lab. No.0031) Standard Gauge Block 〈Laboratory Reference Standard〉 Step Gage Gauge Block Ring Gage Dial Gage Tester Standard Scale Optical Flat/Parallel Optical Measuring Machine Vision Measuring Machine Form Measuring Machine Measuring Tool Precision Sensors Scale unit Thermometer Laser Length Measuring Machine Working Standard Measuring Instrument Mitutoyo Hiroshima Calibration Center (JCSS Accredited Cal.Lab. No.0109) Standard Gauge Block / Micrometer Standard / Step Gage 〈Laboratory Reference Standard〉 Mitutoyo Utsunomiya Measurement Standards Calibration Center (JCSS Accredited Cal.Lab. No.0031) 633nm Stabilized He-Ne Laser NMIJ/AIST Reference flat NMIJ/AIST Temperature fixed points 〈National (Primary) Standard〉 JEMIC Temperature fixed point 〈National (Sub-Primary) Standard〉 JCSS Accredited Cal.Lab. Temperature fixed point/ Platinum resistance thermometer 〈Secondary Standard〉 Mitutoyo Utsunomiya Measurement Standards Calibration Center (JCSS Accredited Cal.Lab. No.0031) Temperature fixed point (Triple point of water) / Platinum resistance thermometer 〈Laboratory Reference Standard〉 Traceability of length field Mitutoyo Techno Service Business Division (JCSS Accredited Cal.Lab. No.0186) Standard Gauge Block / Step Gage 〈Laboratory Reference Standard〉 Coordinate Measuring Machine Mitutoyo Utsunomiya Measurement Standards Calibration Center (JCSS Accredited Cal.Lab. No.0031) Standard Gauge Block / Micrometer Standard / Step Gage Note: The chart above shows the simplied Mitutoyo traceability system. Detailed traceability charts are published for each product. Information as of February 2016. Interferometer used for calibrating linear scales (Metrology Calibration Center) Iodine Absorption Stabilized He-Ne Laser used for calibrating length standards (Metrology Calibration Center) Interferometer used for calibrating gauge blocks (Miyazaki Plant) Traceability System to National Standards Traceability System of Length Standard
5 National metrology institute Accreditation body APLAC <MRA> EA <MLA> Accredited calibration laboratory UKAS Mitutoyo UK No.0332 (Length and Hardness) UK TAF Mitutoyo Taiwan No.0336 (Length and Hardness) Taiwan NML R.O.C. Mitutoyo Canada No.2003-05 (Length and Hardness) Canada NRCINMS DAkks Mitutoyo Messgeräte No.D-K-15096-01-00 (Length) Germany PTB Mitutoyo Thailand No.0258 (Length) Mitutoyo Indonesia No.LK-183-IDN (Length and Hardness) Mitutoyo Vietnam No.VILAS 741 (Length) Mitutoyo Asia Pacific No.LA-1996-0102-C (Length and Hardness) Singapore Indonesia Thailand Vietnam A * STAR NIMT NIMT VMI NABL Mitutoyo South Asia No.C-0349 (Length and Hardness) India NPLI Mitutoyo Measurring Instruments (Shanghai) No.CNASL5506 (Length) China NIM SAS Mitutoyo Schweiz No.LAT N.107 (Length) Switzerland METAS ACCREDIA Mitutoyo Italiana No.107 (Length) Italy INRIM OAA Mitutoyo Algentina No.LC010 (Length) Argentina INTI A2LA Mitutoyo America Field Service No.1643.01 (Length and Hardness) Mitutoyo America No.0750.01 (Length and Temperature) USA NIST SAC TISI KAN BoA Mitutoyo Mlaysia No.SAMM152 (Length and Hardness) Malaysia NML-SIRIM NPL ILAC <MRA> SWEDAC Mitutoyo Scandinavia No.1794 (Length) SP Sweden Mitutoyo Miyazaki Plant No.0030 (Length) Mitutoyo Utsunomiya Measurement Standards Cal. Center No.0031 (Lengh and Temperature) Mitutoyo Kawasaki Cal. Center No.0086 (Force) Mitutoyo Techno Service Business Division No.0186 (Length) Mitutoyo Hiroshima Cal. Center No.0109 (Length and Hardness) IAJapan/NITE (JCSS) Japan NMIJ/ AIST EMA Mexico CENAM Mitutoyo Mexicana No.D-45 (Length) No. DZA-28 (Hardness) Mitutoyo Netherland No.K 086 (Length and Temperature) The Netherlands VSL RvA CGCRE INMETRO Brazil Mitutoyo Sul Americana No.0031 (Length and Hardness) • Japan AIST: National Institute of Advanced Industrial Science and Technology NMIJ: National Metrology Institute of Japan IAJapan: International Accreditation Japan NITE: National Institute of Technology and Evaluation JCSS: Japan Calibration Service System • Singapore A*STAR: Agency for Science, Technology and Research SAC: Singapore Accreditation Council • Thailand NIMT: National Institute of Metrology (Thailand) TISI: Thai Industrial Standard Institute • Indonesia NMI: Puslit Metrologi-LPI KAN: Komite Akreditasi Nasional • Vietnam VMI: Vietnam Metrology Institute NABL: BUREAU OF ACCREDITATION • Malaysia NML-SIRIM: National Metrology Laboratory-Standards and Industrial Research Institute of Malaysia STANDARDS: Department of Standards Malaysia • Taiwan NML R.O.C.: National Measurement Laboratory R.O.C. TAF: Taiwan Accreditation Foundation • India NPLI: National Physical Laboratory of India NABL: National Accreditation Board for Testing and Calibration Laboratories • China NIM: National Institute of Metrology CNCA: Certification and Accreditation Administration of the people’s Republic of China CNAS: China National Accreditation Service for Conformity Assesment • USA NIST: National Institute of Standards and Technology A2LA: American Association for Laboratory Accreditation • Canada NRC-INMS: National Research Council Canada -Institute for National Measurement Standards CLAS/SCC: Calibration Laboratory Assessment Service / Standards Council of Canada • Mexico CENAM: Centro Nacional de Metrología EMA: Entidad Mexicana de Acreditación, a.c. • UK NPL: National Physical Laboratory UKAS: United Kingdom Accreditation Service • The Netherland VSL: Van Swinden Laboratorium RvA: Raad voor Accreditatie • Germany PTB: Physikalisch-Technische Bundesanstalt DAkkS: Deutsche Akkreditierungsstelle GmbH • Switzerland METAS: Federal Institute of Metrology SAS: Swiss Accreditation Service • Italy INRIM: Istituto Nazionale di Ricerca Metrologica ACCREDIA: L’ENTE ITALIANO DI ACCREDITAMENTO • Sweden SP: SP Technical Research Institute of Sweden OSWEDAC: Swedish Board for Accreditation and Conformity Assessment • Brazil INMETRO: Instituto Nacional de Metrologia Qualidade e Tecnologia CGCRE: Coordenação Geral de Acreditação do INMETRO • Algentina INTI: Instituto Nacional de Tecnologia Industrial OAA: Organismo Argentino de Acreditación ILAC: International Laboratory Accreditation Cooperation APLAC: Asia-Pacific Laboratory Accreditation Cooperation MRA: Mutual Recognition Arrangement EA: Europian co-operation for Accreditation MLA: Multilateral Agreement STANDARDS MALAYSIA CNCA CNAS CLAS/ SCC Note: The above are domestic and international locations where Mitutoyo provides ISO/IEC 17025 accredited calibration services. (As of 18th December, 2015) Name of each National metrology institutes and Accreditation bodies are based on our survey. Calibration laboratories worldwide Mitutoyo has built a global network for the comprehensive support of precision product measuring calibration. To power this global network, Mitutoyo ISO/IEC 17025 (international standard) certified laboratories from global accredited organisations operate in Japan and worldwide. Mitutoyo Group Accredited Calibration Laboratories
6 Applications Multipoint measurement of automobile doors Gage heads (LGS with EV counter) can be used to perform multi-point measurements for automobile doors and evaluate errors against the specified tolerances. When there are many points to measure, the use of the LGS gage provides higher cost-effectiveness. Measurement of hydraulic coupling dimensions Gage heads (LGF with EH counter) can be used to measure the outside diameters and thicknesses of hydraulic couplings used in mechanical diggers. The EH counter allows for the calculation of sums and differences between two gages. Measuring outside diameter and thickness Measurement of camshaft displacement Gage heads (LGF with EH counter) can be used to measure camshaft lift. The EH counter is easily installed in the equipment panel. Measuring displacement When strong sideways force would otherwise be exerted on the gage, as in this application, take measurements indirectly using a fixture in order to avoid subjecting the gage to excessive loads or wear. Multipoint measurement of wheel hubs Gage heads (LGF with EH counter) can be used to inspect a wheel hub for compliance with runout limits. Measurement of aircraft fuselage distortion Gage heads (LGD with EV counter) can be used to help measure changes in stress generated in an aircraft fuselage. For the very large workpiece, the use of an absolute type gage head is recommended, since the master settings then need to be done just once. Multipoint measurement of turbine blades Gage heads (LGF with EV counter) can be used to perform multi-point measurements of gas turbine blades. Built-in sensor for inside diameter measurement tools A gage head (LGF with EH counter) can be used to measure inside diameters. Inspecting rivets A gage head (LGD with EG counter) can be used to inspect the condition of fixing of a rivet or bolt. Inspection of parts press-fitted is also done in the same way.
7 Built-in sensor for machine tools A gage head (LGM with EH counter) can be used to measure a workpiece which has been machined on a surface grinder. Roller to hold workpiece Roller to support workpiece Measurement of pipe wall thickness/outside diameter A gage head (LGF with EH counter) can be used to measure the wall thickness or outside diameter of a pipe. Pipe wall thickness measurement Outside diameter measurement Measurement of crimped height A gage head (LGF with EB counter) can be used to measure the crimped height of a crimp contact, etc. Measurement of bridge-support joint Gage heads (LGD with EG counter) can be used to measure the displacement of a bridge-support joint. Since this measurement is performed intermittently over a long period of time, use an absolute-type gage head that requires power only during measurement. Measurement of sash rail warp Gage heads (LGF with EV counter) can be used to measure the warp of sash rails. Measurement of elevator drive-rail deflection A gage head (LGF with EB counter) can be used to measure deflection in the drive rail of an elevator. Measured data can be output from the EB counter to a personal computer in order to plot the displacement. Normally strong force from the side would be exerted on the gauge (as shown). Therefore, take measurements using a fixture to avoid subjecting the gage to excessive loads. Deflection data tolerance judgement Plotted deflection data Intake manifold flatness measurement Flatness measurement of intake manifold can be performed by Linear Gage LGK-110 and EV Counter EV-16P. By connecting to the PC, Mitutoyo software SENORPAK can be used via RS-232C. Multipoint measurement on parabolic antenna Gage heads (LGB with EV counter) can be used to perform multi-point measurements on a parabolic antenna surface. Measuring displacement
8 Screen mask multipoint measurement Multi-point measurement of semiconductor related parts is performed with Linear Gage LGF-110L-B and EV counter EV-16P. By connecting to the PC, Mitutoyo software SENORPAK can be used via RS-232C. Height and thickness measurement model Indirect measurement is recommended for the workpiece, which is better not to contact with the Linear Gage (e.g. workpiece which rotates or slides, difficult to measure with a standard contact point). Parallelism measurement of copying machine parts Gage heads (LGD with EV counter) can be used to measure the parallelism of copying machine parts. Run-out measurement of motor shaft Gage heads (LGF with EH counter) can be used to measure the radial and axial run-out of motor shafts. The EH counter can display both measurements simultaneously. When strong sideways force would otherwise be exerted on the gage, as in this application, take measurements indirectly using a fixture in order to avoid subjecting the gage to excessive loads or wear. Mobile terminal chassis multipoint measurement Multiple point measurement of mobile terminal parts is performed with Linear Gage LGF-0510L-B and EV counter EV-16P. Waterworks parts multipoint measurement Displacement of water related parts measurement is performed with Linear Gage LGS-1012P and EV counter EV-16D. By connecting to the PC, Mitutoyo software SENORPAK can be used via RS-232C. Multipoint measurement on copying machine chassis Gage heads (LGS with EV counter) can be used to perform multi-point measurement on a copying machine chassis. In the case of large workpieces an absolute type that eliminates the necessity of setting a master workpiece will be useful. Sorting of parts A gage head (LGF with EB counter) can be used to sort parts by size. The EB counter can divide the dimension into seven steps and output the signal for sorting. Applications Air cylinder for lift Sliding table Contact point Air cylinder for lift Sliding table Contact point
9 Multipoint measurement of LCD panel Gage heads (LGF with EH counter) can be used to measure distortion of LCD panels. Height measurement of cell A gage head (LGF with EH counter) can be used to measure the height of built-in dry cells. Deformation measurement of bathtub Gage heads (LGD with EV counter) can be used to measure the deformation of bathtubs. An origin setting when first mounting the gage head can eliminate the need for subsequent resetting with a standard. Built-in sensor for tablet forming machine A gage head (LGF with EH counter) can be used to measure the stroke of a tablet forming machine. X-Y stage positioning Gage heads (LGF with EH counter) can be used to position a precision stage. Built-in sensor for material testing machines A gage head (LG with EH counter) can be used to measure the extension of a specimen during a tensile test. Extension measurement Incorporation into auto-measurement machine Gage heads (LGF with EH counter) can be incorporated into the automeasurement unit for outside diameter and/or height measurement. Incorporation into vision measuring machine / microscope A gage head (LGF with EH counter) can be incorporated into a measuring machine for height measurement.
10 Gage Head Overview Laser Hologage LGH series • 0.01µm resolution • Sine wave output • ø15mm plain stem • 0.1µm resolution • Square wave out put • ø9.5mm stem • 1µm resolution • Square wave output • ø9.5 / ø8mm stem • 1µm resolution • Square wave output • ø9.5 / ø8mm stem • 0.1 / 0.5 / 1µm resolution • Square wave output • ø8mm stem • 0.01µm resolution • ø15mm plain stem High accuracy, low measuring force and sine wave output models available With pneumatic cylinder ø8mm stem 0.1µm / 4µinch 0.5µm / .00002” 1µm / .00004” ø9.5mm stem With stem clamp nut Range: 5mm / .2” Range: 5mm / .2” Range: 10mm / .4” Range: 10mm / .4” Range: 10mm / .4” Range: 10mm / .4” LGB series LGB series LGB series LGK series A low measuring force model is available Compatible display unit Compatible display unit Compatible display unit Compatible display unit Compatible display unit Compatible display unit Compatible display unit Compatible display unit LG series LGM series Range: 100mm / 4” Range: 100mm / 4” • 0.1 / 1µm resolution • Square wave output • ø20mm stem • 0.1 / 1µm resolution • Square wave output • ø20mm stem • Motor-drive operation Motor-drive unit ø8mm stem ø8mm stem ø9.5mm stem ø9.5mm stem With stem clamp nut With stem clamp nut EG-101P EG-101P EG-101P EG-101P EG-101P EG-101P EH-102S Exclusive Counter EB-11P EB-11P EB-11P EB-11P EB-11P EB-11P EH-101P EH-101P EH-101P EH-101P EH-101P EH-101P EH-102P EH-102P EH-102P EH-102P EH-102P EH-102P EV-16P EV-16P EV-16P EV-16P EV-16P EV-16P Page 24 Page 24 Page 20 Page 21 Page 20 Page 14 Page 14 Page 14 Page 20 Page 21 Page 20 Page 21 Page 22 Page 23
11 • 0.1µm resolution • Square wave output • ø8mm / ø15mm stem ø8mm stem ø15mm stem Range: 10mm / .4” Range: 25mm / 1” LGF series Compatible display unit Compatible display unit Compatible display unit Compatible display unit • 0.5 / 1µm resolution • Square wave output • ø8mm / ø15mm stem • 0.5 / 1µm resolution • Square wave output • ø8mm / ø15mm stem • With origin point mark ø8mm stem ø15mm stem ø15mm stem ø15mm stem 0.5µm / .00002” 0.5µm / .00002” 0.5µm / .00002” 1µm / .00004” 1µm / .00004” 1µm / .00004” 1µm / .00004” 1µm / .00004” LGF series LGF series Range: 10mm / .4” Range: 25mm / 1” Range: 50mm / 2” Range: 10mm / .4” Range: 25mm / 1” Range: 50mm / 2” • 5µm resolution • Square wave output • ø15mm stem LGF series Range: 25mm / 1” Range: 50mm / 2” ø15mm stem ø8mm stem 0.5µm / .00002” 1µm / .00004” 0.5µm / .00002” 0.5µm / .00002” EG-101P EG-101P EG-101Z EG-101P EB-11P EB-11P EB-11Z EB-11P EH-101P EH-101P EH-102Z EH-101P EH-102P EH-102P EV-16Z EH-102P EV-16P EV-16P EV-16P Page 15 Page 16 Page 16 Page 17 Page 17 Page 15 Page 15 Page 15 Page 15 Page 16
12 • 0.01mm resolution • Digimatic output • Absolute linear encoder • ø8mm / ø15mm stem ø8mm stem ø15mm stem ø15mm stem Range: 10mm / .4” Range: 25mm / 1” Range: 50mm / 2” LGD series • 0.01mm resolution • Digimatic output • Absolute linear encoder • ø8mm stem • 0.001mm resolution • Digimatic output • Absolute linear encoder • ø8mm stem Range: 12.7mm / .5” Range: 12.7mm / .5” LGS series Signal ID-C Gage Head Overview Compatible display unit Compatible display unit Compatible display unit EC-101D EC-101D EC-101D EG-101D EG-101D EG-101D EB-11D EB-11D EB-11D EH-102D EH-102D EH-102D EV-16D EV-16D EV-16D Page 19 Page 18 Page 26 Page 19 Page 19 System Connections 3/5-stage limit, 7ch limit, Serial BCD, Simple analog 3/5-stage limit, 7ch limit, Serial BCD, Simple analog 3/5-stage limit, 7ch limit, Serial BCD, Simple analog 3/5-stage Limit, BCD Output Function 3/5-stage limit, BCD 3/5-stage limit, Digimatic 3/5-stage limit, BCD Programmable Controller 3/5-stage limit, RS-232C, Simple BCD, Simple analog 3/5-stage limit, RS-232C, Simple BCD, Simple analog 3/5-stage limit, RS-232C, Simple BCD, Simple analog 3/5-stage limit, RS-232C, Simple BCD, Simple analog 3/5-stage limit, Segment, Parallel BCD, RS-232C 3/5-stage limit, Segment, Parallel BCD, RS-232C 3/5-stage limit, Segment, Parallel BCD, RS-232C Personal computer Digimatic Mini-processor DP1-VR EG-101P EB-11P EH-101P EH-102P EV-16P EG-101Z EB-11Z EH-102Z EV-16Z EG-101D EB-11D EH-102D EV-16D EH-102S 0.5 / 1 / 5µm gage head LGK LGF LGB LG LGM 0.1µm gage head LGK LGF LGB LG LGM Gage head with Origin Point Mark LGF Absolute type gage head LGS LGD 0.01µm gage head Laser Hologage EC-101D
13 Display Unit Overview Single function type Single function type Multi-function type Multi-function type for multi-gage system Multi-function type EC-101D For square wave output gage heads For square wave output gage heads For square wave output gage heads For square wave output gage heads (1-axis / 2-axis) For square wave output gage heads with origin point mark For square wave output gage heads with origin point mark For square wave output gage heads with origin point mark For square wave output gage heads with origin point mark For Sine wave output gage heads For Digimatic output gage heads For Digimatic output gage heads For Digimatic output gage heads For Digimatic output gage heads For Digimatic output gage heads EC counter EG counter EB counter EV counter EH counter EG-101P EB-11P EV-16P EH-101P EH-102P EG-101Z EB-11Z EV-16Z EH-102Z EH-102S EG-101D EB-11D EV-16D EH-102D Page 39 Page 40 Page 42 Page 46 Page 51
14 Gage Heads Attachment thread for thrust stem M9.5X0.5 10.6 or longer (stroke) ø8-0.009 0 14 6.5 73.1 ø12 125.5 Attachment thread for thrust stem M9.5X0.5 10.6 or longer (stroke) ø8-0.009 0 14 6.5 73.1 ø12 125.5 Attachment thread for thrust stem M9.5X0.5 10.6 or longer (stroke) ø8-0.009 0 14 6.5 73.1 ø12 125.5 82.7 30 20.4 Connecting cable RM12BPE-6PH (HIROSE) FEATURES Dimensions Unit: mm Connector 542-158: 0.1µm resolution model 542-157: 0.5µm resolution model 542-156: 1µm resolution model LGK Slim Type 10mm range, 0.1 / 0.5 / 1µm resolution, Differential square-wave output • A slim-body model which has succeeded the proven LGF series in terms of vibration- and impactresistance. The sectional area is only a 1/5 compared to that of the LGF-110L model. • Provides a resolution of 0.1 / 0.5 / 1μm, whichever is selectable. Unit: mm Connecting cable: 2m Connecting cable: 2m Connecting cable: 2m SPECIFICATIONS Order No. 542-158 542-157 542-156 Measuring range 10mm (.4”) Resolution 0.1μm 0.5μm 1μm Measuring accuracy (20°C) (0.8+L/50) μm (L=mm) (1.5+L/50) μm (L=mm) Quantizing error ±1 count Measuring force Contact point upwards 0.7N or less Contact point horizontal 0.75N or less Contact point downwards 0.8N or less Position detection method Photoelectric linear encode*3 Response speed*1 400mm/s 1500mm/s Output signal 90° phase difference, differential square wave (RS-422A equivalent), minimum edge intervals: 200ns for 0.1μm model, 200ns for 0.5μm model, 500ns for 1μm model Output signal pitch 0.4μm 2μm 4μm Mass Approx. 175g Dust/water resistance*2 Equivalent to IP66 (only gage head) Contact point ø3mm carbide-tipped (fixing screw: M2.5 (P=0.45)×5), standard contact point No.901312 Stem dia. ø8mm Bearing type Linear ball bearing*4 Output cable length 2m (directly from casing) Connector Plug: RM12BPE-6PH (HIROSE), Compatible receptacle: RM12BRD-6S (HIROSE) Operating temperature (humidity) range 0 to 40°C (RH 20 to 80%, no condensation) Storage temperature (humidity) range –10 to 60°C (RH 20 to 80%, no condensation) Standard Accessories Wrench for contact point: No.538610 Remarks Gold banded Blue banded Green banded *1: When the spindle speed exceeds 1500mm/s (400mm/s for 0.1μm model), an alarm signal will be output. Also, if using Mitutoyo counter, an error message will be displayed. If using counters made by other companies, please inquire separately for the alarm signals. For the models of 0.1μm resolution, note that over-speed error may occur depending on the impact amount when releasing the contact point freely. *2: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and water. This may not be applicable depending on the kind of liquid. *3: Patent registered (Japan, U.S.A., Germany, U.K.) *4: Patent registered (Japan) Optional Accessories • Air lifter 10: No.02ADE230 * Required air pressure: 0.2 to 0.4MPa * Spindle extends when air is supplied • Rubber boot: No.238772 (spare) Thrust stem set: No.02ADB680 Thrust stem: No.02ADB681 Clamp nut: No.02ADB682 Spanner Wrench: No.02ADB683 * A thrust stem set is a combination of thrust stem and a clamp nut. A special spanner is required for tightening. If using multiple gages, a thrust stem set for each gage and one special spanner are required.
15 M9.5×0.5 M9.5×0.5 02ADB682 02ADB681 (screw top height) Dimensions with a thrust stem installed 12 （13.8） ø 9.5-0.015 0 4 14.5 9.5 6 17.3 ø 8 12.3 34 6.9 （129.5） 15.4 61.5 46.9 ø18 41 14.8 0.6 75.7 14 5 45.9 Thrust stem Attachment thread for thrust stem 10.6 or longer (stroke) Connecting cable 2m Clamp nut -0.009 0 18.5 6.5 Connecting cable 2m (screw top height) M14×0.5 Dimensions with a thrust stem installed M18×1 Thrust stem Clamp nut 02ADN371 02ADB692 21 （24.2） ø18-0.018 0 5 9 ø18 41 20.6 30.7 61.7 ø15-0.015 0 13.8 （208.3） 34 8.6 93.6 114.7 22 20 0.6 4.5 84.1 Attachment thread for thrust stem 26 or longer (stroke) 18.5 M18×1 Thrust stem Clamp nut 02ADN371 02ADB692 (screw top height) M14×0.5 142 34 13.8 （316） 0.6 ø15-0.015 0 61.7 20.6 56.1 8.6 41 ø18 9 5 ø18-0.018 0 （24.2） 21 4.5 124.9 174 6 29.6 20 Connecting cable 2m 51.5 or longer (stroke) Attachment thread for thrust stem Dimensions with a thrust stem installed ø18 41 ø11.8 FEATURES Dimensions Unit: mm Unit: mm Connector LGF Standard Type 10 / 25 / 50mm range, 0.5 / 1 / 5µm resolution, Differential square-wave output • Excellent protection against dust ingress and water splash (IP66) in harsh shop-floor environments. • Uses linear stroke ball bearings on the spindle movement for resistance to external shock and vibration. • Thrust Stem with a clamp nut is optional. 542-171: 0.5µm resolution, 10mm range model 542-161: 1µm resolution, 10mm range model 542-172: 0.5µm resolution, 25mm range model 542-162: 1µm resolution, 25mm range model 542-612: 5µm resolution, 25mm range model 542-173: 0.5µm resolution, 50mm range model 542-163: 1µm resolution, 50mm range model 542-613: 5µm resolution, 50mm range model SPECIFICATIONS Order No. 542-171 542-161 542-172 542-162 542-612 542-173 542-163 542-613 Measuring range 10mm (.4”) 25mm (1”) 50mm (2”) Resolution 0.5μm 1μm 0.5μm 1μm 5μm 0.5μm 1μm 5μm Measuring accuracy (20°C) L=arbitrary measuring length (mm) (1.5+L/50) μm (7.5+L/50) μm (1.5+L/50) μm (7.5+L/50) μm Quantizing error ±1 count Measuring force Contact point upwards 1.0N or less 4.0N or less 4.9N or less Contact point horizontal 1.1N or less 4.3N or less 5.3N or less Contact point downwards 1.2N or less 4.6N or less 5.7N or less Position detection method Photoelectric linear encoder*3 Response speed*1 1500mm/s Output 90° phase difference, differential square wave (RS-422A equivalent), minimum edge intervals: 1000ns for 5μm model, 500ns for 1μm model, 250ns for 0.5μm model Output square wave pitch 2μm 4μm 2μm 4μm 20μm 2μm 4μm 20μm Mass Approx. 260g Approx. 300g Approx. 400g Dust/water resistance Equivalent to IP66 (only gage head) Contact point ø3mm carbide-tipped (fixing screw: M2.5 (P=0.45)×5), standard contact point No.901312 Stem dia. ø8mm ø15mm Bearing type Linear ball bearing*4 Output cable length 2m (directly from casing) Connector Plug: RM12BPE-6PH (HIROSE), Compatible receptacle: RM12BRD-6S (HIROSE) Operating temperature (humidity) range 0 to 40°C (RH 20 to 80%, no condensation) Storage temperature (humidity) range –10 to 60°C (RH 20 to 80%, no condensation) Standard Accessories Wrench for contact point: No.538610 Wrench for contact point: No.210187 *1: When the spindle speed exceeds 1500mm/s (400mm/s for 0.1μm model), an alarm signal will be output. Also, if using Mitutoyo counter, an error message will be displayed. If using counters made by other companies, please inquire separately for the alarm signals. For the models of 0.1μm resolution, note that over-speed error may occur depending on the impact amount when releasing the contact point freely. *2: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and water. This may not be applicable depending on the kind of liquid. *3: Patent registered (Japan, U.S.A., Germany, U.K.) *4: Patent registered (Japan) Optional Accessories • Air drive unit For 10mm range models: No.02ADE230 For 25mm range models: No.02ADE250 For 50mm range models: No.02ADE270 * Required air pressure: 0.2 to 0.4MPa * Spindle extends when air is supplied. • Rubber boot (spare) For 10mm range models: No.238772 For 25mm range models: No.962504 For 50mm range models: No.962505 • Thrust stem set For 10mm range models: No.02ADB680 Thrust stem: No.02ADB681 Clamp nut: No.02ADB682 For 25/50mm range models: No.02ADN370 Thrust stem: No.02ADN371 Clamp nut: No.02ADB692 * External dimensions are described in the dimensional drawing of the product. * A thrust stem set is a combination of thrust stem and a clamp nut. A special spanner is required for tightening. If using multiple gages, a thrust stem set for each gage and one special spanner are required. • Spanner Wrench For 10mm range models: No.02ADB683 For 25/50mm range models: No.02ADB693
16 Gage Heads ø16.7 34.0 Sleeve ø16.7 ø6.2 34.0 6 (screw top height) Dimensions with a thrust stem installed M9.5×0.5 M9.5×0.5 Clamp nut 02ADB682 Thrust stem 02ADB681 17.3 ø8-0.009 0 12.3 34 （129.5） 61.5 46.9 15.4 ø16.7 34 12 （13.8） ø9.5-0.015 0 4 9.5 14.5 0.6 14.8 75.7 14 6.9 5 45.9 Connecting cable 2m Attachment thread for thrust stem 10.6 or longer (stroke) Attachment thread for thrust stem M14×0.5 (screw top height) Connecting cable 2m 02ADB692 02ADN371 Clamp nut Thrust stem M18×1 Dimensions with a thrust stem installed 9 18.5 5 ø18-0.018 0 （24.2） 21 34 ø16.7 93.6 8.6 34 （208.3） 13.8 ø15-0.015 0 61.7 30.7 20.6 4.5 84.1 0.6 20 114.7 6.5 22 26 or longer (stroke) Dimensions with a thrust stem installed (screw top height) M14×0.5 Attachment thread for thrust stem M18×1 Thrust stem Clamp nut 02ADN371 02ADB692 9 18.5 5 ø18-0.018 0 （24.2） 21 34 ø16.7 142 34 13.8 （316） 0.6 ø15-0.015 0 61.7 20.6 56.1 8.6 4.5 124.9 174 6 29.6 20 51.5 or longer (stroke) Connecting cable 2m FEATURES Unit: mm Connector Dimensions Unit: mm LGF with Origin Point Mark 10 / 25 / 50mm range, 0.5 / 1µm resolution, Differential square-wave output • The origin point signal output function enbles the easy resetting of the measuring system when the gage is incorporated with a machine tool. This function boosts productivity by drastically reducing reset time because the original position can be easily recovered when loss due to over-speed occurs. 542-174: 0.5µm resolution, 10mm range model 542-164: 1µm resolution, 10mm range model 542-175: 0.5µm resolution, 25mm range model 542-165: 1µm resolution, 25mm range model 542-176: 0.5µm resolution, 50mm range model 542-166: 1µm resolution, 50mm range model SPECIFICATIONS Order No. 542-174 542-164 542-175 542-165 542-176 542-166 Measuring range 10mm (.4”) 25mm (1”) 50mm (2”) Resolution 0.5μm 1μm 0.5μm 1μm 0.5μm 1μm Measuring accuracy (20°C) (1.5+L/50)μm (L=arbitrary measuring length (mm)) Quantizing error ±1 count Measuring force Contact point upwards 1.0N or less 4.0N or less 4.9N or less Contact point horizontal 1.1N or less 4.3N or less 5.3N or less Contact point downwards 1.2N or less 4.6N or less 5.7N or less Position detection method Photoelectric linear encoder*3 Reference mark position 3mm from contact point tip (lowest rest point) 5mm from contact point tip (lowest rest point) Reference mark repeatability (20°C): ≤0.5μm (at a constant reference point passing speed less than 300mm/s in the same direction) Response speed*1 1500mm/s Output signal 90° phase difference, differential square wave (RS-422A equivalent), minimum edge intervals: 250ns for 0.5μm model, 500ns for 1μm model Output square wave pitch 2μm 4μm 2μm 4μm 2μm 4μm Mass Approx. 260g Approx. 300g Approx. 400g Dust/water resistance*2 Equivalent to IP66 (only gage head) Contact point ø3mm carbide-tipped (fixing screw: M2.5 (P=0.45)×5), standard contact point No.901312 Stem dia. ø8mm ø15mm Bearing type Linear ball bearing*4 Output cable length 2m (directly extended from the main unit) Connector Plug: PRC05-P8M (TAJIMI), Compatible receptacle: PRC05-R8F (TAJIMI) Operating temperature (humidity) range 0 to 40°C (RH 20 to 80%, no condensation) Storage temperature (humidity) range –10 to 60°C (RH 20 to 80%, no condensation) Standard Accessories Wrench for contact point: No.538610 Wrench for contact point: No.210187 Remarks w/ origin point mark *1: When the spindle speed exceeds 1500mm/s, an alarm signal will be output. For use of alarm signals, please inquire separately. For models with 50mm stroke, note that over-speed error may occur depending on the impact amount when releasing the contact point freely. *2: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and water. This may not be applicable depending on the kind of liquid. *3: Patent registered (Japan, U.S.A., Germany, U.K.) *4: Patent registered (Japan) Optional Accessories • Air drive unit For 10mm range models: No.02ADE230 For 25mm range models: No.02ADE250 For 50mm range models: No.02ADE270 * Required air pressure: 0.2 to 0.4MPa * Spindle extends when air is supplied. • Rubber boot (spare) For 10mm range models: No.238772 For 25mm range models: No.962504 For 50mm range models: No.962505 • Thrust stem set For 10mm range models: No.02ADB680 Thrust stem: No.02ADB681 Clamp nut: No.02ADB682 For 25/50mm range models: No.02ADN370 Thrust stem: No.02ADN371 Clamp nut: No.02ADB692 * External dimensions are described in the dimensional drawing of the product. * Thrust stem set is a combination of thrust stem and a clamp nut. A special spanner is required for tightening. If using multiple gages, a thrust stem set for each gage and one special spanner are required. • Spanner Wrench For 10mm range models: No.02ADB683 For 25/50mm range models: No.02ADB693
17 Gage Heads FEATURES (screw top height) 10.6 or longer (stroke) Connecting cable 2m Dimensions with a thrust stem installed M9.5×0.5 Attachment thread for thrust stem M9.5×0.5 Clamp nut 02ADB682 Thrust stem 02ADB681 6 17.3 ø8-0.009 0 12.3 34 6.9 （129.5） 61.5 46.9 15.4 82.7 12 （13.8） ø9.5-0.015 0 4 14.5 9.5 14.8 0.6 75.7 14 5 45.9 20.4 30 M14×0.5 Attachment thread for thrust stem Dimensions with a thrust stem installed M18×1 Thrust stem 02ADN371 02ADB692 21 （24.2） ø18 -0.015 0 5 9 18.5 20.6 30.7 61.7 ø15 13.8 (208.3) 34 8.6 93.6 82.7 114.7 6.5 22 20 0.6 4.5 84.1 20.4 30 Clamp nut (screw top height) 26 or longer (stroke) Connecting cable 2m Unit: mm Connector 30 82.7 20.4 542-181 542-182 Dimensions Unit: mm LGF 0.1µm Resolution Type 10 / 25mm range, 0.1µm resolution, Differential square-wave output • Excellent protection against dust ingress and water splash (IP66) in harsh shop-floor environments. • Uses linear stroke ball bearings on the spindle movement for resistance to external shock and vibration. • Thrust Stem with clamp nut is optional. SPECIFICATIONS Order No. 542-181 542-182 Measuring range 10mm (.4") 25mm (1") Resolution 0.1μm Measuring accuracy (20°C) (0.8+L/50) μm (L=arbitrary measuring length (mm)) Quantizing error ±1 count Measuring force Contact point upwards 1.0N or less 4.0N or less Contact point horizontal 1.1N or less 4.3N or less Contact point downwards 1.2N or less 4.6N or less Position detection method Photoelectric linear encoder*3 Response speed*1 400mm/s Output signal 90° phase difference, differential squarewave (RS-422A equivalent) Minimum edge-to-edge interval, 200ns Output signal pitch 0.4μm Mass Approx. 310g Approx. 350g Dust/water resistance*2 Equivalent to IP66 (only gage head) Stylus ø3mm carbide-tipped (fixing screw: M2.5 (P=0.45)×5), standard contact point No.901312 Stem dia. ø8 ø15 Bearing type Linear ball bearing*4 Output cable length 2m (directly extended from the main unit) Connector Plug: RM12BPE-6PH (HIROSE), Compatible receptacle: RM12BRD-6S (HIROSE) Operating temperature (humidity) range 0 to 40°C (RH 20 to 80%, no condensation) Storage temperature(humidity) range –10 to 60°C (RH 20 to 80%, no condensation) Standard Accessories Wrench for contact point: No.538610 Wrench for contact point: No.210187 *1: When the spindle speed exceeds 400mm/s, an alarm signal will be output. Also, if using a Mitutoyo counter, an error message will be displayed. If using counters made by other companies, please consult your local Mitutoyo office. Note that over-speed error may occur depending on the impact amount when releasing the contact point freely. *2: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and water. This may not be applicable depending on the kind of liquid. *3: Patent registered (Japan, U.S.A., Germany, U.K.) *4: Patent registered (Japan) Optional Accessories • Rubber boot (spare) For 10mm range models: No.238772 For 25mm range models: No.962504 For 50mm range models: No.962505 • Thrust stem set For 10mm range models: No.02ADB680 Thrust stem: No.02ADB681 Clamp nut: No.02ADB682 For 25mm range models: No.02ADN370 Thrust stem: No.02ADN371 Clamp nut: No.02ADB692 * External dimensions are described in the dimensional drawing of the product. * Thrust stem set is a combination of thrust stem and a clamp nut. A special spanner is required for tightening. If using multiple gages, a thrust stem set for each gage and one special spanner are required. • Wrench For 10mm range models: No.02ADB683 For 25mm range models: No.02ADB693 • Extension cable (5m): 902434 • Extension cable (10m): 902433 • Extension cable (20m): 902432
18 Gage Heads 37.3 17 5.9 65.9 25.9 146.1 35 17.4 ø10.5 6.8 24.2 37 8.6 20 FEATURES ® 575-303 Dimensions Unit: mm Unit: mm Connector: LGS LGS Absolute Type 12.7mm range, 0.01 resolution, Digimatic code (SPC) output • Employing the ABSOLUTE linear encoder, the LGS always displays the position of the spindle relative to the current origin, previously set by the user, at power-on. The unlimited response speed of the gage eliminates over-speed errors. Connecting cable: 2m SPECIFICATIONS Metric Order No. 575-303 Measuring range 12.7mm Resolution 10μm Measuring accuracy (20°C) 15μm Quantizing error ±1 count Measuring force Contact point upwards 1.6N or less Contact point horizontal 1.8N or less Contact point downwards 2N or less Position detection method ABSOLUTE electrostatic capacitance type linear encoder Response speed Unlimited (not applicable to scanning measurement) Output Digimatic output Mass Approx. 190g Contact point ø3mm carbide-tipped (fixing screw: M2.5 (P=0.45)×5) Standard contact point No.901312 Stem dia. ø8mm Bearing type Slide bearing Dust/water resistance Equivalent to IP66 (only gage head) Output cable length 2m (directly extended from the main unit) Operating temperature (humidity) range 0 to 40°C (RH 20 to 80%, no condensation) Storage temperature(humidity) range –10 to 60°C (RH 20 to 80%, no condensation) * IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and water. This may not be applicable depending on the kind of liquid. Inch Order No. 575-313 Measuring range .5" Resolution .0005" Measuring accuracy (20°C) .0008" Quantizing error ±1 count Measuring force Contact point upwards 1.6N or less Contact point horizontal 1.8N or less Contact point downwards 2N or less Position detection method ABSOLUTE electrostatic capacitance type linear encoder Response speed Unlimited (not applicable to scanning measurement) Output Digimatic output Mass Approx. 190g Contact point ø3mm carbide-tipped (fixing screw: M2.5 (P=0.45)×5) Standard contact point No.901312 Stem dia. ø9.52=3/8" DIA Bearing type Slide bearing Dust/water resistance Equivalent to IP66 (only gage head) Output cable length 2m (directly extended from the main unit) Operating temperature (humidity) range 0 to 40°C (RH 20 to 80%, no condensation) Storage temperature(humidity) range –10 to 60°C (RH 20 to 80%, no condensation) * IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and water. This may not be applicable depending on the kind of liquid. Optional Accessories • Rubber boot: No.238774 (spare) • Air drive unit (metric): No.903594 • Air drive unit (inch): No.903598 • SPC cable extension adapter: No.02ADF640 • Extension cable (0.5m): No.02ADD950 • Extension cable (1m): No.936937 • Extension cable (2m): No.965014 * When connecting an extension cable, an SPC cable extension adapter is required.
19 Gage Heads 37 8.6 20 Connecting cable 2m (screw top height) M14×0.5 M18×1 Thrust stem Clamp nut 02ADN371 02ADB692 21 （24.2） ø18-0.018 0 5 9 18.5 20.6 30.7 61.7 ø15-0.015 0 13.8 (208.3) 34 8.6 93.6 114.7 6.5 22 0.6 20 4.5 84.1 Attachment thread for thrust stem 26 or longer (stroke) 37 20 8.6 Dimensions with a thrust stem installed Dimensions with a thrust stem installed (screw top height) Connecting cable 2m M14×0.5 Attachment thread for thrust stem M18×1 Thrust stem Clamp nut 02ADN371 02ADB692 9 18.5 5 （24.2） 21 142 34 13.8 （316） 0.6 37 20 8.6 61.7 20.6 56.1 8.6 4.5 124.9 174 6 29.6 20 51.5 or longer (stroke) ø18-0.018 0 ø15-0.015 0 (screw top height) 02ADB681 Thrust stem 02ADB682 Clamp nut M9.5×0.5 Attachment thread for thrust stem M9.5×0.5 46.9 61.5 15.4 6.9 （129.5） 34 12.3 17.3 20 37 8.6 6 9.5 14.5 4 ø8-0.009 0 （13.8） 12 5 45.9 75.7 14 14.8 0.6 Dimensions with a thrust stem installed Connecting cable 2m 10.6 or longer (stroke) ø9.5-0.015 0 FEATURES ® Unit: mm Connector Dimensions Unit: mm LGD Absolute Type 10 / 25 / 50mm range, 0.01mm resolution, Digimatic code (SPC) output • The use of an Absolute scale in the gage head makes it possible to maintain the user-defined origin setting even when the power is switched off. • Special linear ball bearings are used for the spindle guide to ensure a long service life. 575-326: 10mm range model 575-327: 25mm range model 575-328: 50mm range model SPECIFICATIONS Metric Order No.*1 575-326, 575-326-3/5/7 575-327, 575-327-3/5/7 575-328, 575-328-3/5/7 Measuring range 10mm 25mm 50mm Resolution 10μm Measuring accuracy (20°C) 20μm 30μm Quantizing error ±1 count Measuring force Contact point upwards 1.0N or less 4.0N or less 4.9N or less Contact point horizontal 1.1N or less 4.3N or less 5.3N or less Contact point downwards 1.2N or less 4.6N or less 5.7N or less Position detection method ABSOLUTE electrostatic capacitance type linear encoder Response speed Unlimited (not applicable to scanning measurement) Output Digimatic output External input Reference-setting signal (Absolute reference position*2 can be changed externally.) Mass*3 Approx. 260g Approx. 300g Approx. 400g Contact point ø3mm carbide-tipped (fixing screw: M2.5 (P=0.45)×5), standard contact point No.901312 Stem dia. ø8 ø15 Bearing type Linear ball bearing Dust/water resistance*4 Equivalent to IP66 (only gage head) Output cable length (directly extended from the main unit) 2m, 3m, 5m, 7m Operating temperature (humidity) range 0 to 40°C (RH 20 to 80%, no condensation) Storage temperature(humidity) range –10 to 60°C (RH 20 to 80%, no condensation) Standard Accessories Wrench for contact point: No.538610 Wrench for contact point: No.210187 *1: The last number of the Code No. represents special cable length. (meters) *2: The absolute reference point is near the lowest rest point at shipment. *3: Mass including 2m cable. *4: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and water. This may not be applicable depending on the kind of liquid. Inch Order No.*1 575-326, 575-326-3/5/7 575-327, 575-327-3/5/7 575-328, 575-328-3/5/7 Measuring range .4” 1” 2” Resolution .0005” Measuring accuracy (20°C) .001” .0012” Quantizing error ±1 count Measuring force Contact point upwards 1.0N or less 4.0N or less 4.9N or less Contact point horizontal 1.1N or less 4.3N or less 5.3N or less Contact point downwards 1.2N or less 4.6N or less 5.7N or less Position detection method ABSOLUTE electrostatic capacitance type linear encoder Response speed Unlimited (not applicable to scanning measurement) Output Digimatic output External input Reference-setting signal (Absolute reference position*2 can be changed externally.) Mass*3 Approx. 260g Approx. 300g Approx. 400g Contact point ø3mm carbide-tipped (fixing screw: M2.5 (P=0.45)×5), standard contact point No.901312 Stem dia. ø8 ø15 Bearing type Linear ball bearing Dust/water resistance*4 Equivalent to IP66 (only gage head) Output cable length (directly extended from the main unit) 2m, 3m, 5m, 7m Operating temperature (humidity) range 0 to 40°C (RH 20 to 80%, no condensation) Storage temperature(humidity) range –10 to 60°C (RH 20 to 80%, no condensation) Standard Accessories Wrench for contact point: No.538610 Wrench for contact point: No.210187 *1: The last number of the Code No. represents special cable length. (meters) *2: The absolute reference point is near the lowest rest point at shipment. *3: Mass including 2m cable. *4: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and water. This may not be applicable depending on the kind of liquid. Optional Accessories • Air drive unit For 10mm range models: No.02ADE230 For 25mm range models: No.02ADE250 For 50mm range models: No.02ADE270 * Required air pressure: 0.2 to 0.4MPa * Spindle extends when air is supplied. • Rubber boot (spare) For 10mm range models: No.238772 For 25mm range models: No.962504 For 50mm range models: No.962505 • Thrust stem set For 10mm range models: No.02ADB680 Thrust stem: No.02ADB681 Clamp nut: No.02ADB682 For 25/50mm range models: No.02ADN370 Thrust stem: No.02ADN371 Clamp nut: No.02ADB692 * External dimensions are described in the dimensional drawing of the product. * Thrust stem set is a combination of thrust stem and a clamp nut. A special spanner is required for tightening. If using multiple gages, a thrust stem set for each gage and one special spanner are required. • Spanner Wrench For 10mm range models: No.02ADB683 For 25/50mm range models: No.02ADB693 Digimatic Power Supply Unit: 965275* * To denote your AC line voltage add the following suffixes to the order No. (e.g.: 965275A): A for UL/CSA, D for CEE, E for BS, F for SAA, DC for China, K for KC, No suffix is required for JIS/100V
20 Gage Heads 30 82.7 20.4 ø9 18 ø9 ø14 ø9.5 0 -0.009 75 6.3 15.9 25.1 4.9 (thread) Clamp nut No.200365 L L=11.5 to 13.0 Connecting cable (2m) (HIROSE) RM12BPE-6PH 60.1 50.3 113 4.5 15.9 29.3 82.7 30 20.4 Connecting cable (2m) Compatible air hose (ID: 2.5) Clamp nut No.200365 Knurl L = 11.5 to 13.0 (HIROSE) RM12BPE-6PH L ø9.5 0 -0.009 20.4 30 47 ø4.2 ø7.9 ø12 ø14 113 20.2 15.9 34.9 4.9 (thread) Clamp nut No.200365 Knurl L Connecting cable (2m) Dsub 15-pin 100 L = 11.5 to 13.0 ø9.5 0 -0.009 Connecting cable (2m) 20.4 30 82.7 ø4.2 ø7.9 ø12 ø14 113 20.2 15.9 34.9 4.9 (thread) (HIROSE) RM12BPE-6PH Clamp nut No.200365 Knurl L L=11.5 to 13.0 ø9.5 0 -0.009 Optional Accessories • Rubber boot (spare) For 5mm range models: No.238773 For 10mm range models: No.238772 • Extension cable (5m): 902434 • Extension cable (10m): 902433 • Extension cable (20m): 902432 FEATURES 542-246: L-shape model, 0.1µm model 542-244: L-shape model, 1µm model 542-270: Air-lifter model *Differential square-wave output model 542-262 542-262H: High accuracy model 542-264: Low measuring force model *Sine-wave output: 542-421 542-421: Sine-wave output model Dimensions Unit: mm 82.7 30 20.4 Connecting cable RM12BPE-6PH (HIROSE) Connector* Unit: mm LGB Extremely Compact ø9.5mm Stem Type 5 / 10mm range, 0.1 / 1µm resolution, Differential square-wave output* FEATURES • Extremely compact design. • The small photoelectric linear encoder assures high precision over the entire stroke range. • The ball bearings* used in the spindle unit ensure superb durability. *Patent registered (Japan) SPECIFICATIONS Type L-shaped Straight Low measuring force Air-driven contact point*1 Sine-wave output type Order No. 542-244 542-262 542-262H 542-264 542-270*2 542-421 Measuring range 5mm (.2”) 10mm (.4”) Resolution 1μm *3 Measuring accuracy (20°C) 2μm 1μm 2μm Maximum response speed 900mm/s Measuring force Contact point upwards Approx. 0.55N or less Approx. 0.7N or less Approx. 0.5N or less Approx. 0.7N or less Contact point horizontal Approx. 0.6N or less Approx. 0.75N or less Approx. 0.55N or less Approx. 0.75N or less Contact point downwards Approx. 0.65N or less Approx. 0.8N or less Approx. 0.6N or less Approx. 0.8N or less Protection Level*4 IP54 Mass 160g 170g 170g 180g *1: Required air pressure: 0.3 to 0.4MPa *2: Spindle extends when air is supplied. *3: Depends on the settings of the connected counter. *4: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and water. This may not be applicable depending on the kind of liquid. SPECIFICATIONS Order No. 542-246 Measuring range 5mm(.2") Resolution 0.1μm Measuring accuracy (20°C) 0.8μm Measuring force Contact point upwards Approx. 0.55 or less Contact point horizontal Approx. 0.6N or less Contact point downwards Approx. 0.65 or less Output signal 90° phase difference, differential square wave (RS-422A equivalent) Position detection method Photoelectric linear encoder Response speed 380mm/s Mass 160g Dust/water resistance* Equivalent to IP54 (only gage head) Contact point Carbide ball (M2.5x0.45) Steel ball (4-48UNF) Stem dia. ø9.5mm Bearing type Linear ball bearing Output cable length 2m Connector Plug: RM12BPE-6PH (HIROSE), Compatible receptacle: RM12BRD-6S (HIROSE) Operating temperature (humidity) range 10 to 30°C (RH 20 to 80%, no condensation) Standard Accessories Wrench for contact point: No.538610 Wrench for contact point: No.538610, Stem bushing *1: IP Code is a standard which classifies and rates the degree of protection provided against the intrusion of solid objects and water. This may not be applicable depending on the type of liquid.
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